• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.10
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• pp.839-845
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• 2007

In this paper, a polishing pad has been analyzed in detail, to understand surface phenomena of polishing process. The polishing pad plays a key role in polishing process and is one of the important layer in polishing process, because it is a reaction layer of polishing[1]. Pad surface physical property is also ruled by pad profile. The profile and roughness of pad is controlled by different types of conditioning tool. Conditioning tool add mechanical force to pad, and make some roughness and profile. Formed pad surface will affect on polishing performance such as RR (Removal Rate) and uniformity in CMP Pad surface condition is changed by conditioning tool and dummy run and is stable at final. And this research, we want to reduce break-in and dummy polishing process by analysis of pad surface and artificial machining to make stable pad surface. The surface treatment or machining enables to control the surface of polishing pad. Therefore, this research intends to verify the effect of the buffing process on pad surface through analysis of the removal rate, friction force and temperature. In this research, urethane polishing pad which is named IC pad(Nitta-Haas Inc.) and has micro pore structure, is studied because, this type of pad is most conventional type.

• Journal of Korean Institute of Industrial Engineers
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• v.39 no.3
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• pp.149-155
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• 2013

Electric discharging machining (EDM) is commonly adopted to machine the precise and tiny part when it is difficult to meet the productivity and the tolerance by the conventional cutting method. The die-sinking EDM method works well to machine the micro-parts and the perpendicular wall of die and mould, whereas EDM drilling, called super drill, is excellent to machine the deep and narrow hole regardless the material hardness and the hole location. However, the electrode wear is rapid compared to the conventional cutting tool and makes it difficult to control the electrode feeding and to machine precisely. This paper presents an efficient method to estimate the electrode wear using hole pass-through experiment while the stochastic method is used to compensate for the estimation model. To validate the proposed method, the commercial EDM drill machine is used. The experiment result shows that the electrode wear amount can be predicted very precisely.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.9
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• pp.76-83
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• 2021

This study examines the characteristics of spraying conditions based on the change in standoff distance during fine particle spraying while measuring the surface roughness, maximum depth, and maximum width of the sprayed surface. The processing shape of the sprayed surface is analyzed to understand the effects of injection pressure, nozzle diameter, standoff distance, processing shape, processing cycle, processing speed, and injection particles, which are the main factors of fine particle injection processing. Based on the derived characteristics, we attempt to determine the interrelationships of these major factors. The standoff distance is set as a variable factor and a spray machining experiment using a hexagonal shape (from among polygons) instead of square and circular shapes is conducted. Results reveal that research on the characteristics of spraying conditions could be expanded based on changes in the shapes of workpieces.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.3
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• pp.265-270
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• 2004

Experiment study on a down scaled two-phase catalytic reactor is presented. As a preliminary step for the development of catalytic reactor, nano-particulate catalyst was prepared. Perovskite La$\_$0.8/Sr$\_$0.2/CoO$_3$is chosen and synthesized as a catalyst considering superior catalytic performance in reduction and oxidation process where oxygen is involved among the reagent. Reactor that has a scale of 2${\times}$10${\times}$25mm was made by machining of A1 block as a layered structure considering further extension to micro-machining. Hydrogen peroxide of 70wt% was adopted as reactant and was provided to the reactor loaded with 1.5 g of catalyst. Reactant flow rate was varied by precision pump with a range of 0.15cc/min to 17.2cc/min. Temperature distribution within reactor was recorded by 3 thermocouples and total amount of liquid product was measured. Temperature distribution and factors that affect temperature were observed and relation between temperature distribution and production rate was also analyzed. Relative time scale plays a significant role in the performance of the reactor. To obtain steady state operation, appropriate ratio of flow rate, catalyst mass and reactor geometry is required and furthermore to get more efficient production rate temperature distribution should be evenly distributed. The database obtained by the experiment will be used as a design parameter for micro reactor.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.5
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• pp.1172-1182
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• 1993

In orthogonal machining a quantitative model for burr formation process and fracture when tool exits workpiece is proposed. When no fracture during burr formation burr formation process is divided by three parts; Initiation, Development and Final burr formation. According to the properties of workpiece fracture will happen or not after initiation of burr formation. Considering the fact that fracture depends on the ductility of workpiece, the fracture strain obtained from ductile fracture criterion is used for prediction. It is verified that the fracture strain from tension test can be used as fracture criterion in burr formation without large error. For detailed observation of burr formation an experimental stage for micro orthogonal cutting inside SEM (Scanning Electron Microscope) is built. Through the comparison between model prediction and experimental result from orthogonal machining in milling machine the model is verified.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.10
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• pp.29-33
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• 2010

UV laser micromachining of metallic materials has been used in microelectronic and other industries. This paper shows on experimental investigation of micromachining of copper using a 355nm UV laser with 50ns pulse duration. A finite element model with high strain rate effect is especially suggested to investigate the phenomena which are only dominated by mechanically pressure impact in disregard of thermally heat transfer. In order to consider the strain rate effect, Cowper-Symonds model was used. To analyze the dynamic deformation during a very short processing time, which is nearly about several tens nanoseconds, a commercial Finite Element Analysis (FEA) code, LS-DYNA 3D, was employed for the computational simulation of the UV laser micro machining behavior for thin copper material. From these computational results, depth of the dent (from one to six pulsed) were observed and compared with previous experimental results. This will help us to understand interaction between UV laser beam and material.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.10a
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• pp.62-65
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• 2009

There have been strong demands for micro size screw with high precision due to miniaturization and integration trends for electronic products such as Hard Disk Drives. The thread rolling process for screw manufacturing are lower unit cost, reduced material utilization, and superior mechanical properties compared to the machining process. But little work has been done on the thread rolling of micro size screw. In this paper, we investigate thread rolling process using Finite Element Analysis (FEA) and parameter study for screw manufacturing. And we also carried out compression tests to obtain the material property and to implement into the FE tool for the numerical simulation. In case that parameter of relative position oldies is half length of pitch for maintaining the continuous thread profiles, we found that shear friction factor was 0.9 during the thread rolling process using FEA. We are trying to develop the thread rolling process using the FE-simulation to manufacture screws which have been commonly produced from the industrial level fabrication at present.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.05a
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• pp.40-44
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• 2002

The motivation of this work is to use SAM(Self-Assembled Monolayer) for developing a rapid and flexible non-photolithographic nano-structure fabrication technique which can be utilized in micro-machining of metals as well as silicon-based materials. The fabrication technique implemented in this work consists of a two-step process, namely, mechanical scribing followed by chemical etching. From the experimental results, it was found that thiol on copper surface could be removed even under a few nN normal load. The nano-tribological characteristics of thiol-SAM on various metals were largely dependent on the native oxide layer of metals. Based on these findings, nano-patterns with sub-micrometer width and depth on metal surfaces such as Cu, Au and Ag could be obtained using a diamond-coated tip.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1101-1106
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• 2014

Hybrid manufacturing technology has been advanced to overcome limitations due to traditional fabrication methods. To fabricate a micro/nano-scale structure, various manufacturing technologies such as lithography and etching were attempted. Since these manufacturing processes are limited by their materials, temperature and features, it is necessary to develop a new three-dimensional (3D) printing method. A novel nano-scale 3D printing system was developed consisting of the Nano-Particle Deposition System (NPDS) and the Focused Ion Beam (FIB) to overcome these limitations. By repeating deposition and machining processes, it was possible to fabricate micro/nano-scale 3D structures with various metals and ceramics. Since each process works in different chambers, a transfer process is required. In this research, nanoscale 3D printing system was briefly explained and an alignment algorithm for nano-scale 3D printing system was developed. Implementing the algorithm leads to an accepted error margin of 0.5% by compensating error in rotational, horizontal, and vertical axes.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.4
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• pp.106-113
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• 2000

One of the recent changes in machining technology is rapid application of micro- and high precision grinding processes. A fine groove generation is necessary for the fabrication of optics, electronics and semiconductor parts. Slot grinding is very efficient for the generation of micro ordered groove with hard and brittle materials. In the process of slot grinding, chipping at the sharp edges and microcracks of the ground grooves are inevitable defects. Chipping should be reduced for the improvement of surface integrity. Mechanical contact with diamond grits causes microcracks at the grooves. This damage resides subsurface, and can be the cause of failure of the punch die. This paper deals with chipping generation at the sharp edges, surface integrity of side groove and fracture strength is related to the microcracks in the slot grinding.