Abstract
Recently the sub-micron structured substrates of 0.74 ${mu}ell$ track pitch and 800 $\AA$groove depth are required for DVD-RAM and the track pitch is expected to be narrower as the need for the information storage density is getting higher. For the accurate replication of the land-groove structure in the stamper to the plastic substrates it is important to control the injection -compression molding process such that the integrity of the replication for the land-groove structure is maximized. in the present study polycarbonate substrates were fabricated by injection comression molding and the land-groove structure regarded as one of mold temperature and the compression pressure on the integrity of the replication were examined experimentally. An efficient design methodology using the response surface method (RSM) the central composite design(CCD) technique and the analysis-of-variance (ANOVA) was developed to obtain the optimum processing conditions which maximize the integrity of the replication with a limited number of experiments.