• Journal of Magnetics
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• v.10 no.3
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• pp.122-127
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• 2005

New classes of LC resonators for micro magnetic sensor device were proposed and fabricated. The first type LC resonator (Type I) consists of a small piece of microwire and two cylindrical electrodes at the end of the microwire without direct contact to its ferromagnetic core. In type I resonator the ferromagnetic core of the microwire and cylindrical electrodes act as an inductor and two capacitors respectively to form a LC circuit. The second type LC resonator (Type II) consists of a solenoidal micro-inductor with a bundle of soft magnetic microwires as a core. The solenoidal micro-inductors fabricated by MEMS technique were $500\sim1,000\;\mu{m}$ in length with $10\sim20$ turns. A capacitor is connected in parallel to the micro-inductor to form a LC circuit. A tiny glass coated $CO_{83.2}B_{3.3}Si_{5.9}Mn_{7.6}$ microwire was fabricated by a glass-coated melt spinning technique. A supergiant magneto-impedance effect was found in a type I resonator as much as 400,000% by precise tuning frequency at around 518.51 MHz. In type II resonator the changes of inductance as a function of external magnetic field in micro-inductors with properly annealed microwire cores were varied as much as 370%. The phase angle between current and voltage was also strongly dependent on the magnetic field. The drastic increments of magnetoimpedance at near the resonance frequency were observed in both types of LC resonators. Accordingly, the sudden change of the phase angle, as large as $180^{\circ}C$, evidenced the occurrence of the resonance at a given external magnetic field.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.447-447
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• 2011

We studied to detect the mass variation using micro mechanical resonator. For measuring the resonance frequency of the micro mechanical system, optical method using laser interference is selected. A simple resonator is prepared by attaching an AFM cantilever on the piezo stack. The piezo stack makes a the cantilever vibrated with its resonance frequency. To change the mass of the resonator, gold was evaporated on the cantilever. We measured how much resonance frequency was changed according to the amount of gold attached on cantilever. This resonator is able to perform the role of a mass sensor and has a resolution of the order of micrograms. The fabrication of the resonator and measurement setup for detecting the mechanical resonance will be introduced in this presentation.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.6
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• pp.494-502
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• 1999

This paper represents an electrostatic micro plate resonator which consists of a rigid plate suspended with four bridges and a counter electrode. The bridges of the resonator are designed corrugated so that the residual stress are released. The FEM simulation results confirmed that the deflection characteristic of the corrugated bridge is hardly affected by the initial residual tensile stress. One resonator with the corrugated bridges and the other with the flat bridges were fabricated by the boron diffusion process and the anisotropic etch process. The vertical deflection of the fabricated electrostatic resonator was measured with a laser vibrometer, and the data were compared with the calculation results. The deflection of the resonator with the flat bridges is smaller than the deflection of that with the corrugated ones because of the residual stress. The residual stress release effect was confirmed by the fact that the measured deflection of the resonator with the corrugated bridges in close to the calculated deflection of the resonator with the flat ones with the initial stress neglected.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.11
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• pp.81-87
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• 2000

A new resonator that is fabricated by single polysilicon layer process is presented. The resonator can move in two orthogonal direction on the plane parallel to the substrate. And the resonant frequencies of the two modes are intrinsically designed to be identical since the overall structure of the resonator is symmetric about the two directions of motion. Since the resonator ideally has two identical vibration mode, it can be applied to various micro-devices that requires multi DOF motion, especially to microgyroscopes. To investigate the feasibility of application of the resonator, dynamic model of the resonator including the nonlinear behavior of driving electrodes is derived and evaluated with the fabricated one, and the self-tuning characteristics are proved though experiments.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.69-70
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• 2008

Micro resonators have been actively investigated for bio/chemical sensors and RF M/NEMS devices. Among various materials, SiC is a very promising material for micro/nano resonators since the ratio of its Young's modulus, E, to mass density, $\rho$, is significantly higher than other semiconductor materials, such as, Si and GaAs. Polycrystalline 3C-SiC cantilever with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and its fundamental resonance was measured by a laser vibrometer in air and vacuum at room temperature, respectively. For the cantilever with $100{\mu}m$ length, $10{\mu}m$width and $1.3{\mu}m$ thickness, the fundamental frequency appeared at 147.2 kHz.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.3
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• pp.258-264
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• 2009

This paper presents two control algorithms for the frequency and amplitude of the resonator of a micro sensor. One algorithm excites the resonator at its a priori unknown resonant frequency, and the other algorithm alters the resonator dynamics to place the resonant frequency at a fixed frequency, chosen by the designer. Both algorithms maintain a specified amplitude of oscillations. The control system behavior is analyzed using an averaging method, and a quantitative criterion is provided for the selecting the control gain to achieve stability. Tracking and estimation accuracy of the natural frequency under the presence of measurement noise is also analyzed. The proposed control algorithms are applied to the MEMS dual-mass gyroscope without mechanical connecting beam between two proof-masses. Simulation results show the effectiveness of the proposed control algorithms which guarantee the proof-masses of the gyroscope to move in opposite directions with the same resonant frequency and oscillation amplitude.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.60 no.4
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• pp.817-822
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• 2011

We propose a novel ring structure based on the stadium-shaped ring resonator (SSRR) with dual photonic crystal microcavity (DPCM) for biosensor and analyzed the sensing characteristics. The Q-factor of the photonic crystal microcavity (PCM) can be significantly enhanced when the PCM or DPCM has the same resonance condition as the SSRR. The simulation results show that the Q-factor of the SRR with DPCM was increased by three times in comparison with single PCM structure. We also defined a mutual interference between two PCMs. Assuming a detectable spectral resolution of 10 picometers, a refractive index resolution of $3.03\times10-5$ can be measured on the SSRR-DPCM.

• Journal of the Korean Magnetics Society
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• v.17 no.3
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• pp.141-146
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• 2007

A new class of LC-resonator for micro magnetic sensor device was invented and fabricated by means of MEMS technique. The micro LC-resonator consists of a solenoidal micro-inductor with a bundle of soft magnetic microwire cores and a capacitor connected in parallel to the micro-inductor. The core magnetic material is a tiny glass coated $Co_{83.2}B_{3.3}Si_{5.9}Mn_{7.6}$ microwire fabricated by a glasscoated melt spinning technique. The core materials were annealed at various temperatures $150^{\circ}C,\;200^{\circ}C\;,250^{\circ}C\;,$ and $300^{\circ}C$ for 1 hour in a vacuum to improve soft magnetic properties. The solenoidal micro-inductors fabricated by MEMS technique were $500{\sim}1,000{\mu}m$ in length with $10{\sim}20$ turns. The changes of inductance as a function of external magnetic field in micro-inductors with properly annealed microwire cores were varied as much as 370%. Since the permeability of ultra soft magnetic microwire is changing rapidly as a function of external magnetic field. The inductance ratio as well as magnetoimpedance ratio (MIR) in a LC-resonator was varied drastically as a function of external magnetic field. The MIR curves can be tuned very precisely to obtain maximum sensitivity. A prototype magnetic sensor device consisting of the developed microinductors with a multivibrator circuit was test successfully.

• Journal of the Korean Vacuum Society
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• v.21 no.1
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• pp.36-40
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• 2012

We have developed the detection method of the resonance frequency of micro/nano mechanical resonator using optical method. The optical interferometery method enabled us to detect the displacement change of resonators within several nm scale. The micro mechanical resonator was produced by attaching a micro mechanical cantilever to a piezo ceramic. The mass of cantilever was increased by evaporating Au using electron beam evaporator and the mass variation was estimated by detecting the resonance frequency changes.

• 한국정보통신설비학회:학술대회논문집
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• 2009.08a
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• pp.293-297
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• 2009

In this thesis, design of a VCO(Voltage controlled Oscillator) with a novel tuning mechanism is presented for the Radar system. This circuit, the 9.5 GHz oscillator is designed and implemented by restructuring microstrip resonator to raise Q value and to require a wide frequency tuning range. This product is fabricated on 2.6 Teflon substrate and device is NE722S01. In this paper, The new microstrip resonator VCO is proposed to achieve the characteristic of a wide frequency tuning range. This microstrip resonator VCO shows the phase noise characteristic of -108.3 dBc/Hz at 1 MHz offset from the fundamental frequency, the output power of 5.7 dBm and the second harmonic suppression of -38 dBc for the VCO are obtained. The manufacture VCO shows a frequency tuning range of 193.8 MHz. The proposed micro trip resonator VCO can be used for X-band Radar System with required tuning range.