• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.9
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• pp.1931-1942
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• 2002

In this paper a formulation of robust optimization is presented and illustrated by a design example of vibratory micro gyroscopes in order to reduce the effect of variations due to uncertainties in MEMS fabrication processes. For the vibratory micro gyroscope considered it is important to match the resonance frequencies of the vertical (sensing) and lateral (driving) modes as close as possible to attain a high sensing sensitivity. A deterministic optimization in which the difference of both the sensing and driving natural frequencies is minimized as an objective function results in highly enhanced performance but apt to be very sensitive to fabrication errors. The formulation proposed is to attain robustness of the performance by including the sensitivity of the response with respect to uncertain variables as a term of objective function to be minimized. This formulation is simple and practically applicable since no detail statistical information on fabrication errors is required. The geometric variables, beam width, length and thickness of vibratory micro gyroscopes are adopted as design variables and at the same time considered as uncertain variables because here occur the fabrication errors. A robustness test in terms of a percentage yield by using the Monte Carlo simulation has shown that the robust optimum produces twice more acceptable designs than the deterministic optimum. Improvement of robustness becomes bigger as the amount of fabrication errors is assumed larger. Considering that the magnitude of fabrication errors and uncertainties in a MEMS structure are comparatively large, the present method is illustrated to be a viable approach for a robust MEMS design.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.40 no.2
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• pp.397-407
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• 2015

In this paper, we designed 1 chip IC for 3-axis gyroscope and 3-axis accelerometer used for various IoT/M2M mobile devices such as smartphone, wearable device and etc. We especially focused on analysis of gyroscope noise and proposed new architecture for removing various noise generated by gyroscope MEMS and IC. Gyroscope, accelerometer and geo-magnetic sensors are usually used to detect user motion or to estimate moving distance, direction and relative position. It is very important element to designing a low noise IC because very small amount of noise may be accumulated and affect the estimated position or direction. We made a mathematical model of a gyroscope sensor, analyzed the frequency characteristics of MEMS and circuit, designed a low noise, compact and low power 1 chip 6-axis inertial sensor IC including 3-axis gyroscope and 3-axis accelerometer. As a result, designed IC has 0.01dps/${\sqrt{Hz}}$ of gyroscope sensor noise density.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.5
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• pp.914-923
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• 2002

Recently, there has been considerable interest in micro gyroscopes made of silicon chips. It can be applied to many micro-electro-mechanical systems (MEMS): devices for stabilization, general rate control, directional pointing, autopilot systems, and missile control. This paper shows how the mechanical design of the gyroscope can be done using axiomatic design, followed by the application of the Taguchi robust design method to determine the dimensions of the parts so as to accommodate the dimensional variations introduced during manufacturing. Functional requirements are defined twofold. One is that the natural frequencies should have fixed values, and the other is that the system should be robust to large tolerances. According to the Independence Axiom, design parameters are classified into a few groups. Then, the detailed design process is performed fellowing the sequence indicated by the design matrix. The dimensions of the structure are determined to have constant values fur the difference of frequencies without consideration of the tolerances. It is noted that the Taguchi concept is utilized as a unit process of the entire axiomatic approach.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.64.2-64
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• 2001

In this paper, fabricated is a motion capture and attitude detection system for Head Mounted Display HMD composed of three low-price and low-grade micro gyroscopes and a micro-controller, To calculate attitude of a body, modified INS algorithm is used. Because the micro gyroscope has much bias drift error, scale factor error, and run-to-run bias error, the motion of a body can not be measured exactly if the general INS algorithm and micro gyroscopes are used. To reduce the errors, three accelerometers can be used. In this case, however, the size and power consumption become too large to use in HMD system. The modified INS algorithm use the grid map and the characteristics of the human motions.

• Journal of the Korea Institute of Military Science and Technology
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• v.12 no.1
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• pp.106-113
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• 2009

This paper presents a surface acoustic wave(SAW) micro-electro-mechanical-systems(MEMS) interdigital transducer (IDT) gyroscope with 80MHz central frequency on a $128^{\circ}\;YX\;LiNbO_3$, which is consisted of a two-port SAW resonator, metallic dots and dual delay lines for the sensor and reference oscillators. Reason for using two delay line oscillators is to extract the gyroscope effect by comparing the resonant frequencies between two oscillators and to compensate the temperature effect. Based on the coupling of modes(COM) simulation, an 80MHz two ports SAW resonator and dual delay line were fabricated and characterized by the network analyzer. Obtained sensitivity was $109Hz/deg{\cdot}s^{-1}$ in the angular rate range of $0{\sim}1000deg/s$. Good Linearity and superior directivity were observed.

• Journal of Institute of Control, Robotics and Systems
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• v.22 no.9
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• pp.705-709
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• 2016

Micro-electro-mechanical systems (MEMS) gyroscopes are widely used in various robot applications. However, these conventional gyroscopes need to vibrate the proof mass using a built-in actuator at a fixed resonance frequency to sense the Coriolis force. When a robot is not moving, the meaningless vibration of the gyroscope wastes power. In addition, this continuous vibration makes the sensor vulnerable to external sound waves with a frequency close to the proof-mass resonance frequency. In this paper, a feasibility study of a new type of gyroscope inspired by insect halteres is presented. In dipterous insects, halteres are a biological gyroscope that measures the Coriolis force. Wing muscles and halteres are mechanically linked, and the halteres oscillate simultaneously with wing beats. The vibrating haltere experiences the Coriolis force if the insect is going through a rotational motion. Inspired by this haltere structure, a gyroscope using a thin mast integrated with a robot actuation mechanism is proposed. The mast vibrates only when the robot is moving without requiring a separate actuator. The Coriolis force of the mast can be measured with an accelerometer installed at the tip of the mast. However, the signal from the accelerometer has multiple frequency components and also can be highly corrupted with noise, such that raw data are not meaningful. This paper also presents a suitable signal processing technique using the amplitude modulation method. The feasibility of the proposed haltere-inspired gyroscope is also experimentally evaluated.

• Journal of KSNVE
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• v.10 no.5
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• pp.880-885
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• 2000

In a verical type, vibratory gyroscope, the coupled motion between the reference and sensing vibrations causes the zero-point output which means non-zero sensing vibration without angular velocity. This structural coupling leaks to an inherent discrepancy between the natural frequencies of the reference and sensing oscillations, causing the degradation of the sensing performance and dynamic stability. In this paper, the dynamic characteristics associated the coupling phenomenon are theoretically analyzed. Effects of reference frequency and coupling factor on the rotational direction and amplitude of elliptic oscillation are studied. A technique to predict the existence of curve veering of crossing in frequency trajectories is introduced to apply the design of micro gyroscopes with decoupled structures.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.47 no.6
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• pp.438-445
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• 2019

In this paper, we present a new approach to extract the g-sensitivity scale-factor error for a MEMS gyroscope. MEMS gyroscopes, based on the use of both angular momentum and the Coriolis effect, have a g-sensitivity error due to mass unbalance. Generally, the g-sensitivity error is not considered in general use of gyroscopes, but it deserves our attention if we are to develop for tactical class performance and reliability. The g-sensitivity error during vehicle flight increases navigation error; so it must be analyzed and compensated for the use of MEMS IMU for high dynamics vehicle systems. Therefore, we analyzed how to extract the g-sensitivity scale-factor error from the inertial sensor error model. Furthermore we propose a new method to extract the g-sensitivity error using flight motion simulator. We verified our proposed method with experimental results.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2018.11a
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• pp.328-330
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• 2018

A floating body with a device that converts solar energy into electrical energy is moved by waves. To evaluate the safety of a floating body, measurement and interpretation of the float motion is required, which is generally based on 6 degrees of freedom motion. The 6 degree of freedom motion can be measured using MEMS (Micro-Electro Mechanical System), which features low power, small size and low cost. The key issue is, meanwhile, the low precision of the MEMS. In this study, the safety evaluation technique by analyzing the behavior of floating body using MEMS was examined. As a result of the study, it was found that the marine floating body can be modeled through the inertial measurement platform using the 3-axis accelerometer and the 3-axis gyroscope, and the safety of the float can be evaluated through this model.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.9 no.5
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• pp.87-95
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• 2010

Lots of bridge structure generated the change of outward formation according to durability capability and decrepitude by long use. Especially, in case of the typhoon, snowing and earthquake is going to make rapidly more worse formation about the old structural facilitys. Also, outward formation by irregular and micro-distortion in bridge structure could not easily checked by normal diagnostics method. As a result, performance-capability of structure facility is getting to make a decline in standard of structure performance. Recently, real-time monitoring technology by wireless environment go into the study of irregular movement for structure facility. This paper presents the development of sensor to displacement checking about bridge structure. Sensing method of developed sensor put bring into the gyroscope technology using the acceleration speed and angular acceleration speed. This paper also will simulated to verified the monitoring capability of developed sensor against random vibration, frequency and distortion in simulated equipment.