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http://dx.doi.org/10.5757/JKVS.2012.21.1.36

Detection of Resonance Frequency of Micro Mechanical Devices Using Optical Method and Their Application for Mass Detection  

Kim, Hak-Seong (School of Physics, Konkok University)
Lee, Sang-Wook (School of Physics, Konkok University)
Publication Information
Journal of the Korean Vacuum Society / v.21, no.1, 2012 , pp. 36-40 More about this Journal
Abstract
We have developed the detection method of the resonance frequency of micro/nano mechanical resonator using optical method. The optical interferometery method enabled us to detect the displacement change of resonators within several nm scale. The micro mechanical resonator was produced by attaching a micro mechanical cantilever to a piezo ceramic. The mass of cantilever was increased by evaporating Au using electron beam evaporator and the mass variation was estimated by detecting the resonance frequency changes.
Keywords
Resonator; Resonance frequency; Displacement detection; Micro cantilever; Mass sensor; Micro mechanical device;
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