• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.2
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• pp.104-111
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• 2004

Ultrasonic machining is a non-thermal, non-chemical, md non-electorial material removal process, and thus results in minimum modifications in mechanical properties of the brittle material during the process. Also, ultrasonic machining is a non-contact process that utilize ultrasonic vibration to impact a brittle material. In this research characteristics of micro-hole machining for brittle materials by ultrasonic machining(USM) process have been investigated. And the effect of ultrasonic vibration on the machining conditions is analyzed when machining fir non-conductive brittle materials using tungsten carbide tools with a view to improve form and machining accuracy.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.1
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• pp.22-28
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• 2009

In order to optimize the polishing process, Run to Run control scheme has been applied to the micro mold polishing in this study. Also, to fully understand the effect of parameters on the surface roughness a design of experiment is performed. By linear approximation of main factors such as gap and rotational speed of micro quill, EWMA (Exponential Weighted Moving Average) gradual mode controller is adopted as a optimizing tool. Consequently, the process converged quickly at a target value of surface roughness Ra 10nm and Rmax 50nm, and was hardly affected by unwanted process noises like initial surface quality and wear of magnetic abrasives.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.27-33
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• 2004

Electro-theological fluid is recently used for the micro polishing of 3-dimensional micro-aspherical lens. It's also used for polishing small area defects on the wide flat wafer. Since ER fluid shows a behavior of viscosity changing under certain electric fields. micro polishing efficiency may be enhanced for certain cases. In this paper, a perfluorinated carbonyl fluoride oil based ER fluids was used to improve surface polishing rate and submicron-scale accuracy. As the polishing electrodes, micro size cylindrical tools had been used for maximizing the electric field. An experimental device, which was applied for micro polishing a number of wafers of 4inches in size and other workpiece. was made on a precision polishing system. It consisted of a steel electrode. a wafer fixture. l0㎃ current and DC 5㎸ power supply unit, and a controller unit. From the Experiments. the ER fluid is applicable for micro polishing of small parts.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.263-268
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• 2001

The needs for precision machining of micro to milli parts have been increased as the industry require high quality products, especially for the micro-machining of IT products. The ultra-precision machining system is essential for the micro machining of fine structures, which insures machining accuracy, low systematic and random error and repeatability. In this study, we developed micro machining system, which is equipped with air bearing stage for ultra precision machining and also we present the results of V-grooving experiments, conducted by the developed system, to verify the performance of system. The results show that the machined V-grooving had good accuracy with repeatable stability.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.313-317
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• 2003

Micro-Channel ultra-precision polishing is a new technology used in magnetic field-assisted relishing. In this paper, an electromagnet or the i18 of test system was designed and manufactured. A size of magnetic abrasive is used on 25~75${\mu}{\textrm}{m}$ and for the polish a micro-channel upper part. A surface of channel which is not even is manufactured using magnetic abrasive finishing at upper surface of micro-channel. As a result, the surface roughness rose by 80％ after upper surface of micro- channel was polished up 8 minutes by polishing.

• Journal of Power System Engineering
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• v.10 no.2
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• pp.99-103
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• 2006

The laser interferometer has been used for measurement of the micro displacement error. Although the laser interferometer is widely accepted as a tool for measurement of motion accuracy, the set-up procedure is time-consuming because of the strict requirement on alignment between a laser head and optic units. This paper addresses the development of a laser interferometer to measure the micro displacement for a micro machine. The portable laser interferometer which integrates a laser probe and optics, is developed for the convenient measurement. For the experiment, moving mirror set up on the micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is obtained and analyzed by LabView. Finally experiments are found out the relation between micro displacement and output signal.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.500-504
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• 2004

The bio-micro pin has been usually used for the biochemistry analysis. The manufacturing capability of the micro-pin and the their array with the effective and low-cost way is very important and it gives great economical benefits to developers. The micro-pin is composed of the sample channel for holding the liquid with the fixed volume, the flat tip which determines the printing quality and the pin head for preventing the rotation of the pin in the holder. In this study, we have manufactured newly designed micro-pins by the wire-EDM process with special jigs, and analyzed liquid holding and printing characteristics with respect to the variation of the shape and the tip size of the micro-pin.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.168-174
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• 2007

A ceramic glass mold was developed for micro hot-embossing and replicated polymer parts are fabricated. The glass-ceramic micro mold could be fabricated with a laser process and a wet etching process and the fabrication time could be saved a lot. Various polymer micro structures can be obtained by hot-embossing. The process parameters such as ho-embossing temperatures or pressures were investigated and optimized. This process can be applied for fabrication of micro structures for flip-chips or micro fluidic channels for bio-engineering. The advantages and disadvantages of this process are discussed, too.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.2
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• pp.51-57
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• 2008

Recently, the manufacturer of microscopic structures along with the development of technology to produce electronics, communication and semiconductors allows various components to be smaller in size, with higher precision. Therefore, preoccupancy of micro/nano-level machining technology in order to product micro/nano-components and parts is key issue in the field of manufacturing. In this study, machinability of micro machining was studied through the machining of aluminum, brass and steel workpiece. Inspection of the cutting force variation patterns of large numbers of micro machining indicated that characteristics of the workpiece. Surface roughness prediction methods were developed by considering the variation of the static part of the feed direction cutting force. The accuracy of the proposed approaches were tested with experimental data and the agreement between the predictions and actual observations are addressed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.977-981
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• 2000

Direct drive linear motors have large potential for use as high speed machine tool feed units since they can increase machining rates and improve servo accuracy by eliminating gear related machining problems. So, in this paper, characteristic of 2-axis linear motor feed unit are studied and control gain are adjusted considering positioning, velocity, acceleration and static stiffness. We confirm linear motor feed unit are affected value of control gain sensitively, because drive directly. From the experiment, this feed unit has l${\mu}{\textrm}{m}$ micro step resolution, 5.7${\mu}{\textrm}{m}$ positioning accuracy and under 60${\mu}{\textrm}{m}$ circularity.