• Title/Summary/Keyword: Micro Vibration Measurement

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A evaluation and countermeasure for blast-induced vibration of micro electronic production facility based on experimental method (실험적 방법에 의한 발파작업으로 기인하는 인접 초정밀 생산장비 FAB에 미치는 진동 영향성 평가 및 제어대책)

  • Son, Sung-Wan;Park, Sang-Gon;Lee, Hong-Ki;Chun, Jong-Kun
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2006.05a
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    • pp.875-878
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    • 2006
  • In the case of a vibration sensitive equipment, it require a vibration free environment to provide its proper function, therefore, it is very important to predict precisely vibration environment of microelectronics production facility due to adjacent blast work. However, it is not easy to evaluate a quantitative vibration response of structure due blast because it can be determined by the characteristics of vibration sources, propagation through rock and soil and dynamic properties of building. In this paper, vibration influence evaluation of micro-electronic Production building induced from adjacent blast activity was performed by real measurement data obtained on ground and structure at same time. And blast vibration allowable limit on ground was supposed by measurement data analysis in order to avoid operation error of precision equipments

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Hand arm vibration measurement using micro-accelerometer in different brick structures

  • Gomathi, K.;Senthilkumar, A.;Shankar, S.;Thangavel, S.;Priya, R. Mohana
    • Smart Structures and Systems
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    • v.13 no.6
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    • pp.959-974
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    • 2014
  • Hand-Arm Vibration Syndrome (HAVS) is a group of diseases caused by exposure of the hands to vibration while operating the hand held power tools such as road breaker, drilling machine, demolition hammer in construction works. In this paper, area-changed capacitive micro-accelerometer is designed to measure the vibration exposure on worker's hand when operating a drilling machine on various blocks such as clay block, paver block and solid cement block. The design process includes mathematical modelling of micro-accelerometer and simulations are done using INTELLISUITE 8.6. Experimental results are taken for various blocks surfaces using conventional and micro-accelerometer. Comparisons show that usage of area-changed micro-accelerometer for Hand-arm vibration monitoring provides better sensitivity, which in turn reduces the risk of HAVS in workers.

Sound Absorption Measurement by Using Micro-Flown Velocity Sensor (Mciro-flown 속도센서를 이용한 흡음률 측정)

  • 정성수;조문재;김용태
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2004.05a
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    • pp.692-693
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    • 2004
  • We introduce a new velocity sensor, micro-flown sensor, which was developed by H-E de Bree. The sound absorption coefficients of a fiber material with the conventional pressure microphones and the micro-flown sensors were measured and compared. The experimental results show that both sensors could be well applied to measure the sound absorption coefficient but the pressure sensor was rather stable than micro-flown sensor

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Development of Measurement System for Quantitative Measurement of Cantilever in Atomic Force Microscopy (원자간격 현미경의 캔틸레버의 정량적 특성평가를 위한 계측 시스템 개발)

  • Kweon, Hyun-Kyu;Nam, Ki-Ho
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.6 no.2
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    • pp.22-27
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    • 2007
  • In this study, the two methods of stiffness measurement(Spring constant) of cantilever were proposed for quantitative measurement in Atomic Force Microscopy(AFM). As the 1st method for the measurement of stiffness, the probe method, which is used in the measurement of the semiconductor mechanical and electrical properties, was applied to the measurement of the cantilever. Experiments by the probe method were performed finding the resistance value of cantilever. As the results, the resistance was measured differently along with the dimension and the thickness of cantilever that determined the stiffness(spring constant) of the lever. As the 2nd method, the vibration characteristics(Dunkerley expression) is used to obtain the stiffness of the complex structure which is combined by AFM cantilever and the standard cantilever. We measured the resonant frequency from the complex structure using the micro stages and stereo microscope. As the results, we confirmed that the vibration characteristics(Dunkerley expression) is effected the micro complex structure of AFM cantilever.

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Vibration Analysis of 1″ Micro Storage (1″ 마이크로 스토리지의 진동특성 분석에 관한 연구)

  • W. S. Han;M. P. Hong;Y. K. Byun;J. S. Ko
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2002.11a
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    • pp.339.2-339
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    • 2002
  • In recent years, the demand of mobile device, such as digital camera, camcoder and PDA, increases remarkably. So, requirements of the mobile information data storage used in the mobile devices increase noticeably also. 1" micro storage is a kind of mobile storage, which has a CF type II form factor, and the similar structure of the general 3.5" HDD. In this paper, we performed the vibration analysis and experimental study of disk-spindle system in 1 " micro storage, such as measurement of the NRRO of the disk, and modal analysis. (omitted)

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Derivation of Numerical Equivalent Model of Vibration Isolator using Pseudoelastic SMA Mesh Washer (의탄성 형상기억합금 메쉬 와셔가 적용된 수동형 진동절연기의 수학적 등가모델 도출)

  • Kwon, Sung-Cheol;Jeon, Su-Hyeon;Oh, Hyun-Ung
    • Journal of Aerospace System Engineering
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    • v.8 no.3
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    • pp.6-13
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    • 2014
  • A passive launch and on-orbit vibration isolator using SMA(Shape Memory Alloy) washer for both the structural safety of the micro-vibration source by attenuating the transmitted force under launch loads and the micro-vibration isolation during their on-orbit operation has been proposed, which does not require the additional launch locking mechanism. To measure the characteristics of SMA mesh washer, we performed compressive loading tests with a single SMA mesh washer and a vibration isolator using SMA mesh washer. The numerical equivalent model of vibration isolator using SMA mesh washer composed of two spring and viscous damping elements has been verified that both stiffness and viscous damping varied with respect to compressed deformations. In addition, the effectiveness of launch loads and micro-vibration reduction has been investigated through the dynamic characteristics measurement test of cooler assembly combined with passive vibration isolator.

Development of Effective Measurement System for Micro Burrs (효율적인 마이크로 버 측정 시스템 개발)

  • Ko Sung-Lim;To Hoang-Minh
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.702-705
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    • 2005
  • Burr is an undesirable projection as result of plastic deformation. Burr minimization and effective deburring process are required strongly to reduce the cost of the parts. In doing these efforts, the precise burr measurement must be provided for the efficient process. For this purpose the conoscopic holography sensors are selected before. However, it has been very difficult to measure micro burrs less than $10{\mu}m$ due to their tiny and sharp geometries as well as the effect of ambient vibration during scanning. A new micro burr measurement system using high precision. Conoprobe sensor and XY table can measure the micro burrs which is less than $10{\mu}m$. Experiments were carried out showing that micro burr around $10{\mu}m$ was successfully measured and analyzed.

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Micro Vibration Measurement in a Latex Sample Mimicking the Tympanic Membrane Using Micro Vibro Tomography (고막을 모방한 라텍스 샘플의 미세진동 측정을 위한 마이크로 바이브로 토모그라피 시스템 개발)

  • Kwon, Jaehwan;Kim, Pilun;Jeon, Mansik;Kim, Jeehyun
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.30 no.1
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    • pp.23-27
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    • 2019
  • In this paper, we propose a micro vibro tomography(MVT) method, that can be used to visualize two-dimensional cross-sectional images and micro-vibration tomographic images in real time in a non-contact and non-destructive manner. The proposed method is based on the optical coherence tomography(OCT) technique, with an additionally customized image processing algorithm. The proposed method can detect the micro-motions or vibrations in sample structures by measuring the phase shift variations in the sample structures. In this study, we show the potential capabilities of the proposed MVT system for measuring the micro-vibrations generated when sound waves in a frequency range of 2~5 kHz are applied to an $80-{\mu}m$ thick latex phantom, which mimics the changes in physical structure of the human tympanic membrane while hearing. Additionally, three-dimensional volumetric images of the MVT method were recorded to observe the surface morphological changes in the surface of the phantom sample which mimics the human tympanic membrane while hearing.