Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Development of Micro Milling EDM and Analysis of Machined Characteristics

마이크로 밀링 EDM 머신 개발 및 가공특성 분석

  • 김선호 (동의대학교 메카트로닉스공학과) ;
  • 임한석 (하이브리드 정밀)
  • Received : 2010.10.11
  • Accepted : 2011.02.14
  • Published : 2011.02.28
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Abstract

Micromachining is gaining popularity due to recent advancements in MEMS(Micro Electro Mechanical Systems). Using conventional micromachining, it is relatively difficult to produce moving components in the order of microns. Photolithography for silicon material has high accuracy machining, but it has low aspect ratio. X-ray lithography has ultra high accuracy machining, but it has expensive cost. Micro-EDM(electro discharge machining) has been gaining popularity as a new alternative method to fabricate micro-structures. In this study, Micro-EDM machine is developed available for fabricate micro-structures and two processes such as side cut EDM and milling EDM is proposed. Several sets of experiment results have been performed to study the characteristics of the machining process.

Keywords

References

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