Dynamic Analysis of the Piezo-Actuator for a New Generation Lithography System |
Park, Jae-Hak
(한양대학교 대학원 정밀기계공학과)
Jung, Jong-Chul (한양대학교 대학원 정밀기계공학과) Huh, Kun-Soo (한양대학교 기계공학부) Chung, Chung-Choo (한양대학교 전자전기컴퓨터공학부) |
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State-Space Analysis and Identification for a Class of Hysteretic Systems
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