• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.551-552
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• 2006

The miniature fuel cells have emerged as a promising power source for applications such as cellular phones, small digital devices, and autonomous sensors to embedded monitors or to micro-electro mechanical system (MEMS) devices. Several chemicals run candidate at a fuel in those systems, such as hydrogen. methanol, ethanol, acetic acid, and di-methyl ether (DME). Among them, hydrogen shows most efficient fuel performance. However, there are some difficulties in practical application for portable power sources. Therefore, more recently, there have been many efforts for development of micro-reformer to operate highly efficient micro fuel cells with liquid fuels such as methanol, ethanol, and DME In our experiments, we have integrated a micro-fuel processor system using low temperature co-fired ceramics (LTCC) materials. Our integrated micro-fuel processor system is containing embedded heaters, cavities, and 3D structures of micro- channels within LTCC layers for embedding catalysts (cf. Figs. 1 and 2). In the micro-channels of LTCC, we have loaded $CuO/ZnO/Al_2O_3$ catalysts using several different coating methods such as powder packing or spraying, dipping, and washing of catalyst slurry.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.1
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• pp.1-7
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• 2011

Micromachining is gaining popularity due to recent advancements in MEMS(Micro Electro Mechanical Systems). Using conventional micromachining, it is relatively difficult to produce moving components in the order of microns. Photolithography for silicon material has high accuracy machining, but it has low aspect ratio. X-ray lithography has ultra high accuracy machining, but it has expensive cost. Micro-EDM(electro discharge machining) has been gaining popularity as a new alternative method to fabricate micro-structures. In this study, Micro-EDM machine is developed available for fabricate micro-structures and two processes such as side cut EDM and milling EDM is proposed. Several sets of experiment results have been performed to study the characteristics of the machining process.

• Steel and Composite Structures
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• v.41 no.6
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• pp.805-820
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• 2021

In this research, the buckling and free vibration of three-phase carbon nanotubes/ fiber/ polymer piezoelectric nanocomposite face sheet sandwich microbeam with microsensor and micro-actuator surrounded in elastic foundation based on modified couple stress theory (MCST) is investigated. Three types of porous materials are considered for sandwich core. Higher order (Reddy) and sinusoidal shear deformation beam theories are employed for the displacement fields. Sinusoidal surface stress effects are extracted for sinusoidal shear deformation beam theory. The equations of motion are derived by Hamilton's principle and then the natural frequency and critical buckling load are obtained by Navier's type solution. The determined results are in good agreement with other literatures. The detailed numerical investigation for various parameters is performed for this microsensor-microactuator. The results reveal that the microsensor-microactuator enhanced by increasing of Skempton coefficient, carbon nanotubes diameter length to thickness ratio, small scale factor, elastic foundation, surface stress constants and reduction in porous coefficient, micro-actuator voltage and CNT weight fraction. The valuable results can be expedient for micro-electro-mechanical (MEMS) and nano-electro-mechanical (NEMS) systems.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2000.06a
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• pp.19-23
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• 2000

Stiction is an undesirable phenomenon that can be encountered often in Micro-Electro Mechanical Systems (MEMS) applications, In order to minimize this effect, Self-Assembled Monolayers (SAM) are commonly used. In this work the frictional characteristics of SAM are investigated using both micro-tribotester and SPM. It was found that the performance of SAM is quite sensitive to coating condition. The experimental results show promise for SAM to be used in sliding applications of micro systems.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.1063-1066
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• 1995

This paper presents a precition control of an electrostatic microactuator. For the generation of sufficient electrostatic force, a donse comb-type electrostatic microactuator is designed and manufactureed via MEMS (micro-electro-mechanical systems) process. The nonlinear plant and the linear plant of the microactuator are established through the comparison of experimental results and simulation results. A feedforward controller is designed via MATLAB simulation using the inverse function of the nonlinear plant. the experiment for the precise position tracking control is undertaken to show the control efficiency of the proposed controller.

• Smart Structures and Systems
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• v.23 no.5
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• pp.429-447
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• 2019

The present study analyzed free vibration of the three-layered micro annular/circular plate which its core and face sheets are made of saturated porous materials and FG-CNTRCs, respectively. The structure is subjected to magneto-electric fields and magneto-electro-mechanical pre loads. Mechanical properties of the porous core and also FG-CNTRC face sheets are varied through the thickness direction. Using dynamic Hamilton's principle, the motion equations based on MCS and FSD theories are derived and solved via GDQ as an efficient numerical method. Effect of different parameters such as pores distributions, porosity coefficient, pores compressibility, CNTs distribution, elastic foundation, multi-physical pre loads, small scale parameter and aspect ratio of the plate are investigated. The findings of this study can be useful for designing smart structures such as sensor and actuator.

• Proceedings of the KSME Conference
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• 2001.11b
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• pp.591-596
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• 2001

Micron-size mechanical devices are becoming more prevalent, both in commercial applications and in scientific inquiry. Within the last decade, a dramatic increase in research activities has taken place, mostly due to the rapidly expanding growth of applications in areas of MEMS(Micro-Electro-Mechanical Systems), bioengineering, chemical systems, and advanced energy systems. In this study, we have described the effects of vortex viscosity variation on the flowfields in a micro-slot between rotating surfaces of revolution using a micropolar fluid theory. In order to solve this problem, we have used boundary layer equations and applied non-zero values of the microrotation vector on the wall. The results are compared with the corresponding flow problems for Newtonian fluid. Results show that the coefficient $\delta$ controls the main part of velocity ${\upsilon}_x$ and the coefficient M controls the main part of microrotation component ${\Omega}_{\theta}$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1210-1213
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• 2005

Micro heat flux sensor is used in various industries to measure heat flux. In this study, a micro heat flux sensor is fabricated using the MEMS (Micro Electro Mechanical Systems) techniques. The fabricated sensor is composed in thermopile for sensor and SU-8 for thermal resistance layer. The new method of fabrication SU-8 is proposed in this study. The sensitivity is $44\;\mu{V/(W/cm^2)}$ at steady state and Reynolds number is 91322.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.10
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• pp.1394-1405
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• 2002

The performance of micro-actuators utilizing radiometric forces are studied numerically. The Knudsen number based on gas density and characteristic dimension is varied from near-continuum to highly rarefied conditions. Direct simulation Monte Carlo(DSMC) calculations have been performed to estimate the performance of the micro-actuators. In the present DSMC method, the variable hard sphere molecular model and no time counter technique are used to simulate the molecular collision kinetics. For simulation of diatomic gas flows, the Borgnakke-Larsen phenomenological model is adopted to redistribute the translational and internal energies.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2006.10a
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• pp.67-73
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• 2006

A system in package (SiP) generally contains a variety of systems such as analog, digital, optical and micro-electro-mechanical systems, integrated in a system-level package connected through a substrate. However, there are many electrical and mechanical reliability issues including the reliability issue for embedded structures. A mismatch of thermal coefficients of expansion among packaging materials and devices can lead to warping or delamination in the package. In this study, the effect of material properties of underfill, such as Young's modulus and CTE, are investigated through FEM simulation. Experimental investigation on the warpage of the package is also carried out to verify the simulation results. The results show that the reliability of the system in package is closely related to the material properties of underfill. The results of this study provide a good guidance for the material selection when designing the system in package.