• Proceedings of the KWS Conference
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• 2002.10a
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• pp.720-725
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• 2002

In recent years, techniques for micro-assembly with high repeatability under a scanning electron microscope (SEM) are required to construct highly functional micro-devices. Adhesion phenomenon is more significant for smaller objects, becanse adhesional force is proportional to size of the objects while gravitational force is proportional to the third power of it. It is also known that adhesional force between micro-objects exposed to Electron Beam irradiation of SEM increases with the elapsed time. Therefore, mechanical manipulation techniques using a needle-shaped tool by adhesional force are often adopted in basic researches where micro-objects are studied. These techniques, however, have not yet achieved the desired repeatability because many of these could not have been supported theoretically. Some techniques even need the process of trial-and-error. Thus, in this paper, mechanical and adhesional micro-manipulation are analyzed theoretically by introducing new physical factors, such as adhesional force and rolling-resistance, into the kinematic system consisting of a sphere, a needle-shaped tool, and a substrate. Through this analysis, they are revealed that how the micro-sphere behavior depends on the given conditions, and that it is possible to cause the fracture of the desired contact interfaces selectively by controlling the force direction in which the tool-tip loads to the sphere. Based on the acquired knowledge, a mode diagram, which indicates the micro-sphere behavior for the given conditions, is designed. By refening to this mode diagram, the practical technique of the pick and place manipulation of a micro-sphere under an SEM by the selective interface fracture is proposed.

• Proceedings of the KWS Conference
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• 2002.10a
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• pp.781-784
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• 2002

Adhesion phenomenon is more significant for smaller objects, because adhesional force is proportional to size of the objects while gravitational force is proportional to the third power of it. For the purpose of microassembly, theoretical understanding is required for the Adhesion phenomenon. Authors have developed a force measurement system in an ultra-high vacuum chamber of Auger electron spectroscopy. The force between arbitrary combination of materials can be measured at a pressure less than 100 nPa after and before Ar ion sputtering and chemical analysis for several atomic layers of the surface. The results are successfully interpreted with a theory of contact mechanics. Since surface energy is quite important in the interpretation, electronic theory is used to evaluate the surface energy. In the manipulation of small objects, the adhesional force is always attractive. Repulsive force is essential for the manipulation. It can be generated by Coulomb interaction. The voltage required for detachment is theoretically analyzed and the effect of boundary conditions on the detachment is obtained. The possibility and limitations of micro-manipulation using both the adhesion phenomenon and Coulomb interaction are theoretically clarified. Its applicability to nano-technology is found to be expected.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.1
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• pp.3-9
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• 2010

Micro particles in fluid can be manipulated by using ultrasonic standing wave since the ultrasound makes particles move by means of its acoustic radiation force. This work concerns the micro particle manipulation system using ultrasonic standing wave which consists of a microchannel, a reflector, and an ultrasonic transduer. In the present system, the effects of the structural elements should be carefully considered to comprehend the system and find the optimal operational condition. In this investigation, finite element analysis was employed to analyze the system. Some interesting characteristics on the reflector thickness, the channel width, and the operational frequency were observed. Several experimental results were compared with the analytic results. Consequently, this work solidifies the importance of those system parameters and reveals the possibility of various applications of the particle manipulation using ultrasonic standing wave.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.04a
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• pp.565-570
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• 2009

Micro particles in fluid can be manipulated by using ultrasonic standing wave since the ultrasound makes particles move by means of its acoustic radiation force. This work concerns the micro particle manipulation system using ultrasonic standing wave which consists of a microchannel, an adaptive layer, a reflector, and an ultrasonic transduer. In the present system, the effects of the structural elements should be carefully considered to comprehend the system and find the optimal operational condition. In this investigation, finite element analysis was employed to analyze the system. Some interesting characteristics on the reflector thickness, the channel width, and the operational frequency were observed. Several experimental results were compared with the analytic results. Consequently, this work solidifies the importance of those system parameters and reveals the possibility of various applications of the particle manipulation using ultrasonic standing wave.

• Journal of Mechanical Science and Technology
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• v.20 no.5
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• pp.668-674
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• 2006

In order to develop a cell based robot, we present a micro-mechanical force measurement system for the biological muscle actuators, which utilize glucose as a power source. The proposed measurement system is composed of a micro-manipulator, a force transducer with a glass probe, a signal processor, an inverted microscope and video recording system. Using this measurement system, the contractile force and frequency of the cardiac myocytes were measured in real time and the magnitudes of the contractile force of each cardiac myocyte under different conditions were compared. From the quantitative experimental results, we could estimate that the force of cardiac myocytes is about $20\sim40{\mu}N$, and show that there are differences between the control cells and the micro-patterned cells.

• Journal of Biomedical Engineering Research
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• v.34 no.4
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• pp.189-196
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• 2013

Dielectrophoresis(DEP) is useful in manipulation and separation of micro-sized particles including biological samples such as bacteria, blood cells, and cancer cells in a micro-fluidic device. Especially, those separation and manipulation techniques using DEP in combination of micro fabrication technique have been researched more and more. Recently, it is revealed that a window structure of insulating layer in microfluidic DEP chip is key role in trap of micro-particles around the window structure. However, the trap phenomenon-driven by DEP force gradient did not fully understand and is still illusive. In this study, we characterize the trap mechanism and efficiency with different shapes of window in a microfluidic DEP chip. To do this characterization, we fabricated 4 different windows shapes such as rhombus, circle, squares, and hexagon inside a micro-fluidic chip, and performed micro-sized particles manipulation experiments as varying the frequency and voltage of AC signal. Moreover, the numerical simulation with the same parameters that were used in the experiment was also performed in order to compare the simulation results and the experimental results. Those comparison shows that both results are closely matched. This study may be helpful in design and development of microfluidic DEP chip for trapping micro-scaled biological particle.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.7
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• pp.1071-1075
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• 2003

In this paper, we present a DNA manipulation device in the reaction chamber, which consists of a center electrode and circular outer electrodes of a reaction unit. The charged bio-molecules, DNA, are manipulated by the charge of the electrode in reaction unit. Controlling the induced dynamic electric field between the center electrode and the outer electrodes, concentration / repulsion / manipulation of bio-molecules are enabled at a periphery of electrode. Concentration of the fluorescent DNA at the center electrode is observed by applying ＋2V. Subsequently, applying －2V, the concentrated DNA is repelled rapidly from the center electrode, which makes dispersion completely in 0.5second. Furthermore, repeated applying ＋1V/－1V every 5 seconds at each outer electrode, we can circulate the DNA. We also investigate a micro-heater and sensor for DNA manipulation and reaction temperature. The coefficient of heat-resistance and heater temperature characteristic is 0.0043 and 100$^{\circ}C$/sec, respectively.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2457-2460
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• 2003

There is a great demand to manipulate biological cell autonomously since biologist should spend much time to obtain skillful manipulation techniques. For this purpose, we propose a cell chip to control, carry, fix and locate the cell. In this paper, we focus on the cell rotator to rotate individual biological cell based on a micro fluidics technology. The cell rotator consists of injection hole and rotation well to rotate a biological cell properly. Under the variation of flow rate in injection hole, the angular velocity of a biological cell is evaluated to find the feasibility of the proposed rotation method. As a practical experiment, Zebrafish egg is employed. Based on this research, we find the possibility of non-contact rotation way that can highly reduce the damage of the biological cell during manipulation. To realize an autonomous biological cell manipulation, a cell chip with manipulation well and micro channel in this research will be utilized effectively in near future.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.289-290
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• 2011

• Ceramist
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• v.7 no.3
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• pp.38-47
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• 2004

최근 micro structure, micro sensor, micro actuator 및 microelectronics 등을 활용하는 microelectromecha-nical systems (MEMS) 기술은 마이크로 로봇, micro manipulation, 광학 소자 및 시스템, 유체, 열, 바이오 및 화학공정 등을 위한 시스템 그리고 atomic force와 scanning tunneling microscope 등에 사용되는 다양한 소자 등 많은 잠재력을 가지고 있다. 이들 응용 분야 들은 micro actuator와 같은 mechanical power source가 요구되는 경우가 있다. 압전 특성을 포함하는 강유전체 재료는 이러한 micro actuator를 위해 여러 가지 다양한 장점을 지니고 있는데, 이들을 정리하면 다음과 같다. (중략)