• Proceedings of the KSME Conference
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• 2007.05a
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• pp.741-745
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• 2007

Supplying power to microsystems that have no physical connection to the outside is difficult, and using batteries is not always appropriate. This paper discusses how to generate electricity from mechanical energy when vibrated in a cantilever beam. A model for the system predicts that the output power of the system is maximized when the mechanical damping in the system is minimized. Furthermore, to cover a wide frequency range and to be useful in a number of applications, a system of beams with different resonant frequencies has been designed and optimized. This information makes it possible to determine what design alternatives are feasible for the creation of a micro power supply for any specific application of MEMS.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1455-1458
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• 2007

In this research, a polycrystalline silicon (poly-Si) film layer for micro thermoelectric generator (TEG) was fabricated. The fabrication process of the thermoelectric poly-Si film layer is explained. The P-type and N-type poly-Si films were fabricated on a tetra ethoxy silane (TEOS) layer with a supporting Si wafer. Seebeck coefficient and electrical conductivity were measured, including the transport properties such as the hall coefficient, hall mobility and carrier concentration. The design parameters for a rapid thermal process (RTP) were decided based on the experimental results. The measured power factors of the P-type and N-type were $21.2\;{\mu}Wm^{-1}K^{-2}$ and $26.7\;{\mu}Wm^{-1}K^{-2}$, respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.1129-1130
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• 2013

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1540-1545
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• 2004

Measurement of concentration fields in a micro-channel is the crucial technology in the area of Lab-on-a-chip to be used for various bio-chemical applications. It is wel-known that the only possible way to measure the concentration field in the micro-channel is using micro-LIF(Laser Induced Fluorescence) method. However, an accurate concentration field at a given cross plane in a micro-channel has not been made so far due to the limit of light illumination. The present study demonstrates a novel method to provide an ultra thin laser sheet beam having 5 microns thickness by a micro focus laser line generator. Nile Blue A was used as fluorescent dye for LIF measurement. The laser sheet beam illuminates an exact plane of concentration measurement in the micro-channel to increase the signal to noise ratio and reduce the depth uncertainty considerably.

• Journal of Institute of Control, Robotics and Systems
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• v.10 no.3
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• pp.286-293
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• 2004

This paper presents the result of a study on the starter control for a turbo generator. Because a starter in gear box type turbo-generator system is composed of gearbox and brush DC motor, it should be replaced with High Speed Generator(HSG)) in HSG type Turbo-generator. There-ore, it is necessary to design a new starting algorithm and starter. In gearbox type system, brush DC motor is rotated to the designed speed using low voltage-high current battery power. After brush DC motor speed is increased to several times by gearbox, gas turbine engine can be rotated to designed starting speed. If we implement a starter with High Speed Generator(HSG), it is necessary to drive high-speed generator to high-speed motor. High-speed generator with permanent magnet on rotor has a low leakage inductance fur driving high-speed rotation, and it is necessary high DC link voltage for inverter when High-speed generator is driven to high speed. This paper presents result of development of the boost converter for converting high voltage DC from low battery voltage and design of the inverter for controlling a high frequency current to be injected to motor winding. Also, we show performance of the designed starter by driving the turbo generator.

• Proceedings of the KIEE Conference
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• 1995.07a
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• pp.278-281
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• 1995

In this paper, a instantaneous speed measurement methode using a three phase sinusoidal taco-generator is described and it's simulations are developed. The proposed methode can easily detect the motor speed by using that the output voltage of taco-generator is propotion to the motor speed. Because the proposed methode consists of some calculation, the proposed system can be implemented with analog devices or micro processor conveniently. From the simulation resualts, the proposed measurement methode can acculately detect the real motor speed over wide range.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.64-67
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• 2009

Vibrational micro-forming of pyramidal shape patterns was conducted for an Al superplastic alloy, Al 5083 and a Zr-based bulk metallic glass, $Zr_{62}Cu_{17}Ni_{13}Al_8$. A vibrational micro-forming system was specially designed for generating vibrational load by combining a PZT actuator with a signal generator. Single crystal Si micro dies with wet-etched pyramidal patterns were used as master dies for vibrational micro-forming. The micro-formed pattern height was increasing with increasing the frequency of the vibrational load. In particular, the vibrationally-microformed pattern height was similar or even higher than the statically-microformed pattern height when the load frequency exceeded about 125 kHz. It was also observed that the crystal grains affect the surface quality of the microformed pattern and the distribution of the pattern height in the die cavity array.

• Journal of the Microelectronics and Packaging Society
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• v.13 no.3 s.40
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• pp.9-12
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• 2006

We have designed and fabricated micro power generators by electroplating which is important in MEMS(micro electro mechanical system) technique. We have electroplated MEMS coils on the glass substrates and have chosen one of these coils for experiments. The thickness, width, and length of the coil are $7{\mu}m,\;20{\mu}m$, and 1.6 m, respectively. We have analyzed the structure of MEMS coil by SEM. We have made a vibrating system for reproducible results in measurement. With reciprocating a magnet on the surface of a fabricated winding coil, the micro power generator produce an alternating voltage. We have changed the vibrational frequency from 0.5 Hz to 8 Hz. The generated voltage was 106 mV at 3 Hz and 198 mV at 6 Hz. We aim at the micro power generator which can change vibration energy to useful electric energy.

• The KSFM Journal of Fluid Machinery
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• v.18 no.5
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• pp.42-48
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• 2015

To improve the core technology of the micro gas turbine, the performance test facility was developed. This paper is focusing on the explanation of the characteristics of micro gas turbine and its assist devices. Major part of micro gas turbine were radial type of compressor, annular type of combustor, radial type of turbine, thrust foil bearing, radial foil bearing and generator. The assist devices were consist of exhaust duct, inverter, data acquisition system, load bank and test cell. Before building up the test facility, the component test was previously conducted to confirm the component performance. After the test facility was prepared, the motoring test was conducted to investigate the rotor dynamic characteristics of the micro gas turbine. Also, the part load performance test was performed. With a developed micro gas turbine test facility, the improved core technology about the micro gas turbine can be suggested to the related industries.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.40 no.6
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• pp.87-94
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• 2003

This paper presents results of the development of the turbo generator system with structure which is HSG(High Speed Generator) installed directly to gas-turbine engine. Turbo generator with a high speed motor-generator directly has many advantages aspects of weight, size, lubrication system and complexity of the system compared of conventional turbo generator system with a gear box. But because of direct high speed operation of the high speed generator, we have to need stable high speed motor driving algorithm for perfect engine ignition when engine start. Also we have to need the design of the Power conditioning unit(PCU) for converting high speed AC output power to conventional AC power or needed DC power.