• 소성∙가공
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• 제14권5호
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• pp.477-481
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• 2005

Wafer scale micro mirror array with high surface quality for small form factor (SFF) optical pick-up was fabricated by micro UV-molding. To replicate micro mirror array for SFF optical pick-up, a high- precision mold was fabricated using micro-machining technology. Wafer scale micro mirror array was UV-molded using the mold and then the process was optimized experimentally. The surface flatness and roughness of UV-molded micro mirror array were measured by white light scanning interferomety system and analyzed the transcribing characteristics. Finally, the measured flatness of UV-molded micro mirror away for SFF optical pick-up, which was fabricated in the optimum processing condition, was less than 70nm.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1787-1792
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• 2003

Recently with the development of semiconductor technology, the miniaturization of parts and products as well as their high precision is required. In addition, as the national competitiveness is increasingly affected by the development of the micro parts through micro machining technology, the study of the micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tools under the size of $20{\mu}m$ and to machine micro holes using them. The fabrication is done by grinding and the application of ELID to the grinding wheel. The surface roughness of the micro tools is measured to evaluate the study.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.241-242
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• 2007

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.33-34
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• 2011

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.493-494
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• 2006

SU-8 can be implemented as a mask for micro Abrasive Jet Machining (micro-AJM) process [1]. In this paper, we will evaluate the quality of micro grooving result on glass substrate by micro-AJM process which using SU-8 as a mask. It was evaluated on width and edge profile of the micro grooving. The result was having distortion compare with the master film used to pattern the SU-8 mask. The value of distortion with other properties which came along with it, such as depth and surface roughness, can be optimized in order to fabricate micro-channel for micro-fluidic application.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2008년도 12th Asian Congress of Fluid Mechanics
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• pp.30.2-30.2
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• 2008

• 대한기계학회논문집B
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• 제30권7호
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• pp.646-655
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• 2006

The present research is an experimental study on characteristics of cooling behavior for the adjacent copper blocks with surface roughness or micro-porous coated surface. The experiments were carried out at saturation state or within subcooled states of PF5060. The effects of heater orientation and the intervals between heating surfaces or substrates were investigated under various heat flux conditions. The boiling performance of copper block with micro-porous coated surface was better than that of copper block with surface roughness. It is understood that the bubble sweeping enhances boiling performance for the heaters with inclinations of $\theta=45^{\circ}\;and\;\theta=90^{\circ}$, where as the bubble flattening decreases boiling performance for the heaters with inclinations of $\theta=135^{\circ}\;and\;\theta=180^{\circ}$. In comparison to upper heater and below heater with orientation, the upper heater has lower superheat temperature than the below heater due to the bubble sweeping. It is also found that boiling performance decreases in the case of adjacent double heaters with only 0.2cm substrate interval.

• 소성∙가공
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• 제13권1호
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• pp.9-14
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• 2004

Recently, various bulk metallic glasses (BMG's) having good mechanical and chemical properties were developed. BMG's can easily be deformed in the supercooled liquid region, via viscous flow mechanism. By using the viscous flow, the very low pressure is needed to deform the materials. In this study, we investigated the structural transition and deformation behavior of Vitreloy 1 (Zr/sub 41.2/Ti/sub 13.8/Cu/sub 12.5/Ni/sub 10/Be/sub 22.5/) using TMA and DSC. We applied the results to the micro forming process. The forming condition was chosen based on the viscosity data from TMA, and Si wafer with micro patterns on the surface was used as a forming die. The deformed surface was analyzed by SEM and 3D Surface Profiling System. The alloy showed good replication of the patterns. Quantitative measurement of roughness was useful to evaluate the replication. Surface condition of the deformed surface was determined by the initial surface condition.

• 한국기계가공학회지
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• 제7권1호
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• pp.67-74
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• 2008

In this paper, the surface characteristics of the AIP-TiN coated of the SKH51 and SKD11 steels under various deposition times are presented with emphasis on the comparison of the two materials. The micro-particle, the surface roughness, the micro-hardness, the coated layer thickness, the atomic distribution of Ti, N and Fe elements and the adhesion are measured for various deposition times. It has been shown that the micro-particle, the surface roughness, the coated layer thickness and the atomic distribution of Ti, N and Fe elements are similar for the two cases regardless of the test deposition time from 10 to 180 minutes. However, it has been shown that the micro-hardness and the adhesion of the SKH51 steel are higher than the SKD11 steel, indicating that they are much affected by the hardness of the material to be coated.

• 대한기계학회논문집B
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• 제37권12호
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• pp.1159-1165
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• 2013

파우더 블라스팅은 미세 유리가공법으로서 가공속도가 빠르고 저비용의 장점이 있지만 유리를 취성파괴 시키기 때문에 표면거칠기가 좋지않다. 블라스팅된 표면에 저압의 워터젯을 분사하여 표면에서의 연마 슬러리의 흐름을 통해 표면거칠기를 저감할 수 있다. 본 연구에서는 소다라임 유리에 블라스팅으로 마이크로 채널을 가공한 후 워터젯을 연속 적용하고, 마이크로 채널의 표면거칠기 및 단면 형상의 변화의 과정을 관찰하였다. 워터젯의 적용결과, 초기단계에서는 블라스팅에 의한 미세 요철이 제거되었고, 이후 표면하부의 크랙이 제거되어 평균 표면거칠기 50 nm 근방의 매끈한 표면을 얻을 수 있었다. 표면거칠기 저감에 동반하여 채널단면의 확장 과정도 함께 관측하였다. 마지막으로 제안한 방법에 의해 미세유체칩의 가공 결과를 제시하였다.