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A Single Lens Micro-Angle Sensor  

Saito, Yusuke (Nanosystems Engineering Lab, Department of Nanomechanics, Tohoku University)
Gao, Wei (Nanosystems Engineering Lab, Department of Nanomechanics, Tohoku University)
Kiyono, Satoshi (Nanosystems Engineering Lab, Department of Nanomechanics, Tohoku University)
Publication Information
International Journal of Precision Engineering and Manufacturing / v.8, no.2, 2007 , pp. 14-19 More about this Journal
Abstract
Angle sensors based on the principle of autocollimation, which are usually called autocollimators, can accurately measure small tilt angles of a light-reflecting flat surface. This paper describes a prototype micro-angle sensor that is based on the laser autocollimation technique. The new angle sensor is compact and consists of a laser diode as the light source and a quadrant photodiode as a position-sensing device. Because of its concise design, the microangle sensor facilitates dynamic measurements of the angular error motions of a precision stage without influencing the original dynamic properties of the stage. This is because the sensor only requires a small extra target mirror to be mounted on the stage. The sensitivity of the angle detection is independent of the focal length of the objective lens; therefore, an objective lens with a relatively short focal length is employed to reduce the size of the device. The micro-angle sensor uses a single lens for the both the laser collimation and focusing, which distinguishes it from the conventional laser autocollimation method that has separate collimate and objective lenses. The new micro-angle sensor has dimensions of $15.1\times22.0\times14.0mm$ and its resolution is better than 0.1 arc-second The optical design and performance of this micro-angle sensor were verified by experimental results.
Keywords
Angle measurement; Micro-angle sensor; Laser autocollimation;
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  • Reference
1 Estler, W. T. and Queen, Y. H. 'Angle metrology of dispersion prisms,' Annals of the CIRP, Vol.49, No.1, pp. 415-418, 2000   DOI   ScienceOn
2 Gackeler, R. D., Just, A., Probst, R. and Weingartner, I., 'Subnm to topography measurement using high-accuracy autocollimations,' Technisches Messen, Vol.69, No.12, pp.535-541, 2002
3 Gao, W., Dejima, S. and Kiyono, S., 'A dual-mode surface encoder for position measurement,' Sens Actuators A, Vol.117, No.1, pp.95-102, 2005   DOI   ScienceOn
4 http://www.keyence.co.jp/
5 Ennos, A. E. and Virdee, M. S., 'High accuracy profile measurement of quasi-conical mirror surfaces by laser autocollimation,' Precision Engineering, Vol.4, No.1 pp.5-8, 1982   DOI   ScienceOn
6 Kiyono, S., Asakawa, Y., Inamoto, M. and Kamada, O., 'A differential laser autocollimation probe for on-machine measurement,' Precision Engineering, Vol.15, No.2 pp.68-76, 1993   DOI   ScienceOn
7 Gao, W., Dejima, S., Shimizu, Y. and Kiyono, S., 'Precision measurement of two axis positions and tilt motions using a surface encoder,' Annals of the CIRP, Vol.52, No.1 pp.435-438, 2003   DOI   ScienceOn
8 Virdee, M. S., 'Nanometrology of optical flats by laser autocollimation,' Surface Topography, Vol.1, pp.415-425, 1988
9 Murata, K., 'Optics,' Saiensu-Sha, 1979
10 Kiyono, S., Cai, P. and Gao, W., 'An angle-based detection method for precision machines,' JSME International Journal, Vol.42, No.1, pp. 44-48, 1999   DOI
11 Gao, W., Kiyono, S. and Satoh, E., 'Precision measurement of multi-degree-of-freedom spindle errors using two-dimensional slope sensors,' Annals of the CIRP, Vol.51, No.1, pp.447-450, 2002   DOI   ScienceOn
12 Weingartner, I., Schulz, M. and Elster, C., 'Novel scanning technique for ultra-precise measurement of topography,' SPIE, Vol.3782, pp.306-317, 1999   DOI
13 Yanadayan, T., Akgoz, S. A. and Hitjema, H., 'A novel technique for calibration of polygon angles with non-integer subdivision of indexing table,' Precision Engineering, Vol.26, No.4, pp.412-424, 2002   DOI   ScienceOn
14 Farago, F. T. and Curtis, M. A., 'Handbook of Dimensional Measurement,' Industrial Press, 1994
15 Gao, W., Kiyono, S. and Nomura, T., 'A new multiprobe method of roundness measurements,' Precision Engineering, Vol.19, No.1 pp. 55-64, 1996
16 http://www.surugaost.jp/
17 Moore, W. R., 'Foundations of Mechanical Accuracy,' The Moore Special Tool Company, 1970
18 Gao, W. and Kiyono, S., 'Development of an optical probe for profile measurement of mirror surfaces,' Optical Engineering, Vol.36, No.12, pp.3360-3366, 1997   DOI   ScienceOn
19 Gao, W., Ohnuma, T., Satoh, H., Shimizu, H. and Kiyono, S., 'A precision angle sensor using a multi-cell photodiode array,' Annals of the CIRP, Vol.53, No.1, pp.425-428, 2004   DOI   ScienceOn
20 Gao, W., Huang, P. S., Yamada, T. and Kiyono, S., 'A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,' Precision Engineering, Vol.26, No.4, pp.396-404, 2002   DOI   ScienceOn
21 Gao, W., Tano, M., Sato, S. and Kiyono, S., 'On-machine measurement of cylindrical surface with sinusoidal microstructures by an optical slope sensor,' Precision Engineering, Vol.30, pp.274-279, 2006   DOI   ScienceOn
22 O'Shea, D. C., 'Elements of Modern Optical Design,' John Wiley & Sons, 1985
23 http://www.edmund.co.jp/