• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.11
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• pp.2415-2420
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• 2002

In the present study, a new anchor design was proposed to minimize the initial deflection of micro multi-layer cantilever beam with step-up structure, which is a key component of thin film micro-mirror array. It is important to minimize the initial deflection, caused by residual stress, because it reduces the performance of the actuation. Theoretical and experimental studies were conducted to examine the cause of the initial bending deflection. It was found that the bending deflection at the anchor of the cantilever beam was the primary source of initial deflection. Various anchor designs were proposed and the initial deflections for each design were calculated by finite element analysis. The analysis results were compared with experiments. To reduce the initial deflection a secondary support was added to the conventional structure. The optimal shapes were obtained by simulation and experiment. It was found from the analysis that the ratio or horizontal and vertical dimensions of secondary support was the governing factor, which affected the initial deflection.

• Journal of the Semiconductor & Display Technology
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• v.8 no.4
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• pp.43-48
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• 2009

The aim of this paper is to describe the development of the electron-beam optic analysis algorithm for simulating the e-beam behavior concerned with electrostatic lenses and their focal properties in the micro-column of the multi-beam lithography system. The electrostatic lens consists of an array of electrodes held at different potentials. The electrostatic lens, the so-called einzel lens, which is composed of three electrodes, is used to focus the electron beam by adjusting the voltages of the electrodes. The optics of an electron beam penetrating a region of an electric field is similar to the situation in light optics. The electron is accelerated or decelerated, and the trajectory depends on the angle of incidence with respect to the equi-potential surfaces of the field. The performance parameters, such as the working distances and the beam diameters are obtained by the computational simulations as a function of the focusing voltages of the einzel lens electrodes. Based on the developed simulation algorithm, the high performance of the micro-column can be achieved through optimized control of the einzel lens.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.100-104
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• 2005

The injection molding is very effective process for various plastic products due to its high productivity. It is also good fur precise products like optical parts. Various thermoplastic materials are also available with this injection molding process. In recent, however, as the overall size of the product increases and micro or nano scale of patterns are applied to the products, we now have some problems such as low fidelity of the replication of the pattern, high molding pressure, or warpage from the in-mold stress. Injection/compression molding is studied to overcome those problems in molding large thin plate with micro pattern array on its surface. An injection compression mold is designed to 3 pieces mold for side gate. We install 4 pressure transducers and 9 thermocouples to measure the melt pressure and surface temperature in the cavity during the process. As a result, the maximum molding pressure for injection compression molding is reduced to 1/3 compared to injection molding and the uniformity of the pressure in the cavity is enhanced by about 15%.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.25 no.5
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• pp.182-187
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• 2015

The growth and characterization of micro sized AlGaN array structures selectively grown by metal organic chemical vapor deposition (MOCVD) on GaN stripes are reported. The shape of the AlGaN array structures depends on the size of exposed area for selective growth. The AlGaN array structures grown selectively on relatively large exposed area have regular shapes resembling those of the GaN stripes on the substrate, while samples selectively grown on relatively small exposed area have irregular shapes. The phonon frequency of the AlGaN array structures increases with increasing Al composition in the AlGaN structure. However, at relatively high Al composition (x = 0.28 in this research), the phonon frequency decreases slightly from the expected value not only because of large tensile strain associated with large differences between the lattice constants of the AlGaN structure and underlying GaN stripes but also changes of crystal facet direction during the selective growth.

• Smart Structures and Systems
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• v.4 no.6
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• pp.727-740
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• 2008

A down hole vertical seismic array is a sequence of instruments installed at various depths in the earth to record the ground motion at multiple points during an earthquake. Numerous studies demonstrate the unique utility of vertical seismic arrays for studying in situ site response and soil behavior. Examples are given of analyses made at two sites to show the value of data from vertical seismic arrays. The sites examined are the Lotung, Taiwan SMART1 array and a new site installed at Jingliao, Taiwan. Details of the installation of the Jingliao array are given. ARX models are theoretically the correct process models for vertical wave propagation in the layered earth, and are used to linearly map deeper sensor input signals to shallower sensor output signals. An example of Event 16 at the Lotung array is given. This same data, when examined in detail with a Bayesian inference model, can also be explained by nonlinear filters yielding commonly accepted soil degradation curves. Results from applying an ARMAX model to data from the Jingliao vertical seismic array are presented. Estimates of inter-transducer soil increment resonant frequency, shear modulus, and damping ratio are presented. The shear modulus varied from 50 to 150 MPa, and damping ratio between 8% and 15%. A new hardware monitoring system - TerraScope - is an affordable 4-D down-hole seismic monitoring system based on independent, microprocessor-controlled sensor Pods. The Pods are nominally 50 mm in diameter, and about 120 mm long. An internal 16-bit micro-controller oversees all aspects of instrumentation, eight programmable gain amplifiers, and local signal storage.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.5
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• pp.418-425
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• 2019

A piezoelectric ceramic fiber composite (PCFC) was successfully fabricated using $0.69Pb(Zr_{0.47}Ti_{0.53})O_3-0.31[Pb(Zn_{0.4}Ni_{0.6})_{1/3}Nb_{2/3}]O_3$ (PZT-PZNN) for use in small-scale wind energy harvesters. The PCFC was formed using an epoxy matrix material and an array of Ag/Pd-coated PZT-PZNN piezo-ceramic fibers sandwiched by Cu interdigitated electrode patterned polyethylene terephthalate film. The energy harvesting performance was evaluated in a custom-made wind tunnel while varying the wind speed and resistive load with two types of flutter wind energy harvesters. One had a five-PCFC array vertically clamped with a supporting acrylic rod while the other used the same structure but with a five-PCFC cantilever array. Stainless steel (thickness: $50{\mu}m$) was attached onto one side of the PCFC to form the PZT-PZNN cantilever. The output power, in general, increased with an increase in the wind speed from 2 m/s to 10 m/s for both energy harvesters. The highest output power of $15.1{\mu}W$ at $14k{\Omega}$ was obtained at a wind speed of 10 m/s for the flutter wind energy harvester with the PZT-PZNN cantilever array. The results presented here reveal the strong potential for wind energy harvester applications to supply sustainable power to various IoT micro-devices.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2519-2523
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• 2003

Ultrasonic sensors are widely used in mobile robot applications to recognize external environments, because they are cheap, easy to use, and robust under varying lighting conditions. In most cases, a single ultrasonic sensor is used to measure the distance to an object based on time-of-flight (TOF) information, whereas multiple sensors are used to recognize the shape of an object, such as a corner, plane, or edge. However, the conventional sequential driving technique involves a long measurement time. This problem can be resolved by pulse coding ultrasonic signals, which allows multi-sensors to be fired simultaneously and adjacent objects to be distinguished. Accordingly, the current presents a new simultaneous coded driving system for an ultrasonic sensor array for object recognition in autonomous mobile robots. The proposed system is designed and implemented using a DSP and FPGA. A micro-controller board is made using a DSP, Polaroid 6500 ranging modules are modified for firing the coded signals, and a 5-channel coded signal generating board is made using a FPGA. To verify the proposed method, experiments were conducted in an environment with overlapping signals, and the flight distances for each sensor were obtained from the received overlapping signals using correlations and conversion to a bipolar PCM-NRZ signal.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.63 no.3
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• pp.395-403
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• 2014

This paper presents a new approach to improve the signal to noise ratio (SNR) for local seismic disaster preventing system in densely populated area. The seismic data measured in the local site includes various sensing noises (offset or measurement noise) and man-made/natural noises (road and rail traffic noise, rotating or hammering machinery noise, human activity noise such as walking and running, wind/atmospheric pressure-generated noise, etc.). These additive noises are different in time and frequency characters. The proposed method uses 3-stages processing to reduce these different additive noises. In the first stage, misalignment offset noise are diminished by time average processing, and then the second and third stages, coherent/incoherent noises such as man-made/natural noises are suppressed by array stacking. In addition, we derived the theoretical equation of the SNR gain improved by the proposed method. To evaluate the performance of the proposed method, computer simulations were performed with real seismic data and test equipment generated data as the input.

• Journal of Korea Multimedia Society
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• v.19 no.3
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• pp.548-556
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• 2016

Integral imaging is an auto-stereoscopic display method that can produce 3D image of a finite viewing window through an array of micro elemental lenses. Integral imaging requires the pickup part of each elemental images acquisition and display part of reconstruction of the images. The successful reconstructed image depends on various parameters such as distance between lens arrays and display device, focal length of lenses, and a number of the array. In this paper, we present reconstruction emulator for display of Integral imaging in order to adjust parameters for 3D contents reconstruction and to observe the result from different configuration. Especially, we provide the user interface for the emulator to control the distance easily. We have confirmed through various experiments that the emulator adjusted the distance and could check error in the process of creating elemental images.

• Journal of Welding and Joining
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• v.15 no.1
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• pp.125-134
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• 1997

This study was conducted by L9 orthogonal array to obtain optimum spray parameters for This study was conducted by L9 orthogonal array to obtain optimum spray parameters for $Cr_3C_2 - 7wt%$(80wt%Ni-20wt%Cr) coating powder. The factors were hydrogen flow rate, oxygen flow rate, gun-to-work distance, powder feed rate. And evaluation methods for the coating were surface roughness, oxygen concentration, micro-hardness, pore size and distribution, low angle ($30^{\circ}$) erosion rate, and microstructure of coating. The optimum HVOF spray conditions were proved as follows : hydroen flow rate ; 681 SLPM, oxygen flow rate ; 215 SLPM $H^2/O^2 ratio= 3.16), gun-to-work distance ; 22cm, powder feed rate; 25g/min. The hardness (Hv300) was 1147 and the erosion rate ($30^{\circ}$degree) was $3.16\times10^{-4}$g/g. It is believed that the optimized spray conditions can be improved the wear-resistance and anti-erosion characteristics of the coating.