• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1684-1685
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• 2011

This paper presents a theoretical and numerical analysis for thermal isolation of silicon micro-structures, especially for a large size with poor thermal conductivity, as well as straightforward solution for such an issue. Additional metal patterns underneath the silicon structures effectively reduces the thermal isolation. Heat transfer mechanism is analyzed using an equivalent circuit of thermal network including plasma, a heat source, heat capacitors, and thermal resistances. The FEM simulation was carried out to investigate the temperature change of silicon micro-structures according to process time. The temperature of silicon micro-structures with 2 ${\mu}m$ thick chrome layer at a steady state is $86^{\circ}C$, an approximately 40% decrease from the silicon microstructure without thin metal ($122^{\circ}C$)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.551-552
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• 2006

The miniature fuel cells have emerged as a promising power source for applications such as cellular phones, small digital devices, and autonomous sensors to embedded monitors or to micro-electro mechanical system (MEMS) devices. Several chemicals run candidate at a fuel in those systems, such as hydrogen. methanol, ethanol, acetic acid, and di-methyl ether (DME). Among them, hydrogen shows most efficient fuel performance. However, there are some difficulties in practical application for portable power sources. Therefore, more recently, there have been many efforts for development of micro-reformer to operate highly efficient micro fuel cells with liquid fuels such as methanol, ethanol, and DME In our experiments, we have integrated a micro-fuel processor system using low temperature co-fired ceramics (LTCC) materials. Our integrated micro-fuel processor system is containing embedded heaters, cavities, and 3D structures of micro- channels within LTCC layers for embedding catalysts (cf. Figs. 1 and 2). In the micro-channels of LTCC, we have loaded $CuO/ZnO/Al_2O_3$ catalysts using several different coating methods such as powder packing or spraying, dipping, and washing of catalyst slurry.

• Structural Engineering and Mechanics
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• v.56 no.2
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• pp.293-315
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• 2015

While most of researches on system identification of building structures are aimed at finding modal parameters first and identifying the corresponding physical parameters by using the transformation in terms of transfer functions and cross spectra, etc., direct physical parameter system identification methods have been proposed recently. Due to the problem of signal/noise (SN) ratios, the previous methods are restricted mostly to earthquake records or forced vibration data. In this paper, a theoretical investigation is performed on the influence of wind disturbances on stiffness identification of building structures using micro-tremor at limited floors. It is concluded that the influence of wind disturbances on stiffness identification of building structures using micro-tremor at limited floors is restricted in case of using time-series data for low-rise buildings and does not cause serious problems.

• Structural Engineering and Mechanics
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• v.71 no.3
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• pp.223-232
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• 2019

Since the actuators with small- scale structures may be exposed to external reciprocal actions lead to create undesirable loads causing instability, the buckling behaviors of them are interested to make reliable or accurate actions. Therefore, the purpose of this paper is to analyze plastic buckling behavior of the micro beam structures by adopting a Conventional Mechanism-based Strain Gradient plasticity (CMSG) theory. The effect of length scale on critical force is considered for three types of boundary conditions, i.e. the simply supported, cantilever and clamped - simply supported micro beams. For each case, the stability equations of the buckling are calculated to obtain related critical forces. The constitutive equation involves work hardening phenomenon through defining an index of multiple plastic hardening exponent. In addition, the Euler-Bernoulli hypothesis is used for kinematic of deflection. Corresponding to each length scale and index of the plastic work hardening, the critical forces are determined to compare them together.

• Journal of Ceramic Processing Research
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• v.13 no.spc1
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• pp.93-95
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• 2012

We report on the growth and characterization of the nano- and micro scale GaN structures selectively grown on the vertex of GaN stripes using the metal organic vapor phase epitaxy method and conventional photolithography technique. The triangular shaped nano- and micro GaN structures which have semi-polar {11-22} facets were formed only on the vertex of the lower GaN stripes. Crystalline defects reduction was observed by transmission electron microscopy for upper GaN stripes. We also have grown the InGaN/GaN multi-quantum well structures on the semi-polar facets of the upper GaN stripes. Cathodoluminescence images were taken at 366, 412 and 555 nm related to GaN band edge, InGaN/GaN layer and defects, respectively.

• Journal of Sensor Science and Technology
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• v.19 no.6
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• pp.403-420
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• 2010

Nano and micro structure-based biosensors are promising tool for label-free detection of biomolecular interactions with great accuracy. This review gives a brief survey on nano and micro platforms to sense a variety of analytes such as DNA, proteins and viruses. Among incredible nano and micro structure for bio-analytical applications, the scope of this paper will be limited to micro and nano resonators and nanowire field-effect transistors. Nanomechanical motion of the resonators transducers biological information to readable signals. They are commonly combined with an optical, capacitive or piezo-resistive detection systems. Binding of target molecule to the modified surface of nanowire modulates the current of the nanowire through electrical field-effect. Both detection methods have advantages of label-free, real-time and high sensitive detection. These structures can be extended to fabricate array-type sensors for multiplexed detection and high-throughput analysis. The biosensors based on these structures will be applied to lab-on-a-chip platforms and point-of-care diagnostics. Basic concepts including detection mechanisms and trends in their fields will be covered in this review.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1927-1931
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• 2003

Nanometer-sized structures are being applied to many fields including micro/nano electronics, optoelectronics, quantum computing, biosensors, etc. Micro contact printing is one of the most promising methods for manufacturing the nanometer-sized structures. The crucial element for the micro contact printing is the nano-resolution printing technique using polymeric stamps. In this study, a multi-scale analysis scheme for simulating the micro contact printing process is proposed and some useful analysis results are presented. Using the slip-link model [1], the dependency of viscoelasticity on molecular weight of polymer stamp is predicted. Deformation behaviors of polymeric stamps are analyzed using finite element method based upon the predicted viscoelastic properties.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.685-688
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• 2005

In the micro electrochemical machining (MECM) using ultra short pulses, the machining rate is closely related to the tool electrode area. The machining rate varies according to the machining depth or the immersion depth. When using insulated tool electrodes, those depths do not matter. In addition, micro structures with high machining depth can be fabricated because the machining characteristics do not vary with the machining depth. Another advantage of insulated electrodes is prevention of taper shape. Micro structures with high machining depth or high aspect ratio were fabricated using insulated tool electrodes.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.2
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• pp.186-194
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• 2004

Micro-stereolithography is a newly proposed technology as a means that can fabricate a 3D micro-structure of free form. It makes a 3D micro-structure by dividing the shape into many slices of relevant thickness along horizontal surfaces, hardening each layer of slice with a focused laser beam, and stacking them up to a desired shape. In this technology, differently from the conventional stereolithography, scale effect is dominant. To realize micro-stereolithography technology, we developed the micro-stereolithography apparatus which is composed of an Ar+ laser, x-y-z stages. controllers. optical devices and scan path generation software. Related processes were developed, too. Using the system, a number of micro-structures were successfully fabricated. Some of these samples are shown for prove this system. Laser scan path generation algorithm and software considering photopolymer solidification phenomena as well as given 3D model were developed. Sample fabrication of developed software shows relatively high dimensional accuracy compared to the uncompensated result.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.2 s.179
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• pp.129-137
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• 2006

Polymer micro-fluidic devices were fabricated with laser processes. A UV laser and a femto laser were used to machine polymer micro-fluidic structures directly. This laser direct machining process suits the need of rapid prototyping, as in many applications changes from the original design are often required. As examples, two polymer micro-systems were developed: a micro-check valve and a micro diffuser pump. The micro fluidic devices can be applied for many applications such as clinical diagnostics and drug delivery. Advantages and disadvantages using polymers as a material for micro-fluidic applications are discussed.