Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Development of a pneumatic actuator for Micro-Positioning control

미세 변위제어를 위한 공압 액추에이터 개발

  • 손영선 (충남대학교 기계공학과 대학원) ;
  • 이동주 (충남대학교 기계공학과) ;
  • 이종옥 (주)덕인 부설연구소)
  • Published : 2002.04.01
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Abstract

In order to improve the accuracy in the field of simiconductor and LCD research equipment, the demand of XYZ stage which is possible to control X axis, Y axis and Z axis has been increased steadly in place of the existing XY stage which is only practicable to X & Y axis positioning control. This paper presents a new pneumatic actuator for Micro-positioning control in the XYZ stage. Air pressure in a pneumatic actuator is controlled by the E/P Regulator. The control range of pneumatic actuator is about 100 micro-meters and it's construction concept is easy to apply a practical state

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