Transactions of Materials Processing (소성∙가공)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
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Micro Forming of Bulk Metallic Glass using the Deformation Behavior in the Supercooled Liquid Region

과냉각 액체 영역에서의 변형거동을 이용한 벌크 비정질 합금의 미세성형 기술 개발

  • 옥명렬 (한국과학기술연구원 재료연구부) ;
  • 서진유 (한국과학기술연구원 재료연구부) ;
  • 홍경태 (한국과학기술연구원 재료연구부)
  • Published : 2004.02.01
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Abstract

Recently, various bulk metallic glasses (BMG's) having good mechanical and chemical properties were developed. BMG's can easily be deformed in the supercooled liquid region, via viscous flow mechanism. By using the viscous flow, the very low pressure is needed to deform the materials. In this study, we investigated the structural transition and deformation behavior of Vitreloy 1 (Zr/sub 41.2/Ti/sub 13.8/Cu/sub 12.5/Ni/sub 10/Be/sub 22.5/) using TMA and DSC. We applied the results to the micro forming process. The forming condition was chosen based on the viscosity data from TMA, and Si wafer with micro patterns on the surface was used as a forming die. The deformed surface was analyzed by SEM and 3D Surface Profiling System. The alloy showed good replication of the patterns. Quantitative measurement of roughness was useful to evaluate the replication. Surface condition of the deformed surface was determined by the initial surface condition.

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