• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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• pp.263-268
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• 2001

The needs for precision machining of micro to milli parts have been increased as the industry require high quality products, especially for the micro-machining of IT products. The ultra-precision machining system is essential for the micro machining of fine structures, which insures machining accuracy, low systematic and random error and repeatability. In this study, we developed micro machining system, which is equipped with air bearing stage for ultra precision machining and also we present the results of V-grooving experiments, conducted by the developed system, to verify the performance of system. The results show that the machined V-grooving had good accuracy with repeatable stability.

• 한국정밀공학회지
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• 제25권7호
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• pp.39-46
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• 2008

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high speed on a large workspace as well as high precision positioning. For machining systems having a long stroke with ultra precision, a dual-stage system including a global stage (coarse stage) and a micro stage (fine stage) is designed in this paper. Though linear motors have a long stroke and high precision feed drivers, they have some limitations for submicron positioning. Piezo-actuators with high precision also have severe disadvantage for the travel range, and the stroke is limited to a few microns. In the milling experiments, the positional accuracy has been readily achieved within 0.2 micron over the typical 20 mm stroke, and the path error over 2 micron was reduced within 0.2 micron. Therefore, this technique can be applied to develop high precision positioning and machining in the micro manufacturing and machining system.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.14-19
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• 2007

Angle sensors based on the principle of autocollimation, which are usually called autocollimators, can accurately measure small tilt angles of a light-reflecting flat surface. This paper describes a prototype micro-angle sensor that is based on the laser autocollimation technique. The new angle sensor is compact and consists of a laser diode as the light source and a quadrant photodiode as a position-sensing device. Because of its concise design, the microangle sensor facilitates dynamic measurements of the angular error motions of a precision stage without influencing the original dynamic properties of the stage. This is because the sensor only requires a small extra target mirror to be mounted on the stage. The sensitivity of the angle detection is independent of the focal length of the objective lens; therefore, an objective lens with a relatively short focal length is employed to reduce the size of the device. The micro-angle sensor uses a single lens for the both the laser collimation and focusing, which distinguishes it from the conventional laser autocollimation method that has separate collimate and objective lenses. The new micro-angle sensor has dimensions of $15.1\times22.0\times14.0mm$ and its resolution is better than 0.1 arc-second The optical design and performance of this micro-angle sensor were verified by experimental results.

• 한국컴퓨터정보학회논문지
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• 제15권6호
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• pp.49-56
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• 2010

본 논문은 직교주파수분할다중접속방식 기반의 마이크로 기지국을 위한 PHY-MAC 계층에서 최적화된 자원할당 기법에 대해 연구한다. 본 논문에서는 PHY-MAC 계층 간 제어 정보 흐름 및 기능 구현을 포함하여 계층 간 최적화된 2단계 자원할당 기법을 제안한다. 제안하는 2단계 자원할당 기법은 사용자 그룹핑 단계 및 자원할당 단계로 구성된다. 사용자 그룹핑 단계에서는 각 사용자별 PHY-MAC 계층 특성에 따라 사용자들을 매크로 기지국 자원을 할당받을 사용자 그룹과 마이크로 기지국 자원을 할당받을 사용자 그룹으로 분류한다. 자원할당 단계에서는 사용자 그룹 내의 각 사용자별로 실제 할당 받을 자원의 형태 및 양을 결정하는 스케줄러를 정의한다. 제안하는 기법에서는 다이버시티 및 AMC 기법을 스케줄러 정의에 활용한다. 시뮬레이션 결과는 제안하는 방법이 마이크로 기지국을 고려하지 않는 기존 방법에 비해 평균 셀 수율을 40~80% 증가시킬 수 있음을 보인다.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.429-434
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• 2002

In order to improve the accuracy in the field of simiconductor and LCD research equipment, the demand of XYZ stage which is possible to control X axis, Y axis and Z axis has been increased steadly in place of the existing XY stage which is only practicable to X & Y axis positioning control. This paper presents a new pneumatic actuator for Micro-positioning control in the XYZ stage. Air pressure in a pneumatic actuator is controlled by the E/P Regulator. The control range of pneumatic actuator is about 100 micro-meters and it's construction concept is easy to apply a practical state

• 대한기계학회논문집A
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• 제27권3호
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• pp.472-477
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• 2003

A piezo-actuator is an important component for an E-beam lithography system. But it is very difficult to model its characteristics due to nonlinearities such as hysteresis and creep, to the input voltage. In this paper, one-axis micro stage with a piezo-actuator is modeled including the nonlinear properties. Hysteresis and creep are modeled as the first order differential equation and a time-dependent logarithmic function, respectively. The dynamic motion of the stage is also modeled as a mass-spring-damper system and the parameters are determined by utilizing the system identification technique. The simulation tool for a micro stage is constructed using the commercial software and its simulation results are compared with the experimental data.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.161-162
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.575-576
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.233-234
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• 2007

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.445-446
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• 2008