• Title/Summary/Keyword: Micro patterning

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A novel method for manufacturing macroscale patterns to enhance electrical efficiency by Triboelectric generator (마찰전기 발전기의 전기 효율을 향상하기 위한 macroscale 패턴 제조 방식 연구)

  • Yang, Jun-Ho;Lee, Jaeyoung
    • Journal of Energy Engineering
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    • v.29 no.1
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    • pp.75-84
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    • 2020
  • This study investigates a simple, yet effective and affordable, manufacturing method to increase the electrical efficiency by triboelectric generator (TEG) applying 3D printers. In this study, we propose the newly manufacturing method for producing a macroscale surface patterning. Overall experiments were conducted in designed test-bed chamber system which can control the magnitude and frequency of the frictional force and the relative humidity. Furthermore, we can demonstrate the voltage enhancement of macroscale surface patterns about 1.6-fold. The peak voltage producing by TEG was as high as 18 V. In comparison with conventional process that employ micro- and nanoscale patterns, the proposed process by 3D printer is faster and more suitable for mass production.

Novel Cylindrical Magnetic Levitation Stage for Rotation as well as Translation along Axles with High Precisions (고정밀 회전 및 축방향 이송을 위한 신개념 원통형 자기부상 스테이지)

  • Jeon, Jeong-Woo;Caraiani, Mitica;Lee, Chang-Lin;Jeong, Yeon-Ho;Kim, Jong-Moon;Oh, Hyeon-Seok;Kim, Sungshin
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.61 no.12
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    • pp.1828-1835
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    • 2012
  • In this paper, a conceptual design and a detailed design of novel cylindrical magnetic levitation stage is introduced. This is came from planar-typed magnetic levitation stage. The proposed stage is composed of cylinder-typed permanent magnet array and semi-cylinder-typed 3 phase winding module. When a proper current is induced at winding module, a magnetic levitation force between the permanent magnet array and winding module is generated. The proposed stage can precisely move the cylinder to rotations and translations as well as levitations with the magnetic levitation force. This advantage is useful to make a nano patterning on the surface of cylindrical specimen by using electron beam lithography under vacuum. Two methods are used to calculate required magnetic levitation forces. The one is 2D FEM analysis, the other is mathematical modeling. This paper shown that results of two methods are similar. An assistant plate is introduced to reduce required currents of winding module for levitations in vacuum. The mathematical model of cylindrical magnetic levitation stage is used for dynamic simulation of magnetic levitations. A lead-lag compensator is used for control of the model. Simulation results shown that the detail designed model of the cylindrical magnetic levitation stage with the assistant plate can be controlled very well.

Fabrication of Nanopatterns for Biochip by Nanoimprint Lithography (나노임프린트를 이용한 바이오칩용 나노 패턴 제작)

  • Choi, Ho-Gil;Kim, Soon-Joong;Oh, Byung-Ken;Choi, Jeong-Woo
    • KSBB Journal
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    • v.22 no.6
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    • pp.433-437
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    • 2007
  • A constant desire has been to fabricate nanopatterns for biochip and the Ultraviolet-nano imprint lithography (UV-NIL) is promising technology especially compared with thermal type in view of cost effectiveness. By using this method, nano-scale to micro-scale structures also called nanopore structures can be fabricated on large scale gold plate at normal conditions such as room temperature or low pressure which is not possible in thermal type lithography. One of the most important methods in fabricating biochips, immobilizing, was processed successfully by using this technology. That means immobilizing proteins only on the nanopore structures based on gold, not on hardened resin by UV is now possible by utilizing this method. So this selective nano-patterning process of protein can be useful method fabricating nanoscale protein chip.

Simple Fabrication of Adipocyte Cell Chip Using Micropatterning (미세접촉인쇄법을 이용한 지방세포 칩 제작)

  • Kim, Gi Yong;Jeong, Heon-Ho;Lee, Chang-Soo;Roh, Changhyun
    • Korean Chemical Engineering Research
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    • v.54 no.2
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    • pp.223-228
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    • 2016
  • In this study, we described a simple and facile method to generate uniform microwells poly(dimethyl siloxane) (PDMS) microstamps through micro-molding for efficient, rapid and reliable cell patterning of adipocyte differentiation. In contrast to the conventional methods, the microstamp technologies are low expensive, non-toxic, and using a small amount of solution. Recently, Orlistat known as tetrahydrolipstatin is a prescription drug designed to treat obesity which is used to aid in weight loss and help to reduce overweight obesity. Here, 3T3-L1 cells were treated under various concentration manners of Orlistat $0.2{\mu}M{\sim}5.0{\mu}M$. and it was confirmed maximum 26.5% inhibition activity compared to control. Thus, we elucidated this platform can be used for the real-time analyzing of cell proliferation, adipocyte differentiation for evaluation of anti-obesity agents on cell chip. Furthermore, we except that this platform technology designed here might be readily be expanded to discover a wider variety of anti-obesity agents.

Fabrication Process of a Nano-precision Polydimethylsiloxane Replica using Vacuum Pressure-Difference Technique (진공 압력차이법에 의한 나노 정밀도를 가지는 폴리디메틸실록산 형상복제)

  • 박상후;임태우;양동열;공홍진;이광섭
    • Polymer(Korea)
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    • v.28 no.4
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    • pp.305-313
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    • 2004
  • A vacuum pressure-difference technique for making a nano-precision replica is investigated for various applications. Master patterns for replication were fabricated using a nano-replication printing (nRP) process. In the nRP process, any picture and pattern can be replicated from a bitmap figure file in the range of several micrometers with resolution of 200nm. A liquid-state monomer is solidified by two-photon absorption (TPA) induced by a femto-second laser according to a voxel matrix scanning. After polymerization, the remaining monomers were removed simply by using ethanol droplets. And then, a gold metal layer of about 30nm thickness was deposited on the fabricated master patterns prior to polydimethylsiloxane molding for preventing bonding between the master and the polydimethylsiloxane mold. A few gold particles attached on the polydimethylsiloxane stamp during detaching process were removed by a gold selecting etchant. After fabricating the polydimethylsiloxane mold, a nano-precision polydimethylsiloxane replica was reproduced. More precise replica was produced by the vacuum pressure-difference technique that is proposed in this paper. Through this study, direct patterning on a glass plate, replicating a polydimethylsiloxane mold, and reproducing polydimethylsiloxane replica are demonstrated with a vacuum pressure-difference technique for various micro/nano-applications.

Hydrophobic Organic/Inorganic Composite Films with 3D Hierarchical Nanostructured Surfaces (3D 계층적 나노구조화된 표면을 갖는 소수성 유/무기 복합 필름)

  • Seo, Huijin;Ahn, Jinseong;Park, Junyong
    • Composites Research
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    • v.34 no.4
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    • pp.264-268
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    • 2021
  • In this study, we propose a method for fabricating hydrophobic coatings/films with three-dimensional (3D) hierarchical nanostructured organic/inorganic composite surfaces. An epoxy-based, large-area 3D ordered nanoporous template is first prepared through an advanced photolithography technique called Proximity-field nanoPatterning (PnP). Then, a hierarchically structured surface is generated by densely impregnating the template with silica nanoparticles with an average diameter of 22 nm through dip coating. Due to the coexisting micro- and nano-scale roughness on the surface, the fabricated composite film exhibits a higher contact angle (>137 degrees) for water droplets compared to the reference samples. Therefore, it is expected that the materials and processes developed through this study can be used in various ways in the traditional coating/film field.

Applications of Self-assembled Monolayer Technologies in MEMS Fabrication (MEMS 공정에서의 자기 조립 단분자층 기술 응용)

  • Woo-Jin Lee;Seung-Min Lee;Seung-Kyun Kang
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.2
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    • pp.13-20
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    • 2023
  • The process of microelectromechanical system (MEMS) fabrication involves surface treatment to impart functionality to the device. Such surface treatment method is the self-assembled monolayer (SAM) technique, which modifies and functionalizes the surface of MEMS components with organic molecule monolayer, possessing a precisely controllable strength that depends on immersion time and solution concentration. These monolayers spontaneously adsorb on polymeric substrates or metal/ceramic components offering high precision at the nanoscale and modifying surface properties. SAM technology has been utilized in various fields, such as tribological property control, mass-production lithography, and ultrasensitive organic/biomolecular sensor applications. This paper provides an overview of the development and application of SAM technology in various fields.

Development of Laser Processing Technology and Life Evaluation Method for Lifespan Improvement of Titanium Superhydrophobic Surface (티타늄 초소수성 표면의 수명 향상을 위한 레이저 처리 기법 개발 및 내수명성 평가법 개발)

  • Kyungeun Jeong;Kyeongryeol Park;Yong Seok Choi;Seongmin Kang;Unseong Kim;Song Yi Jung;Kyungjun Lee
    • Tribology and Lubricants
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    • v.40 no.3
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    • pp.91-96
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    • 2024
  • Recently, extensive studies have been carried out to enhance various performance aspects such as the durability, lifespan, and hardness by combining diverse materials or developing novel materials. The utilization of superhydrophobic surfaces, particularly in the automotive, textile, and medical device industries, has gained momentum to achieve improved performance and efficiency. Superhydrophobicity refers to a surface state where the contact angle when water droplets fall is above 150°, while the contact angle during sliding motion is smaller than 10°. Superhydrophobic surfaces offer the advantage of water droplets not easily sliding off, maintaining a cleaner state as the droplets leave the surface. Surface modification involves two fundamental steps to achieve superhydrophobicity: surface roughness increase and surface energy reduction. However, existing methods, such as time-consuming processes and toxic organic precursors, still face challenges. In this study, we propose a method for superhydrophobic surface modification using lasers, aiming to create roughness in micro/nanostructures, ensuring durability while improving the production time and ease of fabrication. The mechanical durability of superhydrophobic samples treated with lasers is comparatively evaluated against chemical etching samples. The experimental results demonstrate superior mechanical durability through the laser treatment. Therefore, this research provides an effective and practical approach to superhydrophobic surface modification, highlighting the utility of laser treatment.

Durability of Nano-/micro- Pt Line Patterns Formed on Flexible Substrate (유연기판 위 형성된 나노-마이크로 Pt 금속선 패턴의 내구성 연구)

  • Park, Tae Wan;Choi, Young Joong;Park, Woon Ik
    • Journal of the Microelectronics and Packaging Society
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    • v.25 no.3
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    • pp.49-53
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    • 2018
  • Since various methods to form well-aligned nano-/micro- patterns are underlying technologies to fabricate next generation wearable electronic devices, many efforts have been made to realize finer patterns in recent years. Among lots of patterning methods, the present invention includes a nano-transfer printing (n-TP) process which is advantageous in that a processing cost is low and high-resolution patterns can be formed within a short processing time. We successfully achieved pattern formation of highly ordered Pt lines with line-width of 250 nm, 500 nm, and $1{\mu}m$ on transparent and flexible substrates. In addition, we analyzed the durability of the patterns, showing excellent stability of line-shape even after a physical and repeated bending test of 500 times using a bending machine. As a result, it is expected that a n-TP process is very useful for forming various metal patterns, and it is also expected to be applied to wiring and interconnection technology of next generation flexible electronic devices.

Infrared absorbance of the Au-black deposited under nitrogen gas-filled low vacuum condition (질소가스 분위기의 저진공으로 증착된 Au-black의 적외선 흡수도)

  • O, Gwang-Sik;Kim, Dong-Jin;Kim, Jin-Seop;Lee, Jeong-Hui;Lee, Yong-Hyeon;Lee, Jae-Sin;Han, Seok-Yong
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.2
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    • pp.13-21
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    • 2000
  • Au-black for the application of the long wavelength infrared absorber has been prepared by evaporating Au under nitrogen gas-filled low vacuum condition. Characteristics of the deposited Au-black were carefully investigated through structural analysis, infrared absorbance measurement, and patterning of the layer, all of which are dependent on the deposition condition. High density of micro-cavity that trapped infrared were obtained, and infrared absorbance in the wavelength range from 3 $\mu\textrm{g}$ to 14 $\mu\textrm{g}$ was found to be about 90% when the Au-black layer was produced under the deposition condition of mass Per area of about 600 $\mu\textrm{g}$/cm$^{2}$ and chamber pressure of above 1 Torr. Photoresist lift-off process could be performed to pattern the Au-black, of which mass per area was below 900 $\mu\textrm{g}$/cm/ sup 2/. In view of absorbance, heat capacity, and pattern formation, the deposition condition of chamber pressure of about 1 Tow and mass per area of about 600$\mu\textrm{g}$/cm$^{2}$ was most adequate for preparing the Au-black as an infrared absorber.

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