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http://dx.doi.org/10.3795/KSME-A.2003.27.3.472

Dynamic Analysis of the Piezo-Actuator for a New Generation Lithography System  

Park, Jae-Hak (한양대학교 대학원 정밀기계공학과)
Jung, Jong-Chul (한양대학교 대학원 정밀기계공학과)
Huh, Kun-Soo (한양대학교 기계공학부)
Chung, Chung-Choo (한양대학교 전자전기컴퓨터공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.27, no.3, 2003 , pp. 472-477 More about this Journal
Abstract
A piezo-actuator is an important component for an E-beam lithography system. But it is very difficult to model its characteristics due to nonlinearities such as hysteresis and creep, to the input voltage. In this paper, one-axis micro stage with a piezo-actuator is modeled including the nonlinear properties. Hysteresis and creep are modeled as the first order differential equation and a time-dependent logarithmic function, respectively. The dynamic motion of the stage is also modeled as a mass-spring-damper system and the parameters are determined by utilizing the system identification technique. The simulation tool for a micro stage is constructed using the commercial software and its simulation results are compared with the experimental data.
Keywords
Lithography System; Piezo-Actuator; Hysteresis; Creep; Micro Stage; Simulation Tool;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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