Micro Electrochemical Machining Using Insulated Electrode

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In the micro electrochemical machining (MECM) using ultra short pulses, the machining rate is closely related to the tool electrode area. The machining rate varies according to the machining depth or the immersion depth. When using insulated tool electrodes, those depths do not matter. In addition, micro structures with high machining depth can be fabricated because the machining characteristics do not vary with the machining depth. Another advantage of insulated electrodes is prevention of taper shape. Micro structures with high machining depth or high aspect ratio were fabricated using insulated tool electrodes.