• 제목/요약/키워드: Micro-Step

검색결과 481건 처리시간 0.029초

반도체 노광 공정의 DI 세정과 Oxide의 HF 식각 과정이 실리콘 표면에 미치는 영향 (Effects of DI Rinse and Oxide HF Wet Etch Processes on Silicon Substrate During Photolithography)

  • 백정헌;최선규;박형호
    • 한국재료학회지
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    • 제20권8호
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    • pp.423-428
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    • 2010
  • This study shows the effects of deionized (DI) rinse and oxide HF wet etch processes on silicon substrate during a photolithography process. We found a fail at the wafer center after DI rinse step, called Si pits, during the fabrication of a complementary metal-oxide-semiconductor (CMOS) device. We tried to find out the mechanism of the Si pits by using the silicon wafer on CMOS fabrication and analyzing the effects of the friction charge induced by the DI rinsing. The key parameters of this experiment were revolution per minute (rpm) and time. An incubation time of above 10 sec was observed for the formation of Si pits and the rinsing time was more effective than rpm on the formation of the Si pits. The formation mechanism of the Si pits and optimized rinsing process parameters were investigated by measuring the charging level using a plasma density monitor. The DI rinse could affect the oxide substrate by a friction charging phenomenon on the photolithography process. Si pits were found to be formed on the micro structural defective site on the Si substrate under acceleration by developed and accumulated charges during DI rinsing. The optimum process conditions of DI rinse time and rpm could be established through a systematic study of various rinsing conditions.

하천의 지형학적 인자와 식생종수의 관계 -한강수계를 중심으로- (Relationship between Stream Geomophological Factors and the Vegetation Abundance - With a Special Reference to the Han River System -)

  • 이광우;김태균;심우경
    • 한국조경학회지
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    • 제30권3호
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    • pp.73-85
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    • 2002
  • The purpose of this study was to develop prediction models for plant species abundance by stream restoration. Generally the stream plant is affected by stream gemophology. So in this study, the relationship between the vegetation abundance and stream gemophology was developed by multiple regression analysis. The stream characteristics utilized in this study were longitudinal slope, transectional slope, micro-landforms through the longitudinal direction, riparian width and geometric mean diameter and biggest diameter of bed material, and cumulated coarse and fine sand weight portion. The Pyungchang River with mountainous watershed and the Kyungan stream and the Bokha stream in the agricultural region were selected and vegetation species abundance and stream characteristics were documented from the site at 2~3km intervals from the upper stream to the lower. The Models for predicting the vegetation abundance were developed by multiple regression analysis using SPSS statistics package. The linear relationship between the dependant(species abundance) and independant(stream characteristics) variables was tested by a graphical method. Longitudinal and transectional slope had a nonlinear relationship with species abundance. In the next step, the independance between the independant variables was tested and the correlation between independant and dependant variables was tested by the Pearson bivariate correlation test. The selected independant variables were transectional slope, riparian width, and cumulated fine sand weight portion. From the multiple regression analysis, the $R^2$for the Pyungchang river, Kyungan stream, Bokga stream were 0.651, 0.512 and 0.240 respectively. The natural stream configuration in the Pyungchang river had the best result and the lower $R^2$for Kyunan and Bokha stream were due to human impact which disturbed the natural ecosystem. The lowest $R^2$for the Bokha stream was due to the shifting sandy bed. If the stream bed is fugitive, the prediction model may not be valid. Using the multiple regression models, the vegetation abundance could be predicted with stream characteristics such as, transection slope, riaparian width, cumulated fine sand weigth portion, after stream restoration.

마이크로 반구 쉘 형상의 화학증착 탄화규소 TRISO 코팅층의 파괴강도 직접평가 (Direct Strength Evaluation of the CVD SiC Coating of TRISO Coated Fuel Particle with Micro Hemi Spherical Shell Configuration)

  • 이현근;김도경
    • 한국세라믹학회지
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    • 제44권7호
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    • pp.368-374
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    • 2007
  • CVD-SiC coating has been introduced as a protective layer in TRISO nuclear fuel particle of high temperature gas cooled reactor (HTGR) due to its excellent mechanical stability at high temperature. In order to prevent the failure of the TRISO particles, it is important to evaluate the fracture strength of the SiC coating layer. It is needed to develop a new simple characterization technique to evaluate the mechanical properties of the coating layer as a pre-irradiation step. In present work, direct strength measurement method with the specimen of hem i-spherical shell configuration was suggested. The indentation experiment on a hemisphere shell with a plate indenter was conducted. The fracture strength of the coating layer is related with the critical load for radial cracking of the shell. The finite element analysis was used to drive the semi-empirical equation for the strength measurement. The SiC hemispherical shells were successfully recovered from the section-grinding of TRISO coated particle and successive heat treatment in air. The strength of CVD-SiC coating layer was evaluated from the experimentally measured critical load during the indentation on SiC hemisphere shell. Weibull diagram of fracture strength was also constructed. This study suggested a new strength equation and experimental method to measure the fracture strength of CVD-SiC coating of TRISO coated fuel particles.

전력선을 이용한 전자식 안정기 조광 신호 전송과 특성 측정 (Dimming Control Signal Transmisson of Electronic Ballast on the Power Line and Characteristics Measurement)

  • 이상곤;정은택;강복연;양병렬;유홍균
    • 한국통신학회논문지
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    • 제19권4호
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    • pp.691-700
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    • 1994
  • 본 논문에서는 전력선을 이용한 조광용 전자식 안정기의 원격 제어신호 전송 방식을 고안하였다. 기존의 방식은 상측파기 완전히 전단된 두개의 신호가 N 주기의 간격으로 전송하는 방식이며, 제안된 방식은 다른 상측파 내의 임의의 명령에 따라 일정 위상에서 파가 절단된 신호를 전송하는 방식이다. 이 방식은 파형을 절단하는데서 오는 전송전력의 손실을 최소한으로 줄일 수 있다. 구현에 있어서 파형의 절단 위치 결정과 수신신호 위상을 결정하기 위한 타이머가 필요하기 때문에 타이머가 내장된 마이크로프로세소를 이용해 정확한 위상 계산을 하도록 했다. 결과적으로 전력선을 이용한 전자식 안정기의 원격 제어신호의 전송기법에 있어서 기존의 방식보다 전력전송 효율이 좋은 원격 제어기를 구현하였고 그특성을 측정하였다.

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세포증식을 위한 LED 조사 시스템 개발 (Development of LED Irradiation System for Cell Proliferation)

  • 천민우;박용필;이호식;김태곤;김영표
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2010년도 춘계학술대회
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    • pp.581-582
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    • 2010
  • 광 의료 분야 중 저출력레이저 치료에 사용되는 레이저와 같은 특정 파장을 발생하고 레이저보다 안정적으로 사용이 가능한 고휘도 LED를 조사하여 광 의료 분야에 적용할 수 있는 시스템을 개발하였다. 광조사 시스템은 마이크로 컨트롤러, FPGA, TLC5941 및 고휘도 LED를 이용하여 설계 및 제작하였으며 광조사 시간, 강도, 주기 등 세포 증식에 영향을 칠 수 있는 다양한 변수들의 제어가 가능하도록 하였다. 또한 세포 배양에 사용되는 인큐베이터 내부의 조사가 용이하도록 탈부착이 가능한 모듈화 된 LED를 설계 제작하여 세포 증식에서 발생 가능한 생물학적 변수를 최소화하였다.

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The Tumor Suppressor, p53, Negatively Regulates Non-Canonical NF-κB Signaling through miRNA-Induced Silencing of NF-κB-Inducing Kinase

  • Jang, Hanbit;Park, Seulki;Kim, Jaehoon;Kim, Jong Hwan;Kim, Seon-Young;Cho, Sayeon;Park, Sung Goo;Park, Byoung Chul;Kim, Sunhong;Kim, Jeong-Hoon
    • Molecules and Cells
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    • 제43권1호
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    • pp.23-33
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    • 2020
  • NF-κB signaling through both canonical and non-canonical pathways plays a central role in immune responses and inflammation. NF-κB-inducing kinase (NIK) stabilization is a key step in activation of the non-canonical pathway and its dysregulation implicated in various hematologic malignancies. The tumor suppressor, p53, is an established cellular gatekeeper of proliferation. Abnormalities of the TP53 gene have been detected in more than half of all human cancers. While the non-canonical NF-κB and p53 pathways have been explored for several decades, no studies to date have documented potential cross-talk between these two cancer-related mechanisms. Here, we demonstrate that p53 negatively regulates NIK in an miRNA-dependent manner. Overexpression of p53 decreased the levels of NIK, leading to inhibition of the non-canonical NF-κB pathway. Conversely, its knockdown led to increased levels of NIK, IKKα phosphorylation, and p100 processing. Additionally, miR-34b induced by nutlin-3 directly targeted the coding sequences (CDS) of NIK. Treatment with anti-miR-34b-5p augmented NIK levels and subsequent non-canonical NF-κB signaling. Our collective findings support a novel cross-talk mechanism between non-canonical NF-κB and p53.

인지증 판별 성능 향상을 위한 스펙트럼 국부 영역 분석 방법 (Local Region Spectral Analysis for Performance Enhancement of Dementia Classification)

  • 박준규;백성준
    • 한국산학기술학회논문지
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    • 제12권11호
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    • pp.5150-5155
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    • 2011
  • 인지증을 유발하는 원인은 알츠하이머병(Alzheimer's Disease: AD)과 혈관성 인지증(vascular Dementia: VD)이 가장 높은 비율을 차지한다. 본 논문에서는 측정된 라만 스펙트럼에서 AD, VD, 정상(NOR: normal)을 분류하기 위해 변별력 있는 영역을 조사하고, 특징 변환을 이용한 분류 실험 결과를 제시하였다. 혈소판으로부터 측정한 라만 스펙트럼은 먼저 smoothing을 적용한 다음 배경 잡음을 제거하고 스펙트럼의 기준 피크를 중심으로 그 위치를 정렬하였고 minmax 방법을 사용하여 정규화 하였다. 전처리를 거친 스펙트럼은 AD와 VD, NOR를 변별하기 가장 용이한 영역을 결정하기 위해 조사되었으며, 그 결과 725-777, 1504-1592, 1632-1700 $cm^{-1}$ 영역에서 스펙트럼이 많은 차이를 보임을 확인하였다. 분류 실험은 선택한 각 영역에 대하여 PCA(principal component analysis)와 NMF(nonnegative matrix factorization) 방법을 적용하여 얻은 특징을 이용하여 행하였다. 총 327개의 라만 스펙트럼에 대한 MAP(maximum a posteriori probability) 분류 실험 결과에 따르면, 본 연구에서 제안된 국부 영역 변환 특징을 사용했을 때 평균 92.8 %의 분류율을 보임을 알 수 있었다.

중국의 혁명역사기록물의 목록기술과 검색분류(1) (Bibliographical Description and Classification Indexing For Revolutionary Historical Archives in China(1))

  • 이승휘
    • 기록학연구
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    • 제4호
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    • pp.131-161
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    • 2001
  • This paper is to examine the bibliographical description of the revolutionary historical archives and the standardization of the archives management in China. The standardization in the field of records and archives management was not initiated on its own way but as a part of national - leveled standardization. As a first step National Committee on Technical Standardization of Literature was established, followed by the establishing of Committee on Technical Standardization of Micro - filming and Committee of Technical Standardization of Paper Form. The standardization of the records and archives management was carried out in the context of functions of these three committees. In 1983 the standardization in the sphere of records and archives management speeded up, when the National Archives Administration formed small organizations which led the standardization work all over the country. A committee of standardization originated from small organizations and it brought a great progress of the standardization. If some opinions on standardization were submitted from records offices or related offices, they were examined by the committee of standardization. The opinions that were submitted by the committee of standardization were examined by the National Archives Administration which proclaimed it officially. The Chinese government commenced to establish the bibliographical data centre for historical archives and materials on the basis of this process of standardization. In the case of the revolutionary historical archives the description was made on the level of sources(provenance), which was sent to the bibliographical data centre for historical archives and materials. The Chinese government set digitalizing as a goal in records and archives management in the middle of 1990's. It was regulated that the description of records item that should be transferred to the center must be digitalized. However, the description of the file level was not made separately being reflected in the process of description of item level. (The second part of the paper will be released in the next volume).

용액 퍼짐 상분리법을 통한 마이크로 기공 분리막 제조 (Fabrication of Micro-Porous Membrane via a Solution Spreading Phase Inversion Method)

  • 최욱;박철호
    • 멤브레인
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    • 제29권2호
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    • pp.105-110
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    • 2019
  • 다공성 분리막은 입자성 물질을 제거하는데 산업적으로 다양하게 응용되고 있다. 기존 다공성 분리막 제작 방법과 다르게, 용액퍼짐 상분리법은 매우 간단하게 기공을 형성할 수 있다. 먼저 지지층으로 메쉬 위에 물을 적신 후, 물과 혼합되지 않은 용매에 폴리설폰 용액을 흘려준다. 이때 물과 혼합되지 않은 용매는 쉽게 기화되어 폴리설폰은 얇은 막으로 만들어지게 된다. 기공을 형성하기 위해 폴리설폰 용액에 물과 혼합할 수 있는 물질을 넣게 되면, 넣어주는 농도 비율에 따라 기공크기를 조절할 수 있게 된다. 막의 두께는 쉽게 용액의 농도로 조절이 된다. 다공성 분리막은 메쉬의 형성을 그대로 유지하고 있어 3차원 구조체를 형성하는데 매우 유용하다. 본 연구에서 제시된 용액 퍼짐 상분리법은 매우 낮은 생산단가와 쉬운 공정조절에 의해 기존 분리막에 비해 높은 가격경쟁력을 가질 수 있는 특징을 보이고 있다.

CEO Overseas Experience and Firm Internationalization: Before and After the Global Financial Crisis

  • Kim, Jiyoon;Park, Jong-Hun;Kim, Changsu
    • Journal of Korea Trade
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    • 제24권7호
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    • pp.54-72
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    • 2020
  • Purpose - This study explores the contextual factors that affect the relationship between CEO overseas experience and firm internationalization. This study incorporates a wide range of contextual factors, including mega, macro, and micro variables. In particular, this study goes a step further from prior studies by incorporating a higher-order variable i.e., the global financial crisis that can constrain the managerial discretion of a CEO. Design/methodology - To structure the balanced data set before and after the 2008 global financial crisis, we used the data for the years from 2002 to 2014 from a sample of Korean manufacturing firms. Ultimately, 1101 firm-year unbalanced panel observations from 101 firms were used for the analysis. Findings - Our main findings can be summarized as follows. CEO overseas experience is positively related to firm internationalization. However, this relationship varies depending on the CEOs level of managerial discretion. As for the constraining moderation, the global financial crisis weakened the positive relationship between CEO overseas experience and firm internationalization. As for the enabling moderation, the CEOs tenure strengthened the relationship. Originality/value - This study adopted the knowledge, skills, and abilities (KSA) framework to explain the relationship between CEO overseas experience and firm internationalization. Moreover, we argue that the CEO-internationalization relationship depends on the specific context of the managerial discretion, focusing on the 2008 global financial crisis. Empirically, this study adopted the 2SLS procedure to correct endogeneity. Instead of taking the actual value of prior internationalization as a control, we estimated prior internationalization using the instrument variables at an industry level. This procedure made our estimation more robust.