• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.09a
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• pp.110-113
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• 2005

In recent, various shapes of pattern in micron or nano scale are adapted in many applications due to their good mechanical or optical properties. Light guide panel (LGP) of the LCD is one of important applications for micro pattern and micro prism shape is one of the typical patterns. Many applications have the patterns on their surface and the size of the pattern keep decreasing down to the order of micron or even under micron. On the other hand, the area to be patterned keeps enlarging. These two trends in patterned products require tooling micro patterns on large surface, which has still many technical problems to be solved mainly due to pattern size and the tooling area. In this study, we fabricate prism shape of patterns using diamond cutting tool on some metal core and plastic core like PMMA Some of cutting conditions are investigated including cutting force, cutting depth and speed for different core materials.

• Transactions of Materials Processing
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• v.14 no.3 s.75
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• pp.251-256
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• 2005

3-D micro structures and micro tools were fabricated using Micro Electrical Discharge Machining (MEDM). To make micro structures, micro electrical discharge milling process was applied. During micro electrical discharge milling, electrode (tool) worn in the both axial and radial direction. To compensate tool wear which has significant influence on machining accuracy, machining path overlapping was proposed. Machining characteristics of micro electrical discharge milling was investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools were also fabricated using REDM (reverse electrical discharge machining). Sacrificial electrodes were machined through electrical discharge milling process and were used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' were fabricated. With these complex shaped tools, micro machining was successfully applied repeatedly.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.11a
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• pp.255-259
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• 2004

3-D micro structures and micro tools are fabricated using MEDM (Micro Electric Discharge Machining). To make micro structures, micro electro discharge milling process is applied. During micro electro discharge milling, electrode (tool) wears both axial and radial direction. To compensate tool wear which influences significantly machining accuracy, overlap machining path is proposed. Machining characteristics of micro electro discharge milling is investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools are fabricated using REDM (reverse electro discharge machining). Sacrificial electrode is machined through electro discharge milling process and is used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' are fabricated. With these complex shaped tools, micro machining is successfully applied repeatedly.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.11
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• pp.17-23
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• 2010

Titanium alloy is one of the hard processing materials made by the traditional manufacturing method because of the excellent mechanical strength. Ablation of titanium alloy is investigated by using a femtosecond laser which is a regenerative amplified Ti:sapphire laser with 1kHz repetition rate, 184fs pulse duration time and 785nm wavelength. Experiments are carried out under various ablation conditions with different pulse overlap ratios for the rectangular shape and micro hole. Test results show that the ablation characteristic according to pulse overlap ratio of titanium alloy seems to be as non-linear type at the different zone of energy fluence. The optimal condition of rectangular shape processing is obtained at the laser peak power 1.3mW, pulse overlap ratio of 90%, beam gap of $1\;{\mu}m$. The micro hole has a good quality from the pulse overlap ratio of 99% at the same laser peak power. With the optimal processing condition, the fine rectangular shape and micro hole without burr and thermal damage are achieved.

• Journal of IKEEE
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• v.1 no.1 s.1
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• pp.1-10
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• 1997

It is well-known that rectangular bulk-Si sensors prepared by etch or epi etch-stop micromachining technology are already in practical use today, but the conventional bulk-Si sensor shows some drawbacks such as large chip size and limited applications as silicon sensor device is to be miniaturized. We consider a circular-shape SOI(Silicon-On-Insulator) micro-cavity technology to facilitate multiple sensors on very small chip, to make device easier to package than conventional sensor like pressure sensor and to provide very high over-pressure capability. This paper demonstrates the cross-functional results for stress analyses(targeting $5{\mu}m$ deflection and 100MPa stress as maximum at various applicable pressure ranges), for finding permissible diaphragm dimension by output sensitivity, and piezoresistive sensor theory from two-type SOI structures where the double SOI structure shows the most feasible deflection and small stress at various ambient pressures. Those results can be compared with the ones of circular-shape bulk-Si based sensor$^{[17]}. The SOI micro-cavity formed the sensors is promising to integrate with calibration, gain stage and controller unit plus high current/high voltage CMOS drivers onto monolithic chip.

• Proceedings of the KSR Conference
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• 2008.06a
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• pp.2207-2212
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• 2008

The next generation of Korean high-speed train under development will be designed for the maximum operating speed of 350km/h and maximum speed of 400km/h. This high-speed operation may cause the noise and vibration problems around tunnel exit due to the higher micro-pressure wave than present level. In this study, the nose shape optimization was conducted for the countermeasure against these problems. Axi-symmetric solver was used for numerical simulation, and response surface was used for efficiency of optimization process. Also the multi-step optimization was conducted to find out more accurate optimal shape. Through these analysis and optimization, it was found out that the optimal nose shapes for minimization of micro-pressure wave are definitely different along the nose length variation. And the mechanism of micro-pressure wave reduction was closely investigated by the analysis of generation process of compression wave in tunnel. The results are expected to be used as design guideline for performance improvement of the next generatin of Korean high-speed train.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.4
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• pp.19-23
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• 2021

A statistical approach to inspection of the 3-D shape of micro solder balls is proposed, where an optical method with spatially arranged LED and specular reflection is used. The reflected image captured by a vision system was analyzed to calculate the relative displacements of LED's in the image. Also, the statistics of displacements for the solder balls contained in a captured image are used to detect existing defects, and the usefulness of the proposed method is shown via experiments.

• International Journal of Precision Engineering and Manufacturing
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• v.3 no.2
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• pp.72-77
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• 2002

In this paper, a simple method to measure the residual stress in microstructure is presented. In order to find the residual stress in micro-machined beam, the first natural frequency of the beam that has the residual stress inside is analyzed using Rayleigh's energy method. Micro gold electroplated structure is fabricated by surface micro-machining process including electroplating. The made structure is an approximate shape of clamped-clamped beam and its 1 st natural frequency is measured by resonance method. For the better estimation of the residual stress, an equivalent length of micro-fabricated beam to ideal beam is calculated by FEM. The residual stress was estimated from the equivalent length and the measured natural frequency. It was found that a tensile stress was residue in the micro beam structure.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.521-527
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• 1997

Irregular shapes and growth behavior of surface micro-crack showed very complex and nonlinear propeties and many investigators have performed theoretical analysesand experiments on them to characterize fatigue strength. They had difficulties in estimating fatigue life due to random distribution, growth and coalescence of surface micro-cracks. The straightness of crack growth along intergranular and transgranular was prevented from irregular microstructure and precipitates. Euclid geometry can't quantify shape of surface micro-crack but ftractal geometry can. Therefore, it is suggested that average fractal dimension of surface micro-cracks is able to estimate fatigue life but fractal dimension of maximum surface micro-crack is not in Al 2024-T3 alloy.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.2
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• pp.251-256
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• 2011

The radial overcut in micro electrochemical machining was investigated. The prediction of overcut is important not only for the machining accuracy but also for the shape control of micro structures. In micro ECM, machining gap or overcut depends on electrolyte, pulse voltage, pulse duration and dissolution time etc. Understanding of electrochemical dissolution rate is necessary for the overcut prediction. In this paper, the radial overcut of micro electrochemical machining according to pulse duration and dissolution time was simulated using electrochemical principles and also experimentally estimated.