• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2004.03a
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• pp.611-616
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• 2004

In this study, microfabrication of a micro-arcjet nozzle with Fifth-harmonic generation Nd：YAG pulses (wavelength 213 nm) and its thrust performance tests were conducted. A micro-arcjet nozzle was machined in a 1.2 mm thick quartz plate. Sizes of the nozzle were 0.44 mm in width of the nozzle exit and constrictor diameter of 0.1 mm. For an anode, a thin film of Au (~100 nm thick) was deposited by DC discharge PVD in vacuum on divergent part of the nozzle. As for a cathode, an Au film was also coated on inner wall surface. In operational tests, a stable discharge was observed for mass flow of 1.0mg/sec, discharge current of 6 ㎃, discharge voltage of 600 V, or 3.6 W input power (specific power of 3.6 MW/kg). In this case, plenum pressure of the discharge chamber was 80 ㎪. With 3.6 W input power, thrust obtained was 1.4 mN giving specific impulse of 138 sec with thrust efficiency of 24 %.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.62-71
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• 1999

Integrating micro-machined sensors and actuators on the conventional devices with the copper power lines was incompatible to fabricate the mass produced micro electromechanical system (MEMS) devices. To achieve the compatibility of the wiring method between MEMS parts and devices, we developed the three-dimensional sputter-evaporation system that coats micropatterned thin copper films on the surface of the MEMS element. The system consists of a process chamber, two branch chambers, the substrate holder, and a linear-rotary motion feedthrough. Thin copper film was sputtered and evaporated on the biocompatible polymer, Pellethane$^{circed{R}}$ and silicone, catheter that is 2 mm in diameter and 700 mm in length. The metal film coating technique with three-dimensional thin film sputter-evaporation system was developed to apply the power and signal lines on the micro active endoscope. In this paper, we developed the three-dimensional metal film sputter-evaporation system operated on the low temperature for the biopolymeric substrates used in the medical MEMS devices.

• The Journal of the Acoustical Society of Korea
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• v.26 no.3
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• pp.115-122
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• 2007

In this study, the property and the structure of micro-speaker had been firstly shown to be treated as a ducted speaker-system, which was consisted of the unit and the ducted enclosure. With the decrease of total hole area. the resonance frequency of micro-speaker was decreased due to increasing the stiffness or reducing the compliance. The behavior of resonance frequency relative to the total hole area was exactly agreed with that of the square root of compliance. With decreasing the total hole area. the effective chamber volume was increased, but the reference sound pressure level was exponentially reduced in the low and middle frequency range.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.1
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• pp.125-133
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• 2010

A versatile micro-robotic platform for micro/nano scale assembly has been demanded in a variety of application areas such as micro-biology and nanotechnology. In the near future, a flexible and compact platform could be effectively used in a scanning electron microscope chamber. We are developing a platform that consists of miniature mobile robots and a compact positioning stage with multi degree-of-freedom. This paper presents the design and the implementation of a low-cost and compact multi degree of freedom position sensor that is capable of measuring absolute translational and rotational displacement. The proposed sensor is implemented by using a CMOS type image sensor and a target with specific hole patterns. Experimental design based on statistics was applied to finding optimal design of the target. Efficient algorithms for image processing and absolute position decoding are discussed. Simple calibration to eliminate the influence of inaccuracy of the fabricated target on the measuring performance also presented. The developed sensor was characterized by using a laser interferometer. It can be concluded that the sensor system has submicron resolution and accuracy of ${\pm}4{\mu}m$ over full travel range. The proposed vision-based sensor is cost-effective and used as a compact feedback device for implementation of a micro robotic platform.

• Journal of Biomedical Engineering Research
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• v.31 no.3
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• pp.234-239
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• 2010

We have developed and reported several micro-spikes for minimally invasive biopsy. This paper presents a diagnosis protocol for micro-spike biopsy using paraffin-based tissue collecting tool. Using the proposed tissue collecting tool, which has a negative micro-spike structure in a porous chamber, the biopsied tissue in a micro-spike is effectively detached. The proposed diagnosis protocol prevents the loss of tissues in a paraffin embedding and sectioning process. Hence, it is compatible with conventional histopathology without additional reagents and processes. The gastro-intestinal tissue of a pig is biopsied in an in vivo environment, and then it is detached from a micro-spike using the paraffin-based tissue collecting tool. A histopathological photomicrograph of the detached tissue is acquired with the proposed diagnosis protocol. The acquired image offers clinical quality. This result shows that the paraffin-based tissue collecting tool is applicable to the medical practice.

• Journal of the Korean Society of Visualization
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• v.8 no.3
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• pp.29-34
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• 2010

This paper proposes a design method to provide uniform flow in a microreactor. Uniform momentum approach is adopted with 10 pillars before and after the chamber having a different slope inlet channel. The slope and number of pillars are two factors to make a uniform flow in the microreactor, covering the hexagonal gold layer. The CFD analysis about the designed microreactor is carried out and the velocity vector field measurements are made in the fabricated microreactor by micro PIV technique. The uniformity of microreactor flow was confirmed by both numerical simulation and experimental results.

• Proceedings of the KIEE Conference
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• 1993.11a
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• pp.201-203
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• 1993

Recently, micro-scaled cell fusion system in the bioiogical cell fusion is preferred to Nacro-scaled one by dint of microelectronic processes. The microfabricated cell fusion system has its components such as fusion chamber, selector and detector. In this paper, we describe the design rules of the micro-fabricated cell fusion system using dielectrophoretic force and analyze its components using finite element method.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.7 s.238
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• pp.970-975
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• 2005

This paper presents a novel microgenerator of $CO_2$ (carbon dioxide) gas. $NaHCO_3$ (sodium bicarbonate) in a chamber is decomposed by the underlaid microheater. Alternatively, water droplet is caged by paraffin layer and released by heating. The released water dissolve HOC(COOH)$(CH_2COOH)_2$ (citric acid) powder and then, $NaHCO_3$ reacts with the solubilized HOC(COOH)$(CH_2COOH)_2$ and $CO_2$ is produced. Micropumps actuated by $CO_2$ generation were fabricated. A portable micro cell incubator of which pH is controlled by the produced $CO_2$ is also presented as one of the further applications.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.3
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• pp.237-242
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• 2009

MEMS catalytic combustors were fabricated to use in micro-power sources as a heat source. The combustor was fabricated by photolithography and anisotropic wet etching of photosensitive glass wafers. Two different catalyst loading methods were used to complete the fabrication of the combustors. For thin film type, the $Al_2O_3$ was washcoated on the surface of the combustion chamber as a catalyst support, and for packed-bed type, ceramic foam was inserted after Pt was coated. The volume of the combustors was 1.8 $cm^3$ and 16W of heat was generated using the fabricated combustors with hydrogen. The energy density of combustor was about 8.9 W/$cm^3$.

• Journal of the Korean Ceramic Society
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• v.43 no.11 s.294
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• pp.746-750
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• 2006

NiO films and Ru co-sputtered NiO films were deposited by reactive magnetron sputtering for micro-solid oxide fuel cell anode applications. The deposited films were reduced to form porous films. The reduction kinetics of the Ru doped NiO film was more sluggish than that of the NiO film, and the resulting microstructure of the former exhibited finer pore networks. The possibility of using the films for the anodes of single chamber micro-SOFCs was investigated using an air/fuel mixed environment. It was found that the abrupt increase in the resistance is suppressed in the Ru co-sputtered film, as compared to undoped film.