• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.913-916
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• 2005

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}pa$. $m^3/cm^2$.

• Transactions of The Korea Fluid Power Systems Society
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• v.8 no.1
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• pp.19-25
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• 2011

This study presents the design of digital amplifier.controller for a proportional control valve and the development of PID discrete control scheme by using RCP(Rapid Controller Prototyping) system. RCP system is the device to embed the control code developed in PC into the microcontroller on-site. Ramp input test using the digital amplifier.controller developed in this study was carried out for the proportional control valve of domestic production and Bosch Rexroth respectively. The instability problem occurred around maximum displacement of localized valve spool at ramp input test was solved by supplementing offset current to the duty ratio of PWM(Pulse Width Modulation) driving signal to the solenoid. The comparison of test results between localized proportional control valve and Bosch Rexroth's product shows that the characteristics obtained by ramp input test and static flow gains are alike each other. Two valves are about the same in dead bands and hysteresis characteristics.

• Transactions of The Korea Fluid Power Systems Society
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• v.3 no.4
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• pp.21-28
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• 2006

The proportional control solenoid valves as well as the PWM solenoid valves operated by electric signal play an important role in the hydraulic system for automatic transmissions to improve the shift quality. However it is not generally available for the performance data because most of the automotive parts manufacturer don't release the specific test results, especially dynamic performance that is essential to design a shift control algorithm. In this research, a performance test equipment that can be applied to various types of pressure control solenoid valve was developed. It was implemented by 8-bit micro-controller with many useful functions such as adjustable PWM carrier frequency, embedded function generator, current controller, data monitoring and acquisitions, etc. for the test of dynamic performance of solenoid valve as well as the steady-state pressure characteristics. The performance test results for the direct type proportional control solenoid valve show not only the validity of overall functions but also its usefulness as a hydraulic valve tester.

• Journal of Electrical Engineering and Technology
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• v.1 no.2
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• pp.263-267
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• 2006

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

• 한국신재생에너지학회:학술대회논문집
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• 2011.05a
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• pp.205.2-205.2
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• 2011

Micro hydraulic turbines take a growing interest because of its small and simple structure as well as high possibility of applying to micro and small hydropower resources. The differential pressure exiting within the city water pipelines can be used efficiently to generate electricity like the energy generated through gravitational potential energy in dams. In order to reduce water pressure at the inlet of water cleaning centers, pressure reducing valves are used widely. Therefore, pressure energy is wasted. Instead of using the pressure reduction valve, a micro counter-rotating hydraulic turbine can be replaced to get energy caused by the large differential pressure found in the city water pipelines. In this study, in order to acquire design data of counter-rotating tubular type micro-turbine, output power, head, and efficiency characteristics due to the diffuser.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.463-467
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• 2004

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated b micro-heater under pulse heating. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, he middle plate, the upper plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The middle plate includes the chamber and diaphragm d the upper plate is the micro-heater. The Micropump is fabricated by bonding process of the three layer. This paper resented the possibility of the PCR chip operation by the fabricated micropump.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2763-2768
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• 2007

Recently, as the semiconductor production technology develops, there has been growing interest in the cooling system using micro fluid pump. Among the various types of micro fluid pump, the valve-less diffuser/nozzle has been extensively studied in recent years. However, the flat-walled diffuser/nozzle flow has not been clearly looked into due to its non-linear characteristics. In this paper, the flow characteristics of the flat-walled diffuser/nozzle have been analyzed using similitude model and simulations. Similitude models are designed so that the flow pattern is same as that of 1/10 scale flow by using high viscous fluid as working fluid. The results are compared to the simulations. It is shown that the flow characteristics of 2D simulation are different from 3D simulations at high Re region, and the measured pump efficiency is highly dependent on the pressure difference as well as the channel geometry. From these results, the desirable conditions for the efficient pump is discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1194-1197
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• 2005

Micro nozzle is employed as a dynamic passive valve in micro fluidic devices. Micro nozzle array is used in micro droplet generation in bio-medical applications and propulsion device for actuating satellite and aerospace ship in vacuum environments. Aperture angle and the channel length of the micro nozzle affect its retification efficiency, and thus it is needed to produce micro nozzle precisely. MEMS process has a limit on making a micro nozzle with high-aspect ratio. Reactive ion etching process can make high-aspect ratio structure, but it is difficult to make the complex shape. Focused ion beam deposition has advantage in machining of three-dimensional complex structures of sub-micron size. Moreover, it is possible to monitor machining process and to correct defected part at simultaneously. In this study, focused ion beam deposition was applied to micro nozzle production.

• Journal of the Korean Magnetics Society
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• v.25 no.1
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• pp.16-21
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• 2015

The micro device, coil, and channel for the biosensor integrated with the GMR-SV device based on the antiferromagnetic IrMn layer was fabricated by the light lithography process. When RBCs coupled with several magnetic beads with a diameter of $1{\mu}m$ passed on the micro channel, the movement of $RBC+{\mu}Beads$ is controlled by the electrical AC input signal. The $RBC+{\mu}Beads$ having a micro-magnetic field captured above the GMR-SV device is changed as the output signals for detection status. From these results, the GMR-SV device having the width magnitude of a few micron size can be applied as the biosensor for the analysis of a new magnetic property as the membrane's deformation of RBC coupled to magnetic beads.

• Tribology and Lubricants
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• v.32 no.1
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• pp.32-37
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• 2016

The wear characteristics of metal ball and seat in a metal-seated ball valve significantly affect the performances such as leakage and valve torque. In this work, the wear characteristics of metal ball and seat are experimentally investigated. A stainless steel ball and seat with a high corrosion-resistant coating are prepared and a component level test was performed. The hardness and surface roughness of specimens cut from the metal ball and seat are measured before and after the test using a micro-Vickers hardness tester and confocal microscopy, respectively. In order to assess the wear characteristics, the surfaces of the specimens are carefully examined after the test. The confocal microscope data show that the surface roughness values of both the ball and seat increase by a factor of 3-4, which may lead to an increase in valve torque. However, the wear of the seat is found to be more significant than that of the ball. In addition, a comparison of the surfaces of the ball and seat before and after testing revealed that adhesive and abrasive wear are the major wear mechanisms. The results of this study may aid in the design of metal-seated ball valves from the tribological point of view.