• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2005년도 추계종합학술대회
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• pp.913-916
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• 2005

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}pa$. $m^3/cm^2$.

• 유공압시스템학회논문집
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• 제8권1호
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• pp.19-25
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• 2011

This study presents the design of digital amplifier.controller for a proportional control valve and the development of PID discrete control scheme by using RCP(Rapid Controller Prototyping) system. RCP system is the device to embed the control code developed in PC into the microcontroller on-site. Ramp input test using the digital amplifier.controller developed in this study was carried out for the proportional control valve of domestic production and Bosch Rexroth respectively. The instability problem occurred around maximum displacement of localized valve spool at ramp input test was solved by supplementing offset current to the duty ratio of PWM(Pulse Width Modulation) driving signal to the solenoid. The comparison of test results between localized proportional control valve and Bosch Rexroth's product shows that the characteristics obtained by ramp input test and static flow gains are alike each other. Two valves are about the same in dead bands and hysteresis characteristics.

• 유공압시스템학회논문집
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• 제3권4호
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• pp.21-28
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• 2006

The proportional control solenoid valves as well as the PWM solenoid valves operated by electric signal play an important role in the hydraulic system for automatic transmissions to improve the shift quality. However it is not generally available for the performance data because most of the automotive parts manufacturer don't release the specific test results, especially dynamic performance that is essential to design a shift control algorithm. In this research, a performance test equipment that can be applied to various types of pressure control solenoid valve was developed. It was implemented by 8-bit micro-controller with many useful functions such as adjustable PWM carrier frequency, embedded function generator, current controller, data monitoring and acquisitions, etc. for the test of dynamic performance of solenoid valve as well as the steady-state pressure characteristics. The performance test results for the direct type proportional control solenoid valve show not only the validity of overall functions but also its usefulness as a hydraulic valve tester.

• Journal of Electrical Engineering and Technology
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• 제1권2호
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• pp.263-267
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• 2006

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2011년도 춘계학술대회 초록집
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• pp.205.2-205.2
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• 2011

Micro hydraulic turbines take a growing interest because of its small and simple structure as well as high possibility of applying to micro and small hydropower resources. The differential pressure exiting within the city water pipelines can be used efficiently to generate electricity like the energy generated through gravitational potential energy in dams. In order to reduce water pressure at the inlet of water cleaning centers, pressure reducing valves are used widely. Therefore, pressure energy is wasted. Instead of using the pressure reduction valve, a micro counter-rotating hydraulic turbine can be replaced to get energy caused by the large differential pressure found in the city water pipelines. In this study, in order to acquire design data of counter-rotating tubular type micro-turbine, output power, head, and efficiency characteristics due to the diffuser.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 추계학술대회 논문집
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• pp.463-467
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• 2004

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated b micro-heater under pulse heating. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, he middle plate, the upper plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The middle plate includes the chamber and diaphragm d the upper plate is the micro-heater. The Micropump is fabricated by bonding process of the three layer. This paper resented the possibility of the PCR chip operation by the fabricated micropump.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2763-2768
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• 2007

Recently, as the semiconductor production technology develops, there has been growing interest in the cooling system using micro fluid pump. Among the various types of micro fluid pump, the valve-less diffuser/nozzle has been extensively studied in recent years. However, the flat-walled diffuser/nozzle flow has not been clearly looked into due to its non-linear characteristics. In this paper, the flow characteristics of the flat-walled diffuser/nozzle have been analyzed using similitude model and simulations. Similitude models are designed so that the flow pattern is same as that of 1/10 scale flow by using high viscous fluid as working fluid. The results are compared to the simulations. It is shown that the flow characteristics of 2D simulation are different from 3D simulations at high Re region, and the measured pump efficiency is highly dependent on the pressure difference as well as the channel geometry. From these results, the desirable conditions for the efficient pump is discussed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1194-1197
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• 2005

Micro nozzle is employed as a dynamic passive valve in micro fluidic devices. Micro nozzle array is used in micro droplet generation in bio-medical applications and propulsion device for actuating satellite and aerospace ship in vacuum environments. Aperture angle and the channel length of the micro nozzle affect its retification efficiency, and thus it is needed to produce micro nozzle precisely. MEMS process has a limit on making a micro nozzle with high-aspect ratio. Reactive ion etching process can make high-aspect ratio structure, but it is difficult to make the complex shape. Focused ion beam deposition has advantage in machining of three-dimensional complex structures of sub-micron size. Moreover, it is possible to monitor machining process and to correct defected part at simultaneously. In this study, focused ion beam deposition was applied to micro nozzle production.

• 한국자기학회지
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• 제25권1호
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• pp.16-21
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• 2015

광 리소그래피 공정을 이용하여 GMR-SV(Giant magnetoresistance-Spin valve) 다층박막 위에 마이크로 크기의 바이오센서용 소자와 코일-채널을 적층으로 각각 제작하였다. 직경 $1{\mu}m$ 크기인 여러 개의 자성비드가 결합된 적혈구가 마이크로 채널로 지나갈 때 코일에 인가하는 AC 신호로 정지 또는 통과하는 적혈구 움직임을 조절하였다. GMR-SV 소자 위에 포획된 적혈구-자성비드가 갖는 미세자기장은 자기저항비를 변화시켜 검출용 출력신호 특성으로 나타났다. 이것을 이용하여 자성비드를 결합한 적혈구의 막 변형에 따른 운동 특성을 분석하는 바이오센서로 활용할 수 있음을 보여주었다.

• Tribology and Lubricants
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• 제32권1호
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• pp.32-37
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• 2016

The wear characteristics of metal ball and seat in a metal-seated ball valve significantly affect the performances such as leakage and valve torque. In this work, the wear characteristics of metal ball and seat are experimentally investigated. A stainless steel ball and seat with a high corrosion-resistant coating are prepared and a component level test was performed. The hardness and surface roughness of specimens cut from the metal ball and seat are measured before and after the test using a micro-Vickers hardness tester and confocal microscopy, respectively. In order to assess the wear characteristics, the surfaces of the specimens are carefully examined after the test. The confocal microscope data show that the surface roughness values of both the ball and seat increase by a factor of 3-4, which may lead to an increase in valve torque. However, the wear of the seat is found to be more significant than that of the ball. In addition, a comparison of the surfaces of the ball and seat before and after testing revealed that adhesive and abrasive wear are the major wear mechanisms. The results of this study may aid in the design of metal-seated ball valves from the tribological point of view.