• Title/Summary/Keyword: Micro bumps

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Detection of Flip-chip Bonding Error Through Edge Size Extraction of X-ray Image (X선 영상의 에지 추출을 통한 플립칩 솔더범프의 접합 형상 오차 검출)

  • Song, Chun-Sam;Cho, Sung-Man;Kim, Joon-Hyun;Kim, Joo-Hyun;Kim, Min-young;Kim, Jong-Hyeong
    • Journal of Institute of Control, Robotics and Systems
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    • v.15 no.9
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    • pp.916-921
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    • 2009
  • The technology to inspect and measure an inner structure of micro parts has become an important tool in the semi-conductor industrial field with the development of automation and precision manufacturing. Especially, the inspection skill on the inside of highly integrated electronic device becomes a key role in detecting defects of a completely assembled product. X-ray inspection technology has been focused as a main method to inspect the inside structure. However, there has been insufficient research done on the customized inspection technology for the flip-chip assembly due to the interior connecting part of flip chip which connects the die and PCB electrically through balls positioned on the die. In this study, therefore, it is implemented to detect shape error of flip chip bonding without damaging chips using an x-ray inspection system. At this time, it is able to monitor the solder bump shape by introducing an edge-extracting algorithm (exponential approximation function) according to the attenuating characteristic and detect shape error compared with CAD data. Additionally, the bonding error of solder bumps is automatically detectable by acquiring numerical size information at the extracted solder bump edges.

SiGe Surface Changes During Dry Cleaning with NF3 / H2O Plasma (NF3 / H2O 원거리 플라즈마 건식 세정에 의한 SiGe 표면 특성 변화)

  • Park, Seran;Oh, Hoon-Jung;Kim, Kyu-Dong;Ko, Dae-Hong
    • Journal of the Semiconductor & Display Technology
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    • v.19 no.2
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    • pp.45-50
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    • 2020
  • We investigated the Si1-xGex surface properties when dry cleaning the films using NF3 / H2O remote plasma. After the dry cleaning process, it was found that about 80-250 nm wide bumps were formed on the SiGe surface regardless of Ge concentration in the rage of x = 0.1 ~ 0.3. In addition, effects of the dry cleaning processing parameters such as pressure, substrate temperature, and H2O flow rates were examined. It was found that the surface bump is significantly dependent on the flow rate of H2O. Based on these observations, we would like to provide additional guidelines for implementing the dry cleaning process to SiGe materials.

Study of a Low-Temperature Bonding Process for a Next-Generation Flexible Display Module Using Transverse Ultrasound (횡 초음파를 이용한 차세대 플렉시블 디스플레이 모듈 저온 접합 공정 연구)

  • Ji, Myeong-Gu;Song, Chun-Sam;Kim, Joo-Hyun;Kim, Jong-Hyeong
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.4
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    • pp.395-403
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    • 2012
  • This is direct bonding many of the metal bumps between FPCB and HPCB substrate. By using an ultrasonic horn mounted on an ultrasonic bonding machine, it is possible to bond gold pads onto the FPCB and HPCB at room temperature without an adhesive like ACA or NCA and high heat and solder. This ultrasonic bonding technology minimizes damage to the material. The process conditions evaluated for obtaining a greater bonding strength than 0.6 kgf, which is commercially required, were 40 kHz of frequency; 0.6MPa of bonding pressure; and 0.5, 1.0, 1.5, and 2.0 s of bonding time. The peel off test was performed for evaluating bonding strength, which was found to be more than 0.80 kgf.

Studies on the Interfacial Reaction of Screen-Printed Sn-37Pb, Sn-3.5Ag and Sn-3.8Ag-0.7Cu Solder Bumps on Ni/Au and OSP finished PCB (Ni/Au 및 OSP로 Finish 처리한 PCB 위에 스크린 프린트 방법으로 형성한 Sn-37Pb, Sn-3.5Ag 및 Sn-3.8Ag-0.7Cu 솔더 범프 계면 반응에 관한 연구)

  • Nah, Hae-Woong;Son, Ho-Young;Paik, Kyung-Wook;Kim, Won-Hoe;Hur, Ki-Rok
    • Korean Journal of Materials Research
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    • v.12 no.9
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    • pp.750-760
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    • 2002
  • In this study, three solders, Sn-37Pb, Sn-3.5Ag, and Sn-3.8Ag-0.7Cu were screen printed on both electroless Ni/Au and OSP metal finished micro-via PCBs (Printed Circuit Boards). The interfacial reaction between PCB metal pad finish materials and solder materials, and its effects on the solder bump joint mechanical reliability were investigated. The lead free solders formed a large amount of intermetallic compounds (IMC) than Sn-37Pb on both electroless Ni/Au and OSP (Organic Solderabilty Preservatives) finished PCBs during solder reflows because of the higher Sn content and higher reflow temperature. For OSP finish, scallop-like $Cu_{6}$ /$Sn_{5}$ and planar $Cu_3$Sn intermetallic compounds (IMC) were formed, and fracture occurred 100% within the solder regardless of reflow numbers and solder materials. Bump shear strength of lead free solders showed higher value than that of Sn-37Pb solder, because lead free solders are usually harder than eutectic Sn-37Pb solder. For Ni/Au finish, polygonal shaped $Ni_3$$Sn_4$ IMC and P-rich Ni layer were formed, and a brittle fracture at the Ni-Sn IMC layer or the interface between Ni-Sn intermetallic and P-rich Ni layer was observed after several reflows. Therefore, bump shear strength values of the Ni/Au finish are relatively lower than those of OSP finish. Especially, spalled IMCs at Sn-3.5Ag interface was observed after several reflow times. And, for the Sn-3.8Ag-0.7Cu solder case, the ternary Sn-Ni-Cu IMCs were observed. As a result, it was found that OSP finished PCB was a better choice for solders on PCB in terms of flip chip mechanical reliability.

Reliability of Non-invasive Sonic Tomography for the Detection of Internal Defects in Old, Large Trees of Pinus densiflora Siebold & Zucc. and Ginkgo biloba L. (노거수 내부결함 탐지를 위한 비파괴 음파단층촬영의 신뢰성 분석(소나무·은행나무를 중심으로))

  • Son, Ji-Won;Lee, Gwang-Gyu;An, Yoo-Jin;Shin, Jin-Ho
    • Korean Journal of Environment and Ecology
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    • v.36 no.5
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    • pp.535-549
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    • 2022
  • Damage to forests, such as broken or falling trees, has increased due to the increased intensity and frequency of abnormal climate events, such as strong winds and heavy rains. However, it is difficult to respond to them in advance based on prediction since structural defects such as cavities and bumps inside trees are difficult to identify with a visual inspection. Non-invasive sonic tomography (SoT) is a method of estimating internal defects while minimizing physical damage to trees. Although SoT is effective in diagnosing internal defects, its accuracy varies depending on the species. Therefore, it is necessary to analyze the reliability of its measurement results before applying it in the field. In this study, we measured internal defects in wood by cross-applying destructive resistance micro drilling on old Pinus densifloraSiebold & Zucc. and Ginkgo bilobaL., which are representative tree species in Korea, to verify the reliability of SoT and compared the evaluation results. The t-test for the mean values of the defect measurement between the two groups showed no statistically significant difference in pine trees and some difference in ginkgo trees. Linear regression analysis results showed a positive correlation with an increase in defects in SoT images when the defects in the drill resistance graph increased in both species.