Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.07g
- /
- Pages.2530-2532
- /
- 1998
Elastic Modulus Measurement of Micro Gold Electroplating Structure
마이크로 금 전해 도금 구조물의 탄성계수 측정
- Kim, Duck-Hyun (Dept. of PME, Hanyang Univ.) ;
-
Ahn, Yoo-Min
(Dept. of ME, Hanyang Univ.)
;
- Baek, Chang-Wook (Dept. of ME, Hanyang Univ.) ;
-
Kim, Yong-Kweon
(School of EE. Seoul Nat'l Univ.)
- Published : 1998.07.20
Abstract
Micro gold electroplating structure is fabricated by surface micromachining process. The made structure is clamped-clamped beam and its 1st natural frequency is measured by resonance method. In order to find residual stress, first natural frequency of beam which has tensile stress inside is analysed using Rayleigh's method. Elastic modulus and residual stress are estimated from the measured natural frequency.
Keywords