Comparison of Characteristics of Texture and Groove Precision Lapping Plate by Measuring Frictional Forces

마찰력 측정을 이용한 홈(Groove) 및 임의패턴 초정밀 연마판의 특성 비교

Characteristics of texture and groove precision lapping plate are experimentally investigated by Measuring frictional forces. It is found that the frictional coefficient decreases as the embedding of diamond particles progresses. The groove precision lapping plate with concentric micro-channels indicates superior capability in embedding micrometer-sized diamond particles and uniformity in diamond embedding compared with the texture precision lapping plate with a series of circular micro-channels.