• 제목/요약/키워드: Micro-machine tool

검색결과 288건 처리시간 0.022초

초음파 진동을 이용한 세라믹 소재의 마이크로 홀 가공 (Micro Hole Machining for Ceramics ($Al_2O_3$) Using Ultrasonic Vibration)

  • 박성준;이봉구;최헌종
    • 한국공작기계학회논문집
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    • 제13권2호
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    • pp.104-111
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    • 2004
  • Ultrasonic machining is a non-thermal, non-chemical, md non-electorial material removal process, and thus results in minimum modifications in mechanical properties of the brittle material during the process. Also, ultrasonic machining is a non-contact process that utilize ultrasonic vibration to impact a brittle material. In this research characteristics of micro-hole machining for brittle materials by ultrasonic machining(USM) process have been investigated. And the effect of ultrasonic vibration on the machining conditions is analyzed when machining fir non-conductive brittle materials using tungsten carbide tools with a view to improve form and machining accuracy.

Run to Run 제어 기법을 이용한 자기연마 공정 관리 (Optimization of Magnetic Abrasive Polishing Process using Run to Run Control)

  • 안병운;박성준
    • 한국공작기계학회논문집
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    • 제18권1호
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    • pp.22-28
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    • 2009
  • In order to optimize the polishing process, Run to Run control scheme has been applied to the micro mold polishing in this study. Also, to fully understand the effect of parameters on the surface roughness a design of experiment is performed. By linear approximation of main factors such as gap and rotational speed of micro quill, EWMA (Exponential Weighted Moving Average) gradual mode controller is adopted as a optimizing tool. Consequently, the process converged quickly at a target value of surface roughness Ra 10nm and Rmax 50nm, and was hardly affected by unwanted process noises like initial surface quality and wear of magnetic abrasives.

케미컬오일을 이용한 ERF 연마 특성 (Characteristics of ERF Polishing using Chemical-oil)

  • 윤종호;이재종;이응숙;이동주;김영호
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 춘계학술대회 논문집
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    • pp.27-33
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    • 2004
  • Electro-theological fluid is recently used for the micro polishing of 3-dimensional micro-aspherical lens. It's also used for polishing small area defects on the wide flat wafer. Since ER fluid shows a behavior of viscosity changing under certain electric fields. micro polishing efficiency may be enhanced for certain cases. In this paper, a perfluorinated carbonyl fluoride oil based ER fluids was used to improve surface polishing rate and submicron-scale accuracy. As the polishing electrodes, micro size cylindrical tools had been used for maximizing the electric field. An experimental device, which was applied for micro polishing a number of wafers of 4inches in size and other workpiece. was made on a precision polishing system. It consisted of a steel electrode. a wafer fixture. l0㎃ current and DC 5㎸ power supply unit, and a controller unit. From the Experiments. the ER fluid is applicable for micro polishing of small parts.

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미세가공 시스템을 이용한 미세 그루브 가공실험 (Micro-groove Cutting Experiments using Micro-Machining System)

  • 이선우;이동주;이응숙;제태진
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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    • pp.263-268
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    • 2001
  • The needs for precision machining of micro to milli parts have been increased as the industry require high quality products, especially for the micro-machining of IT products. The ultra-precision machining system is essential for the micro machining of fine structures, which insures machining accuracy, low systematic and random error and repeatability. In this study, we developed micro machining system, which is equipped with air bearing stage for ultra precision machining and also we present the results of V-grooving experiments, conducted by the developed system, to verify the performance of system. The results show that the machined V-grooving had good accuracy with repeatable stability.

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미세채널 구조물 상부의 초정밀 연마 기술 연구 (A Study on the Ultra-Precision Polishing Technique for the Upper Surface of the Micro-Channel Structure)

  • 강정일;이윤호;안병운;윤종학
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2003년도 추계학술대회
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    • pp.313-317
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    • 2003
  • Micro-Channel ultra-precision polishing is a new technology used in magnetic field-assisted relishing. In this paper, an electromagnet or the i18 of test system was designed and manufactured. A size of magnetic abrasive is used on 25~75${\mu}{\textrm}{m}$ and for the polish a micro-channel upper part. A surface of channel which is not even is manufactured using magnetic abrasive finishing at upper surface of micro-channel. As a result, the surface roughness rose by 80% after upper surface of micro- channel was polished up 8 minutes by polishing.

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레이저 간섭계를 이용한 이동형 미세 변위 측정에 관한 연구 (A Study on the Portable Micro Displacement Measurement Using Laser Interferometer)

  • 최경현;양형찬
    • 동력기계공학회지
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    • 제10권2호
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    • pp.99-103
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    • 2006
  • The laser interferometer has been used for measurement of the micro displacement error. Although the laser interferometer is widely accepted as a tool for measurement of motion accuracy, the set-up procedure is time-consuming because of the strict requirement on alignment between a laser head and optic units. This paper addresses the development of a laser interferometer to measure the micro displacement for a micro machine. The portable laser interferometer which integrates a laser probe and optics, is developed for the convenient measurement. For the experiment, moving mirror set up on the micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is obtained and analyzed by LabView. Finally experiments are found out the relation between micro displacement and output signal.

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DNA Chip 용 마이크로 핀에 관한 연구 (Manufacturing of Micro Dotting Pin)

  • 신홍규;이영수;남권선;김병희
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 추계학술대회 논문집
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    • pp.500-504
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    • 2004
  • The bio-micro pin has been usually used for the biochemistry analysis. The manufacturing capability of the micro-pin and the their array with the effective and low-cost way is very important and it gives great economical benefits to developers. The micro-pin is composed of the sample channel for holding the liquid with the fixed volume, the flat tip which determines the printing quality and the pin head for preventing the rotation of the pin in the holder. In this study, we have manufactured newly designed micro-pins by the wire-EDM process with special jigs, and analyzed liquid holding and printing characteristics with respect to the variation of the shape and the tip size of the micro-pin.

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글라스 주형을 이용한 폴리머 미세 형상 핫-엠보싱 공정 연구 (Development of a Hot-Embossing Process using Ceramic Glass Molds for Polymer Micro Structures)

  • 김주한;신기훈
    • 한국공작기계학회논문집
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    • 제16권6호
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    • pp.168-174
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    • 2007
  • A ceramic glass mold was developed for micro hot-embossing and replicated polymer parts are fabricated. The glass-ceramic micro mold could be fabricated with a laser process and a wet etching process and the fabrication time could be saved a lot. Various polymer micro structures can be obtained by hot-embossing. The process parameters such as ho-embossing temperatures or pressures were investigated and optimized. This process can be applied for fabrication of micro structures for flip-chips or micro fluidic channels for bio-engineering. The advantages and disadvantages of this process are discussed, too.

마이크로 채널의 가공성에 관한 연구 (A Study on the Machinability of Micro-Channel)

  • 홍민성;김종민
    • 한국공작기계학회논문집
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    • 제17권2호
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    • pp.51-57
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    • 2008
  • Recently, the manufacturer of microscopic structures along with the development of technology to produce electronics, communication and semiconductors allows various components to be smaller in size, with higher precision. Therefore, preoccupancy of micro/nano-level machining technology in order to product micro/nano-components and parts is key issue in the field of manufacturing. In this study, machinability of micro machining was studied through the machining of aluminum, brass and steel workpiece. Inspection of the cutting force variation patterns of large numbers of micro machining indicated that characteristics of the workpiece. Surface roughness prediction methods were developed by considering the variation of the static part of the feed direction cutting force. The accuracy of the proposed approaches were tested with experimental data and the agreement between the predictions and actual observations are addressed.

고속가공기용 고추력 리니어모터 이송계의 특성 평가 (Characteristic Test of High Force Linear Motor Feed Unit for High Speed Machine Tool)

  • 송창규;황주호;박천홍;이후상;정재한
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2000년도 춘계학술대회 논문집
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    • pp.977-981
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    • 2000
  • Direct drive linear motors have large potential for use as high speed machine tool feed units since they can increase machining rates and improve servo accuracy by eliminating gear related machining problems. So, in this paper, characteristic of 2-axis linear motor feed unit are studied and control gain are adjusted considering positioning, velocity, acceleration and static stiffness. We confirm linear motor feed unit are affected value of control gain sensitively, because drive directly. From the experiment, this feed unit has l${\mu}{\textrm}{m}$ micro step resolution, 5.7${\mu}{\textrm}{m}$ positioning accuracy and under 60${\mu}{\textrm}{m}$ circularity.

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