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http://dx.doi.org/10.3795/KSME-A.2009.33.3.237

Fabrication and Performance Test of MEMS Catalytic Combustors Using Photosensitive Glass Wafer  

Jin, Jung-Kun (KAIST 대학원 항공우주공학)
Kwon, Se-Jin (KAIST 대학원 항공우주공학)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.33, no.3, 2009 , pp. 237-242 More about this Journal
Abstract
MEMS catalytic combustors were fabricated to use in micro-power sources as a heat source. The combustor was fabricated by photolithography and anisotropic wet etching of photosensitive glass wafers. Two different catalyst loading methods were used to complete the fabrication of the combustors. For thin film type, the $Al_2O_3$ was washcoated on the surface of the combustion chamber as a catalyst support, and for packed-bed type, ceramic foam was inserted after Pt was coated. The volume of the combustors was 1.8 $cm^3$ and 16W of heat was generated using the fabricated combustors with hydrogen. The energy density of combustor was about 8.9 W/$cm^3$.
Keywords
Micro-Catalytic Combustor; Photosensitive Glass; $Al_2O_3$ Washcoating; Ceramic Foam; Sol-Gel;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
Times Cited By SCOPUS : 1
연도 인용수 순위
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