• International Journal of Precision Engineering and Manufacturing
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• v.3 no.2
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• pp.72-77
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• 2002

In this paper, a simple method to measure the residual stress in microstructure is presented. In order to find the residual stress in micro-machined beam, the first natural frequency of the beam that has the residual stress inside is analyzed using Rayleigh's energy method. Micro gold electroplated structure is fabricated by surface micro-machining process including electroplating. The made structure is an approximate shape of clamped-clamped beam and its 1 st natural frequency is measured by resonance method. For the better estimation of the residual stress, an equivalent length of micro-fabricated beam to ideal beam is calculated by FEM. The residual stress was estimated from the equivalent length and the measured natural frequency. It was found that a tensile stress was residue in the micro beam structure.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.12
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• pp.195-200
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• 2000

In order to find a residual stress in the micro-machined beam, first natural frequency of the beam that has the residual stress inside is analyzed using the Rayleigh's energy method. Micro gold electroplated structure is fabricated by surface micro-machining process. The made structure is clamped-clamped beam and its 1st natural frequency is measured by resonance method. For the better estimation of the residual stress, an equivalent length of micro-machined beam to ideal beam is calculated by FEM. The residual stress is estimated from the equivalent length and the measured natural frequency.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.11
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• pp.2415-2420
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• 2002

In the present study, a new anchor design was proposed to minimize the initial deflection of micro multi-layer cantilever beam with step-up structure, which is a key component of thin film micro-mirror array. It is important to minimize the initial deflection, caused by residual stress, because it reduces the performance of the actuation. Theoretical and experimental studies were conducted to examine the cause of the initial bending deflection. It was found that the bending deflection at the anchor of the cantilever beam was the primary source of initial deflection. Various anchor designs were proposed and the initial deflections for each design were calculated by finite element analysis. The analysis results were compared with experiments. To reduce the initial deflection a secondary support was added to the conventional structure. The optimal shapes were obtained by simulation and experiment. It was found from the analysis that the ratio or horizontal and vertical dimensions of secondary support was the governing factor, which affected the initial deflection.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.352-357
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• 2001

In this study, residual stress was investigated to evaluate damaged layer in high speed machining through simulation. In machining steel(STDll), residual stress remaining in machined surface was mainly appeared as compressive stress. The scale of this damaged layer more depends on feed per tooth and radial depth than spindle speed. Damaged layer was measured by optical microscope and hardness method. The micro-structure of damaged layer was a martensite because of cutting force and cutting temperature. Thickness of damaged layer is increased with incresing of feed per tooth and radial depth.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.5
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• pp.249-252
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• 2001

The paper represents the design and fabrication of an electrostatic micro actuator with $p^+$,/TEX> Si cantilevers. The micro actuator consists of a plate suspended by four $p^+$,/TEX> silicon cantilevers and an electrode on a glass substrate. The $p^+$,/TEX> Si structure is fabricated by the boron diffusion process and the anisotropic wet etch process. The cantilevers of the micro actuator curl down because of the residual stress gradient in $p^+$,/TEX> silicon. When the electrostatic forec is applied to the $p^+$,/TEX> cantilevers, the vertical displacement of the plate can be achieved. The deflection of the cantilever due to the residual stress gradient and the vertical displacement by electrostatic force were calculated. The displacement of the plate was measured with a laser displacement meter for various input voltages and frequencies. The feasibility of the proposed micro actuator for the applications to optical pickup devices or optical communication devices was confirmed by the experiments.

• Proceedings of the KIEE Conference
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• 1998.07g
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• pp.2530-2532
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• 1998

Micro gold electroplating structure is fabricated by surface micromachining process. The made structure is clamped-clamped beam and its 1st natural frequency is measured by resonance method. In order to find residual stress, first natural frequency of beam which has tensile stress inside is analysed using Rayleigh's method. Elastic modulus and residual stress are estimated from the measured natural frequency.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.820-823
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• 2002

MEMS structures Generally have been fabricated using surface-machining, but the interface failure between silicon substrate and evaporated thin film frequently takes place due to difference of linear coefficient of thermal expansion. Therefore this paper studied the effect of the residual stress caused by variable external loads. This study did not analyzed accurate quantity of the residual stress but trend for the effect of residual stress. Several specimens were fabricated using other material(Al, Au and Cu) and thermal load was applied. The residual stress was measured by nano-indentation using AFM. The results showed the existence of the residual stress due to thermal load. The indentation area of the thermal loaded thin film reduced about 3.5% comparing with the virgin thin film caused by residual stress. The finite element analysis results are similar to indentation test.

• Korean Journal of Materials Research
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• v.23 no.9
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• pp.531-536
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• 2013

This paper investigates the effect of prolonged high temperature exposure on concentric laminated $Al_2O_3-ZrO_2$ composites. An ultrafine scale microstructure with a cellular 7 layer concentric lamination with unidirectional alignment was fabricated by a multi-pass extrusion method. Each laminate in the microstructure was $2-3{\mu}m$ thick. An alternate lamina was composed of 75%$Al_2O_3$-(25%m-$ZrO_2$) and t-$ZrO_2$ ceramics. The composite was sintered at $1500^{\circ}C$ and subjected to $1450^{\circ}C$ temperature for 24 hours to 72 hours. We investigated the effect of long time high temperature exposure on the generation of residual stress and grain growth and their effect on the overall stability of the composites. The residual stress development and its subsequent effect on the microstructure with the edge cracking behavior mechanism were investigated. The residual stress in the concentric laminated microstructure causes extensive micro cracks in the t-$ZrO_2$ layer, despite the very thin laminate thickness. The material properties like Vickers hardness and fracture toughness were measured and evaluated along with the microstructure of the composites with prolonged high temperature exposure.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.4 s.235
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• pp.526-533
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• 2005

Reliability problem in inkjet printhead, one of MEMS devices, is also very important. To eject an ink drop, the temperature of heater must be high so that ink contacting with surface reaches above $280^{o}C$ on the instant. Its heater is embedded in the thin multi-layer in which several materials are deposited. MEMS processes are the main sources of residual stresses development. Residual stress is one of the factors reducing the reliability of MEMS devices. We measured residual stresses of single layers that consist of multilayer. FE analysis is performed using design of experiment(DOE). Transient analysis for heat transfer is performed to get a temperature distribution. And then static analysis is performed with the temperature distribution obtained by heat transfer analysis and the measured residual stresses to get a stress distribution in the structure. Although the residual stress is bigger than thermal stress, thermal stress is more influential on fatigue life.

• Journal of Welding and Joining
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• v.21 no.5
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• pp.568-574
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• 2003

In the welding for the steel structure of H-beam with mild steel and 490N/$\textrm{mm}^2$ high tensile steel, we applied the fillet weld mostly and 6-8mm weld length(AISC-spec.). And a new developed metal-cored-wire is used in automatic welding as well as semi-automatic welding. In this study we have attempted to raise the welding productivity and to stabilize the quality on horizontal positions of fillet welding with the following items: - We improved the weld productivity using metal based cored wire with a high deposition rate in the steel structure of H-beam. - We tested the weldability and evaluated the quality of the weldmetal by horizontal fillet $CO_2$ welding. The process is carried out in combination with a special purpose metal-based FCW with excellent resistance to porosity and high welding speed. - We studied the micro structure of the weldmetal by the various welding conditions. - We studied the effect of welding residual stress by the welding conditions in T-joint. Therefore, it can be assured that more productive and superior quality of the weldmetal can be taken from this study results.