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Development of a Hot-Embossing Process using Ceramic Glass Molds for Polymer Micro Structures  

Kim, Joo-Han (서울산업대학교 기계공학과)
Shin, Ki-Hoon (서울산업대학교 기계공학과)
Publication Information
Transactions of the Korean Society of Machine Tool Engineers / v.16, no.6, 2007 , pp. 168-174 More about this Journal
Abstract
A ceramic glass mold was developed for micro hot-embossing and replicated polymer parts are fabricated. The glass-ceramic micro mold could be fabricated with a laser process and a wet etching process and the fabrication time could be saved a lot. Various polymer micro structures can be obtained by hot-embossing. The process parameters such as ho-embossing temperatures or pressures were investigated and optimized. This process can be applied for fabrication of micro structures for flip-chips or micro fluidic channels for bio-engineering. The advantages and disadvantages of this process are discussed, too.
Keywords
Hot-embossing; Ceramic Glass; Polymer; Micro Structures; Laser;
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