Journal of the Institute of Electronics Engineers of Korea SD (대한전자공학회논문지SD)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Infrared absorbance of the Au-black deposited under nitrogen gas-filled low vacuum condition

질소가스 분위기의 저진공으로 증착된 Au-black의 적외선 흡수도

  • O, Gwang-Sik (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Kim, Dong-Jin (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Kim, Jin-Seop (Dept.of Electronics Information Communication Engineering, Inje University) ;
  • Lee, Jeong-Hui (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Lee, Yong-Hyeon (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Lee, Jae-Sin ;
  • Han, Seok-Yong
  • 오광식 (경북대학교 전자전기공학부) ;
  • 김동진 (경북대학교 전자전기공학부) ;
  • 김진섭 (인제대학교 전자정보통신공학부) ;
  • 이정희 (경북대학교 전자전기공학부) ;
  • 이용현 (경북대학교 전자전기공학부) ;
  • 이재신 (울산대학교 재료금속공학부) ;
  • 한석용 (한국전자(주) 반도체연구센터)
  • Published : 2000.02.01
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Abstract

Au-black for the application of the long wavelength infrared absorber has been prepared by evaporating Au under nitrogen gas-filled low vacuum condition. Characteristics of the deposited Au-black were carefully investigated through structural analysis, infrared absorbance measurement, and patterning of the layer, all of which are dependent on the deposition condition. High density of micro-cavity that trapped infrared were obtained, and infrared absorbance in the wavelength range from 3 $\mu\textrm{g}$ to 14 $\mu\textrm{g}$ was found to be about 90% when the Au-black layer was produced under the deposition condition of mass Per area of about 600 $\mu\textrm{g}$/cm$^{2}$ and chamber pressure of above 1 Torr. Photoresist lift-off process could be performed to pattern the Au-black, of which mass per area was below 900 $\mu\textrm{g}$/cm/ sup 2/. In view of absorbance, heat capacity, and pattern formation, the deposition condition of chamber pressure of about 1 Tow and mass per area of about 600$\mu\textrm{g}$/cm$^{2}$ was most adequate for preparing the Au-black as an infrared absorber.

장파장 적외선 흡수체로 응용하기 위한 Au-black을 질소가스 분위기의 저진공에서 Au를 증발원으로 하여 제조하였고, 증착조건에 따른 Au-black의 미세구조 분석, 적외선 흡수도 측정 및 패턴형성 실험을 통해 Au-black의 특성을 조사하였다. 단위면적당 질량이 약 600 $\mu\textrm{g}$/㎝/sup 2/이고, 챔버압력이 약 1 Torr이상인 증착조건으로 제조된 Au-black에서 적외선이 포획되는 높은 밀도의 미세공동이 존재하였고, 이 Au-black의 적외선 흡수도는 3∼14 $\mu\textrm{g}$의 파장범위에서 대체로 90%정도였다. 약 900 $\mu\textrm{g}$/cm/sup 2/이하의 단위면적당 질량을 갖는 Au-black의 경우 감광액 lift-off 공정에 의한 패턴형성이 가능하였다. 적외선 흡수도, 열용량 및 패턴형성을 고려할 매 적외선 흡수체로서의 Au-black을 제조하기 위해서는 챔버압력이 약 1 Torr이고, 단위면적당 질량이 약 600 $\mu\textrm{g}$/cm/sup 2/인 증착조건이 가장 적합하였다.

Keywords

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