• 한국세라믹학회지
• /
• 제40권1호
• /
• pp.104-108
• /
• 2003

스크래칭 시험(scratching test)을 이용하여 단결정 실리콘의 수직하중에 대한 마찰계수, AE(Acoustic Emission) 신호와 긁힌 자취의 미세균열을 관찰하고 그 결정구조를 분석하였다. 스크래칭 시험은 하중인가속도(loading rate)를 100N/min으로 하고 스크래칭 속도(scratching speed)를 1, 3, 6, 10mm/min의 4가지로 하여 최대 30N이 될 때까지 행하였다. 그 결과, 수직하중 또는 스크래칭 속도가 증가할 때 마찰계수, AE, 균열밀도는 증가하는 경향을 나타내었다. 스크래칭, 자취에 대한 마이크로 라만 분광법을 이용한 결정구조 분석결과, 스크래칭 속도가 느린 조건에서 압력인가에 따른 실리콘의 다이아몬드 구조에서 다른 고압상의 구조로의 상전이 현상을 관찰할 수 있었다.

• Carbon letters
• /
• 제13권1호
• /
• pp.34-38
• /
• 2012

Successful application of graphene requires development of various tools for its chemical modification. In this paper, we present a Raman spectroscopic investigation of the effects of UV light on single layer graphene with and without the presence of $O_2$ molecules. The UV emission from a low pressure Hg lamp photolyzes $O_2$ molecules into O atoms, which are known to form epoxy on the basal plane of graphene. The resulting surface epoxy groups were identified by the disorder-related Raman D band. It was also found that adhesive residues present in the graphene samples prepared by micro-mechanical exfoliation using adhesive tape severely interfere with the O atom reaction with graphene. The UV-induced reaction was also successfully applied to chemical vapor deposition-grown graphene. Since the current method can be readily carried out in ambient air only with UV light, it will be useful in modifying the surfaces of graphene and related materials.

• 열처리공학회지
• /
• 제13권3호
• /
• pp.170-176
• /
• 2000

A novel method for improving the adhesion of diamond films on cemented carbide tool inserts has been investigated. This method is based on the formation of a compositionally graded interface by developing a microrough surface structure using a pulsed laser process. Residual stresses of diamond films deposited on laser modified cemented carbides were measured as a function of substrate roughness using micro-Raman spectroscopy. The surface morphology and roughness of diamond films and cemented carbides were also investigated at different laser modification conditions. It was found that the increasing interface roughness reduced the average residual stress of diamond films, resulting in improved adhesion of diamond films on cemented carbides.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제40회 동계학술대회 초록집
• /
• pp.430-430
• /
• 2011

Graphene, one single atomic layer of graphite, has attracted extensive attention in various research fields since its first isolation from graphite. Application in the future electronics requires better understanding and manipulation of electronic properties of graphene supported on various solid substrates. Here, we present a study on charge doping and morphology of graphene prepared on atomically flat and highly polar mica substrates. Ultra-flat single-layer graphene was prepared by micro-exfoliation of graphite followed by deposition on cleaved mica substrates. Atomic force microscopy (AFM) revealed presence of ultra-thin water films formed in a layer-by-layer manner between graphene and mica substrates. Raman spectroscopy showed that a few angstrom-thick water films efficiently block electron transfer from graphene to mica. Hole doping in graphene caused by underlying mica substrates was also visualized by scanning Kelvin probe microscopy (SKPM).

• E2M - 전기 전자와 첨단 소재
• /
• 제9권5호
• /
• pp.470-475
• /
• 1996

Fiber-textured diamond films have been deposited on scratched silicon(100) substrate by micro wave .plasma enhanced chemical vapor deposition at the condition of micro wave power : 950 W, pressure : 60 torr, H$_{2}$ gas flow rate : 50 sccm, CH$_{4}$ gas flow rate : 1.5 sccm, substrate temperature : about 900.deg. C and deposition time : 20 hours. The films were characterized by mean of scanning electron microscopy, Raman spectroscopy and X-ray analysis.

• Bulletin of the Korean Chemical Society
• /
• 제11권5호
• /
• pp.460-463
• /
• 1990

The normal and fluorinated high-Tc superconducting materials, $YBa_2Cu_3O_{7-x}F_y$with $0.25{\leq}x{\leq}0.55\;and\;0.00{\leq}y{\leq}0.30$, were synthesized to investigate the dopping effect of fluorine atom on the superconductivity of Y123 and studied by X-ray diffraction analysis and electron probe microanalysis, resistivity and thermopower measurements, and polarized micro-Raman spectroscopy. The reproducible micro-Raman spectra were recorded and analyzed. The coherent assignments could be suggested for the spectra of normal and fluorinated samples. The fluorine atoms introduced were found to be substituted for oxygen in pyramidal Cu-O units rather than in Cu-O chains. The unit cell parameters were decreased upon the substitution of oxygen by fluorine atom. From the decreasing cell parameters and Tc, the increasing thermopower, and the possible assignments of the vibrational modes, it could be suggested that the dopping of fluorine atom localizes the superconducting electrons in Y123.

• 한국표면공학회지
• /
• 제43권1호
• /
• pp.7-11
• /
• 2010

Solid phase crystallization (SPC) is a simple method in producing a polycrystalline phase by annealing amorphous silicon (a-Si) in a furnace environment. Main motivation of the crystallization technique is to fabricate low temperature polycrystalline silicon thin film transistors (LTPS-TFTs) on a thermally susceptible glass substrate. Studies on SPC have been naturally focused to the low temperature regime. Recently, fabrication of polycrystalline silicon (poly-Si) TFT circuits from a high temperature polycrystalline silicon process on steel foil substrates was reported. Solid phase crystallization of a-Si films proceeds by nucleation and growth. After nucleation polycrystalline phase is propagated via twin mediated growth mechanism. Elliptically shaped grains, therefore, contain intra-granular defects such as micro-twins. Both the intra-granular and the inter-granular defects reflect the crystallinity of SPC poly-Si. Crystallinity and SPC kinetics of high temperatures were compared to those of low temperatures using Raman analysis newly proposed in this study.

• 한국표면공학회지
• /
• 제42권4호
• /
• pp.173-178
• /
• 2009

DLC film was synthesized on plastic injection mold(SKD11, $30\;mm\;{\times}\;19\;mm\;{\times}\;0.5\;mm$) and Si(100) wafer for 2 h at $130^{\circ}C$ under 6 mTorr using hybrid method of rf sputtering and ion source. The obtained film was analysed by Raman spectroscopy, AFM, TEM, Nano indenter and scratch tester, etc. The film was defined as an amorphous phase. In the Raman spectrum, broad peak of $sp^2$-bonded carbon attributed to graphite at $1550\;cm^{-1}$ were observed, and the ratio of ID($sp^3$ diamond intensity)/IG($sp^2$ graphite intensity) was approximately 0.54. The adhesion of DLC film was more than 80 N with scratch tester when $0.2\;{\mu}m$ thickness Cr was coated as interlayer. The micro-hardness was distributed at 35~37 GPa. The friction coefficient was 0.02~0.07, and surface roughness(Ra) was 0.34~1.64 nm. The lifetime of DLC coated plastic injection mold using as a connector part in computer was more than 2 times of non-coated mold.

• Progress in Superconductivity
• /
• 제6권2호
• /
• pp.95-98
• /
• 2005

We present results of Raman spectroscopic studies of superconducting $YBa_2Cu_3O_7$ (YBCO) coated conductors. Raman scattering is used to characterize optical phonon modes, oxygen content, c-axis misalignment, and second phases of the YBCO coated conductors at a micro scale. A two-dimensional mapping of Raman spectra with transport properties has been performed to elucidate the effect of local propertied on current path and superconducting phase. The information taken from the local measurement will be useful for optimizing the process condition.

• 한국산업정보학회:학술대회논문집
• /
• 한국산업정보학회 2001년도 춘계학술대회논문집:21세기 신지식정보의 창출
• /
• pp.224-231
• /
• 2001

2.45 GHz 마이크로웨이브를 사용하는 전자회전공명 플라즈마를 이용하여 화학적 기상증착(electron cyclotron resonance plasma enhanced chemical vapor deposition; ECR-PECVD) 방법으로 ECR 마이크로웨이브 power, CH$_4$/H$_2$가스 혼합비와 유량, 증착시간, 그리고 기판 bias 전압 등을 변화시켜 가면서 수소가 함유된 비정질 탄소(a-C:H) 박막을 증착하였고, 증착시킨 박막의 특성을 AES(Auger electron spectroscopy), ERDA(elastic recoil detection analysis), FTIR(Fourier transform infrared) 및 Raman 측정 등으로 조사하였다. 증착시킨 a-C:H 박막은 탄소 및 수소원소들로만 구성되어 있음을 AES 측정으로 확인하였다. 그리고 FTIR 측정으로부터 a-C:H 박막은 대부분 sp$^3$결합을 하고 있고 일부는 sp$^2$결합을 하고 있음을 확인하였으며, CH$_4$/H$_2$가스 혼합비와 유량의 변화가 a-C:H 박막의 탄소와 수소의 결합구조에 큰 영향을 미치지 않았으며, 다만 증착시간이 증가할수록 탄소와 수소 원자들의 결합구조가 $CH_3$구조에서 CH$_2$나 CH 구조로 변하고 있음을 알았다. 또한 Raman 스펙트럼의 Gaussian curve fitting을 통하여 sp$^3$/sp$^2$의 결합수에 비례하는 D 및 G peak의 면적 강도비(I$_{D}$/l$_{G}$)는 기판 bias 전압을 증가시킬수록 증가하였으며, 경도도 역시 증가하였다.하였다.