• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.963-966
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• 2000

Abrasive jet machining(AJM) process is similar to the sand blasting, and effectively removes hard and brittle materials. AJM has applied to rough working such as deburring and rough finishing. As the needs for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro AJM was developed, and became the inevitable technique to micromachining. This paper describes the performance of the micro AJM in micro groove cutting of glass. Diameter of hole and width of line in this groove cutting is 80${\mu}{\textrm}{m}$. Experimental results showed good performance in micro groove cutting in glass, but the size of machined groove was increased about 2~4${\mu}{\textrm}{m}$. therefore, this micro AJM could be effectively applied to the micro machining of semiconductor, electronic devices and LCD parts.

• 한국기계가공학회지
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• 제9권4호
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• pp.1-7
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• 2010

Recently optical and electric and electronic forms in the field of ultra fine patterns has been used extensively, and techniques of the optical parts are required that can precision-machine this micro-patterns such as V or R-shaped micro-groove patterns. In this study, V and R type, shaping the way micro groove brass machining process to characterize the material feed rate and cutting depth and the V and R as a variable brother, using two kinds of diamond tools for each picture shape and surface roughness caused by conditions such as chips, processed through the analysis of effects of geometry and analysis such as precision machining.

• 대한기계학회논문집B
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• 제33권10호
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• pp.789-796
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• 2009

Microdroplet deposition in a micro-groove is studied numerically. The droplet shape is determined by a level-set method which is improved by incorporating a sharp-interface modeling technique for accurately enforcing the matching conditions at the liquid-gas interface and the no-slip and contact angle conditions at an immersed solid surface. The computations are carried out to investigate the droplet behavior derived by the interfacial characteristics between the liquid-gas-solid phases. The effects of contact angle, impact velocity and groove geometry on droplet deposition in a micro-groove are quantified.

• 소성∙가공
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• 제13권3호
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• pp.290-295
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• 2004

Mircolens and microlens V-groove are realized using a novel fabrication technology based on the exposure of a resist, usually PMMA, to deep X-rays and subsequent thermal treatment and inclined deep X-ray lithography, respectively. The fabrication technology is very simple and produces microlenses and microlens V-groove with good surface roughness of several nm. The molecular weight and glass transition temperature of PMMA is reduced when it is irradiated with deep X-rays. The microlenses were produced through the effects of volume change, surface tension, and reflow during thermal treatment of irradiated PMMA. Microlenses were produced with diameters ranging from 30 to $1500\mu\textrm{m}$. The surface X-ray mask is also fabricated to realize microlens arrays on PMMA sheet with a large area. The size of the micro V-groove is fabricated in the range of 12~$60\mu\textrm{m}$.

• 융복합기술연구소 논문집
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• 제2권2호
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• pp.25-29
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• 2012

Micro machining technologies have been required to satisfy various conditions in a high-technology industry. Micro electrochemical process is one of the most precision machining methods. Micro electrochemical process has been divided into electrochemical etching through protective layer and electrochemical machining using ultrashort voltage pulses. Micro shaft can be fabricated by electrochemical etching. The various protective layers such as photo-resist, oxide layer and oxidized recast layer have been used to protect metal surface during electrochemical etching. Micro patterning on metal surface can be machined by electrochemical etching through protective layer. Micro hole, groove and structures can be easily machined by electrochemical machining using ultrashort voltage pulses. Recently, the groove with subnanometer was machined using AFM.

• 한국생산제조학회지
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• 제18권6호
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• pp.636-641
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• 2009

Recently, expansion of micro-technology parts requires micro-precision machining technology. Micro-groove machining is important to fabricate micro-grating lens and many micro-parts such as microscope lens, fluidic graphite channel etc. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. But, mechanical micromachining methods using single crystal diamond tools can reduce these problems in chemical process. For this reason, microfabrication methods are expected to be very efficient, and widely studied. This study deals with machinability in micro-precision V-grooves machining of nickel plated layer using non-rotational single crystal diamond tool and 3-axis micro stages. Micro V-groove shape, chip formation and tool wear were investigated for the analysis of machinability of Ni plated layer.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.293-294
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• 2008

• 한국기계가공학회지
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• 제14권3호
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• pp.124-130
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• 2015

The purpose of this study is to investigate friction characteristics according to micro-dimple patterns. The surface texturing of micro-dimple patterns was tested to examine the friction of pin-on-disk using flat-on-flat contact geometry. The patterns of both dimple circle and groove pattern were adopted to carry out the effect of those ones. In the low loads, such as 13.8N and 27.7N, the friction coefficients of groove pattern were lower than those of dimple circle pattern. In many other comparisons of normal loads, the groove pattern had lower friction forces, which showed the effect of surface texturing. The relationship between sliding time and friction forces showed that the increase of friction forces of groove pattern were relatively lower than those of dimple pattern. In conclusion, the dimple patterns of dimple-circle pattern and groove pattern strongly contributed to reducing the friction between contacting materials.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 춘계학술대회 논문집
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• pp.75-79
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• 1995

A cutting experiment using diamond tool was performed to make the die cabity which is composed of micro groove with mirror surface. Fine cutting depth was generated by the elastic recovery of the modified tool holder on the conventional M/C. Surface roughness and profile were investigated with cutting speed and depth and through the low cutting speed of 10mm/min, Rmax 0.005 .mu. m or less of machined surface could be achieved.

• 한국기계가공학회지
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• 제5권4호
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• pp.21-26
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• 2006

Characteristics of texture and groove precision lapping plate are experimentally investigated by Measuring frictional forces. It is found that the frictional coefficient decreases as the embedding of diamond particles progresses. The groove precision lapping plate with concentric micro-channels indicates superior capability in embedding micrometer-sized diamond particles and uniformity in diamond embedding compared with the texture precision lapping plate with a series of circular micro-channels.