• 제목/요약/키워드: Micro element

검색결과 819건 처리시간 0.029초

ADHESION PHENOMENON AND ITS APPLICATION TO MANIPULATION FOR MICRO-ASSEBMLY

  • Takahashi, Kunio;Himeno, Hideo;Saito, Shigeki;Onzawa, Tadao
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
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    • pp.781-784
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    • 2002
  • Adhesion phenomenon is more significant for smaller objects, because adhesional force is proportional to size of the objects while gravitational force is proportional to the third power of it. For the purpose of microassembly, theoretical understanding is required for the Adhesion phenomenon. Authors have developed a force measurement system in an ultra-high vacuum chamber of Auger electron spectroscopy. The force between arbitrary combination of materials can be measured at a pressure less than 100 nPa after and before Ar ion sputtering and chemical analysis for several atomic layers of the surface. The results are successfully interpreted with a theory of contact mechanics. Since surface energy is quite important in the interpretation, electronic theory is used to evaluate the surface energy. In the manipulation of small objects, the adhesional force is always attractive. Repulsive force is essential for the manipulation. It can be generated by Coulomb interaction. The voltage required for detachment is theoretically analyzed and the effect of boundary conditions on the detachment is obtained. The possibility and limitations of micro-manipulation using both the adhesion phenomenon and Coulomb interaction are theoretically clarified. Its applicability to nano-technology is found to be expected.

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다결정 3C-SiC 마이크로 공진기의 온도특성 (Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators)

  • 정귀상;이태원
    • 한국전기전자재료학회논문지
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    • 제22권4호
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    • pp.314-317
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    • 2009
  • This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The $1.2{\mu}m$ and $0.4{\mu}m$ thick polycrystalline 3C-SiC cantilever and doubly clamped beam resonators with $60{\sim}100{\mu}m$ lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at temperature range of $25{\sim}200^{\circ}C$. The TCF(Temperature Coefficient of Frequency) of 60, 80 and 100 On long cantilever resonators were -9.79, -7.72 and -8.0 ppm/$^{\circ}C$. On the other hand, TCF of 60, 80 and $100{\mu}m$ long doubly clamped beam resonators were -15.74, -12.55 and -8.35 ppm/$^{\circ}C$. Therefore, polycrystalline 3C-SiC resonators are suitable with RF MEMS devices and bio/chemical sensor applications in harsh environments.

바이오응용을 위한 압전 공진형 MEMS 소자

  • 김용범;김형준;강지윤;김태송
    • 한국가시화정보학회:학술대회논문집
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    • 한국가시화정보학회 2002년도 마이크로/바이오 가시화기술부문 학술강연회
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    • pp.1-7
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    • 2002
  • This papers describes the preparation and experimental results of a micro mass detection devices based on cantilever and a diffuser-type micro pump using screen printing thick-film technologies and Si micro-machining. PZT-PCW thick films were prepared by new hybrid method based on the screen printing. By applying these PZT-PCW piezoelectric thick films on actuator, a cantilever for mass detection sensor and a micropump for microfluidic element are successfully fabricated. Resonant frequency and displacement of PZT-PCW thick film actuator in air and in liquid are measured by laser vibrometer system as a function of actuator size. The resonant frequency of PZT-PCW thick film actuator in liquid decreases order of 1/2-1/4 due to damping effect. The sensitivity of cantilever is characterized by Au deposition method which has the mass loading effect such as adsorption of protein. The Sensitivity of PZT-0.12PCW thick film cantilever is proportional to detecting area.

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건물 성능디자인을 위한 미기후 기반 기상데이터의 기존 기상데이터와 비교를 통한 활용 가능성 연구 (A study on Applicability through Comparison of Weather Data based on Micro-climate with existing Weather Data for Building Performative Design)

  • 김언용;전한종
    • KIEAE Journal
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    • 제11권6호
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    • pp.101-108
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    • 2011
  • The weather data has important role for performative building design. If the data location is close to building site, the result of performative design can be accurate. The data which have used nowadays in Korea are from U.S. Department of Energy (DOE) and Korea Solar Energy Society (KSES) but they cover only several locations in Korea which are 4 in DOE and 11 in KSES and there are opinions which it could be served building design efficiently even if the data are not enough. However the weather data for micro-climate are exist which are Green Building Studio Virtual Weather Station (GBS VWS) and Meteonorm weather data. Each weather data has different generation methods which are TMY2, TRY, MM5, and extrapolation. In this research, the weather date for climate are compared with DOE and KSES to check correlation. The result shows the value of correlation in Dry Bulb Temp. and Dew Point Temp. is around 0.9 so they have high correlation in both but in Wind Speed case the correlation(around 0.2) is not exist. In overall result, the data has correlation with DOE and KSES as the value of correlation 0.648 of GBS VW and 0.656 of Meteonorm. Even if the correlation value is not high enough, the patterns of difference in each weather element are similar in scatter plot.

다구찌 기법을 이용한 모바일폰의 음향특성 향상 설계 (Application of Taguchi Method to Robust Design of Acoustic Performance in Mobile Phones)

  • 황건용;황상문;권중학;김광석;이홍주
    • 한국소음진동공학회논문집
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    • 제16권10호
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    • pp.997-1004
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    • 2006
  • With the growth in electronics and the remarkable advance in wireless communication technology, mobile devices, such as mobile phones and PDAs are incessantly improved in their diverse functional performance. Lighter weight and smaller size has been gradually accomplished by recent circuit integration technology resulting in rapid growth in the number of mobile phone subscribers. Driven by customer demand, recent mobile devices are fully capable of realizing a variety of dazzling multimedia effects powered by electro-acoustic parts that have become one of the generic components. However, This paper also presents an oval micro-speaker, that is' expected to show an excellent performance within limited space of mobile phone, and its performance design has been suggested as well. Finally, a statistical approach to achieve high characteristic and performance is suggested by Taguchi method to identify a certain relationship between a mobile phone and a micro-speaker.

단실형 마이크로 고체 산화물 연료전지의 작동특성 전산모사 (Performance Modeling of Single-Chamber Micro SOFC)

  • 차정화;정찬엽;정용재;김주선;이종호;이해원
    • 한국세라믹학회지
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    • 제42권12호
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    • pp.854-859
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    • 2005
  • Performance of micro scale intermediate temperature solid oxide fuel cell system has been successfully evaluated by computer simulation based on macro modeling. Two systems were studied in this work. The one is designed that the ceria-based electrolyte placed between composite electrodes and the other is designed that electrodes alternately placed on the electrolyte. The injected gas was composed of hydrogen and air. The polarization curve was obtained through a series of calculations for ohmic loss, activation loss and concentration loss. The calculation of each loss was based on the solving of mathematical model of multi physical-phenomena such as ion conduction, fluid dynamics and diffusion and convection by Finite Element Method (FEM). The performance characteristics of SOFC were quantitatively investigated for various structural parameters such as distance between electrodes and thickness of electrolyte.

SOI CMOS-Based Smart Gas Sensor System for Ubiquitous Sensor Networks

  • Maeng, Sung-Lyul;Guha, Prasanta;Udrea, Florin;Ali, Syed Z.;Santra, Sumita;Gardner, Julian;Park, Jong-Hyurk;Kim, Sang-Hyeob;Moon, Seung-Eon;Park, Kang-Ho;Kim, Jong-Dae;Choi, Young-Jin;Milne, William I.
    • ETRI Journal
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    • 제30권4호
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    • pp.516-525
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    • 2008
  • This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon-on-insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor. The sensor was operated at $200^{\circ}C$ and showed a good response to 100 ppb $NO_2$ gas.

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UPCU의 안정성 검토 및 초정밀 위치결정 (Stability Analysis and Ultra-Precision Positioning for UPCU)

  • 김우진;김재열;윤성운;장종훈;김유홍;최철준
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2005년도 춘계학술대회 논문집
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    • pp.48-53
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    • 2005
  • The world, coming into the 21st century, is preparing a new revolution called a knowledge-based society after the industrial society. The interest of the world is concentrated on information technology, nano-technology and biotechnology. In particular, the nano-technology of which study was originally started from an alternative for overcoming semiconductor micro-technology. It can be applied to most industry subject such as electronics, information and communication, machinery, chemistry, bioengineering, energy, etc. They are emerging into the technology that can change civilization of human beings. Specially, ultra precision machining is quickly applied to nano-technology in the field of machinery. Lately, with rapid development of electronics industry and optic industry, there are needs for super precision finishing of various core parts required in such related apparatuses. This paper handles stability of a super precision micro cutting machine that is a core unit of such a super precision finisher, and analyzes the results depending on the hinge type and material change, using FEM analysis. By reviewing the stability, it is possible to achieve the effect of basic data collection for unit control and to reduce trials and errors in unit design and manufacturing.

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CO 가스측정을 위한 마이크로 캔틸레버 센서의 최적화 설계 (Optimum Design of Micro-Cantilever Sensor for measuring CO gas)

  • 손희주;나대석;백경갑;박배호;권광호;남산;주병권
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.412-413
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    • 2005
  • This paper describes resonant frequency of the structural behavior of micro-cantilever beam simulated by FEM (Finite Element Method). The resonant characteristics and the sensitivity of cantilever-shaped SOI resonant were measured for the application of chemical sensor. The resonant frequency of the fabricated micro-cantilever system was found to be 5.59kHz when the size of cantilever is $500{\mu}m$ long, $100{\mu}m$ wide and $1{\mu}m$ thick. Generation of resonant frequency measured by Modal Analysis is resulted in length of cantilever. The length was found to be a dominant factor for the selection of required resonant frequency range. On the other side, the width had influenced very little on either the magnitude of resonant frequency or the sensitivity.

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Taguchi Method를 이용한 모바일 폰용 마이크로스피커의 음향 특성 향상 설계 (Application of Taguchi Method to Robust Design of Acoustic Performance in Mobile Phones)

  • 이홍주;황건용;황상문;권중학;김태순
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2005년도 추계학술대회논문집
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    • pp.493-496
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    • 2005
  • With the growth in electronics and the remarkable advance in wireless communication technology, mobile devices, such as mobile phones and PDAs are incessantly improved in their diverse functional performance. Lighter weight and smaller size has been gradually accomplished by recent circuit integration technology resulting in rapid growth in the number of mobile phone subscribers. Driven by customer demand, recent mobile devices are fully capable of realizing a variety of dazzling multimedia effects powered by electro-acoustic parts that have become one of the generic components. However, this paper also presents an oval micro-speaker, that is expected to show an excellent performance within limited space of mobile phone, and its performance design has been suggested as well. Finally, a statistical approach to achieve high characteristic and performance is suggested by Taguchi method to identify a certain relationship between a mobile phone and a micro-speaker.

  • PDF