• 제목/요약/키워드: Micro deposition

검색결과 465건 처리시간 0.034초

Enhanced Photocurrent from CdS Sensitized ZnO Nanorods

  • Nayak, Jhasaketan;Son, Min-Kyu;Kim, Jin-Kyoung;Kim, Soo-Kyoung;Lee, Jeong-Hoon;Kim, Hee-Je
    • Journal of Electrical Engineering and Technology
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    • 제7권6호
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    • pp.965-970
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    • 2012
  • Structure and optical properties of cadmium sulphide-zinc oxide composite nanorods have been evaluated by suitable characterization techniques. The X-ray diffraction spectrum contains a series of peaks corresponding to reflections from various sets of lattice planes of hexagonal ZnO as well as CdS. The above observation is supported by the Micro-Raman spectroscopy result. The optical reflectance spectra of CdS-ZnO is compared with that of ZnO where we observe an enhanced absorption and hence diminished reflection from CdS-ZnO compared to that from only ZnO. A very small intensity of the visible photoluminescence peak observed at 550 nm proves that the ZnO nanorods have very low concentrations of point defects such as oxygen vacancies and zinc interstitials. The photocurrent in the visible region has been significantly enhanced due to deposition of CdS on the surface of the ZnO nanorods. CdS acts as a visible sensitizer because of its lower band gap compared to ZnO.

폴리카보네이트에서의 표면개질 조건과 DC-Bias Sputtering 증착에 따른 Cu 밀착성 (Adhesion of Cu on Polycarbonate with the Condition of Surface Modification and DC-Bias Sputtering Deposition)

  • 배길상;엄준선;이인선;김상호;고영배;김동원
    • 한국표면공학회지
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    • 제37권1호
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    • pp.5-12
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    • 2004
  • The enhancement of adhesion for Cu film on polycarbonate (PC) surface with the $Ar/O_2$ gas plasma treatment and dc-bias sputtering was studied. The plasma treatment with this reactive mixture changes the chemical property of PC surface into hydrophllic one, which is shown by the variation of contact angle with surface modification. The micro surface roughness that also gives the high adhesive environment is increased by the $Ar/O_2$ gas plasma treatment. These results were observed distinctly from the atomic force microscopy (AFM). The negative substrate dc-bias effect for the Cu adhesion on PC was also investifated. Accelerated $Ar^{+}$ lons in sheath area of anode bombard the bare surface of PC during initial stage of dc bias sputtering. PC substrate. therefore, has severe roughen and hydrophilic surface due to the physical etching process with more activated functional group. As dc-bias sputtering process proceeds, morphology of Cu film shows better step coverage and dense layer. The results of peel test show the evidence of superiority of bias sputtering for the adhesion between metal Cu and PC.C.

FBAR 소자의 압전층으로 사용되는 ZnO 박막의 증착시 ALD틀 이용한 2-step 법 적용에 관한 연구 (ZnO thin films used in the piezoelectric layer of FBAR devices were deposited by 2-step methods using ALD equipment)

  • 이순범;박성현;이능헌;신영화
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1651-1652
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    • 2006
  • In this study, the 2-step methode by ALD equipment was used to improve the characteristics of ZnO thin films used in a piezoelectric layer when the FBAR devices of a SMR type are fabricated. The Height of formed buffer layer was $400{\AA}$ and ZnO thin film of $13600{\AA}$ was deposited by RF sputter on the buffer layer. When ZnO thin films are deposited, deposition conditions such as pressure, injection time of source and purge time were changed variously. The characteristics of piezoelectric layer such as a crystal orientation and micro-structure of deposited ZnO thin films were studied by SEM, AFM and XRD.

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Al합금과 Ti합금의 방탄특성에 관한 실험적 연구 (An Experimental Study on the Characters of Bullet Proof for Al and Ti Alloy)

  • 손세원
    • 한국자동차공학회논문집
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    • 제13권4호
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    • pp.113-120
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    • 2005
  • In order to investigate the characteristics of penatration and the effect of surface treatment in A15052-H34, Al5082-Hl31 and titanium alloy laminates which were treated by anodizing and PVD(Physical Vapor Desposition) method, ballistic tests were conducted. Thickness of surface membrane in A15052-H34, Al5082-Hl31, were $25{\mu}m$ and that of titanium $0.9{\mu}m$ respectively. Surface hardness test was conducted using micro Vicker's hardness tester. Resistance to penetration is determined by the protection ballistic limit(V50), a statistical velocity with $50\%$ probability for complete penetration. Fracture behaviors and ballistic tolerance, described by penetration modes, are observed from the results of V50 test and Projectile Through Plate(PTP) test at velocities greater than protection ballistic limit, respectively. Present experimental results derived from this research help to optimize laminate impact behavior by varing the laminate thickness and surface treated materials.

원뿔형 CNT-W 팁의 TiN 완충막 유무에 따른 전계방출 특성 (Effects of TiN bufer on field emission properties of conical-type tungsten tips with carbon nanotubes coated)

  • 김영광;윤성준;김원;김종필;박창균;박진석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 제38회 하계학술대회
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    • pp.1271-1272
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    • 2007
  • Experimental results regarding to the structural properties of carbon nanotubes (CNTs) and the field-emission characteristics of CNT-coated tungsten (W) tips are presented. CNTs are successfully grown on conical-type W-tips by inductively coupled plasma-chemical vapor deposition (ICP-CVD) with or without inserting a TiN-buffer layer prior to the formation of Ni catalysts. For all the CNTs grown, their nanostructures, morphologies, and crystalline structures are analyzed by FESEM, HRTEM, and Raman spectroscopy. Furthermore, the emission properties of CNT-based field-emitters are characterized to estimate the maximum current density and the threshold voltage. The results obtained in this study indicate that the emission current level of the CNT-emitter without using a TiN buffer is desirable for the application of micro-focused x-ray systems.

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Effect of Transparency of CNT counter electrodes on the Efficiency of DSSCs

  • Lee, Won-Jae;Ramasamy, Easwaramoorthi;Lee, Dong-Yun;Song, Jae-Sung
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.615-616
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    • 2005
  • Carbon Nanotubes (CNT) on flexible indium tin oxide (ITO) PET films were prepared for dye-sensitized solar cell (DSSC). These CNTs were prepared by spray coating method for various amount of light transparency. Also, Pt counter electrode was prepared by electro deposition method. All $TiO_2$ electrodes were deposited on ITO-PET films by spray coating method. Micro structural images show that CNT counter electrodes prepared by spray-coating have more dense structure with increasing spraying time (0 to 60 seconds). DSSC consisting of $TiO_2$ electrode and CNT counter electrode was fabricated with various amount of light absorption. DSSC have higher light energy conversion efficiency with increasing the thickness of CNT counter electrode. CNT counter electrode is at least compatible to that of CNT counter electrode.

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PECVD 증착조건 변화에 따른 a-C;H 박막의 구조 변화

  • 조영옥;노옥환;윤원주;이정근;최영철;이영희;최용각;유수창
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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    • pp.93-93
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    • 2000
  • 수소화된 비정질 탄소(a-C:H)는 그 증착 조건에 따라서 여러 가지 다른 구조와 특성을 갖게 되며, 특히 DLC(diamond-like carbon) 및 CNT(Carbon nanotube)는 FED (field emission display) 개발 면에서 중요하게 연구되고 있다. 우리는 a-C:H 박막을 PECVD (plasma-enhanced chemical vapor deposition) 방법으로 증착하고 CH4 가스를 사용하였고 기판 온도는 상온-32$0^{\circ}C$ 사이에서 변화되었다. 기판은 Corning 1737 glass, quartz, Si, Ni 등을 사용하였다. 증착 압력과 R.F. power는 각각 0.1-1 Torr 와 12-60w 사이에서 변화되었다. ESR 측정은 X-band(주파수 약 9 GHz)에서 그리고 상온에서 행해졌다. 상온에서의 스핀밀도는 약한-표준피치(weak-pitch standard) 스펙트럼과 비교하여 얻을 수 있었다. 그리고 a-C:H 박막의 구조는 He-Ne laser(파장 632.8 nm)를 이용하는 micro-Raman spectroscopy로 분석하였다. 증착조건에 따른 스핀밀도의 변화 및 Raman 스펙트럼에서의 D-peak, G-peak의 위치 및 반치록, I(D)/I(G) 등을 조사하였다. 증착된 a-C:H 박막은 R.F.power가 증가할수록 대체로 스핀밀도가 증가하였으며, Raman 스펙트럼에서의 I(D)/I(G) 비율은 대체로 감소하였다. 증착된 박막들은 polymer-like Carbon으로 추정되었으며, 스핀밀도가 증가할수록 대체적으로 흑연 구조 영역이 증가됨을 알 수 있었다. 또한 glass나 Si 기판에 비해 Ni 기판위에서 polymer-like Carbon 구조는 향상되는 경향을 보였다.

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구리와 은 박막의 열팽창계수에 미치는 결정립 크기와 박막 두께의 영향 (The Effect of Grain Size and Film Thickness on the Thermal Expansion Coefficient of Copper and Silver Thin Films)

  • 황슬기;김영만
    • 대한금속재료학회지
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    • 제48권12호
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    • pp.1064-1069
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    • 2010
  • Thin films have been used in a large variety of technological applications such as solar cells, optical memories, photolithographic masks, protective coatings, and electronic contacts. If thin films experience frequent temperature changes, thermal stresses are generated due to the difference in the coefficient of thermal expansion between the film and substrate. Thermal stresses may lead to damage or deformation in thin film used in electronic devices and micro-machined structures. Thus, knowledge of the thermomechanical properties of thin films, such as the coefficient of thermal expansion, is an important issue in determining the stability and reliability of the thin film devices. In this study, thermal cycling of Cu and Ag thin films with various microstructures was employed to assess the coefficient of thermal expansion of the films. The result revealed that the coefficient of thermal expansion (CTE) of the Cu and Ag thin films increased with an increasing grain size. However, the effect of film thickness on the CTE did not show a remarkable difference.

철원군 승일교 인근의 화강암 지형 경관 (Granite Landforms in the Vicinity of Seungil-gyo Bridge at Cheorwon, Central Korea)

  • 이민부;한주엽;김창환
    • 한국지형학회지
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    • 제19권4호
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    • pp.27-37
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    • 2012
  • 본 연구는 강원도 철원군 명성산 화강암과 현무암 용암대지 사이의 접촉대인 한탄강 승일교 인근 지역의 독특한 경관을 형성하고 있는 화강암 하천 침식 및 퇴적 지형과 풍화 지형 분석을 다루고 있다. 주요 화강암 지형으로서는 심층풍화된 구릉, 면상침식지형, 고지형면 및 고토양, 하천작용과 관련된 미지형으로 돌개구멍과 그루브, 램 파트형의 암괴, 사주와 사력퇴, 그리고 구하상 등이 있다. 그리고 풍화가 덜 진전된 구릉의 일부로 하천의 측방이동을 방해하는 화강암 하식애 지형이 있다.

포토 리소그래피 공정을 위한 Ti(10 nm)-Buffered층 위에 직접 성장된 고품질 무전사 단층 그래핀 공정 (High Quality Non-Transfer Single-Layer Graphene Process Grown Directly on Ti(10 nm)-Buffered Layer for Photo Lithography Process)

  • 오거룡;한이레;엄지호;윤순길
    • 한국전기전자재료학회논문지
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    • 제34권1호
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    • pp.21-26
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    • 2021
  • Single-layer graphene is grown directly on Ti-buffered SiO2 at 100℃. As a result of the AFM measurement of the Ti buffer layer, the roughness of approximately 0.2 nm has been improved. Moreover, the Raman measurement of graphene grown on it shows that the D/G intensity ratio is extremely small, approximately 0.01, and there are no defects. In addition, the 2D/G intensity ratio had a value of approximately 2.1 for single-layer graphene. The sheet resistance is also 89 Ω/□, demonstrating excellent characteristics. The problem was solved by using graphene and a lift-off patterning method. Low-temperature direct-grown graphene does not deteriorate after the patterning process and can be used for device and micro-patterning research.