• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.264-268
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• 2003

Recently reduction of industrial products in size and weight has been increased by application of micro-drills in gadgets of high precision and a great interest of a micro-drilling has been raised. Due to the lack of tool stiffness and the chip packing, the micro-drilling requires not only the robust tool structure which has not affected by vibration but also effective drilling methods designed to prevent tool fracture from cutting troubles. This paper presents an optimum design shape of a 0.15 mm micro-drill associated with a new manufacturing process to improve the production rate and to lengthen the tool life and suggestions on the micro-drilling characteristic properties associated with the tool life and workpiece quality.

• Journal of Mechanical Science and Technology
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• 제18권5호
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• Transactions on Control, Automation and Systems Engineering
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• 제4권1호
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• pp.23-31
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• 2002

We proposed a concept of a desktop micro device factory for visually servoed teleoperated microassembly assisted by a virtual reality (VR) interface. It is composed of two micromanipulators equipped with micro tools operating under a light microscope. First a manipulator, control method for the micro object to follow a planned trajectory in pushing operation is proposed undo. vision based-position control. Then, we present the cooperation control strategy of the micro handling operation under vision-based force control integrating a sensor fusion framework approach. A guiding-system based on virtual micro-world exactly reconstructed from the CAD-CAM databases of the real environment being considered is presented for the imprecisely calibrated micro world. Finally, some experimental results of microassembly tasks performed on millimeter-sized components are provided.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2002년도 ICCAS
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• pp.109.1-109
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• 2002

This paper presents a macro/micro flip chip mounting head system for precise force control. In the proposed macro/ micro system, the macro actuator is conventional do servomotor with a ball screw mechanism and the micro actuator is a voice coil motor(VCM) that consists of four NdFeB magnets and a winded moving coil. For force control, a sensitive strain-gauge force sensor is mounted in the micro actuator. Through harmonic motion between macro and micro actuator, we would like to get precise contact force control when small sized flip chip is mounted on flexible substrate in high speed. In order to show the effectiveness of the proposed macro/micro flip chip mounting head system, we com...

• 제어로봇시스템학회논문지
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• 제19권11호
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• pp.979-983
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• 2013

The three-dimensional measurement method of confocal systems is a spot scanning method which has a high resolution and good illumination efficiency. However, conventional confocal systems had a weak point in that it has to perform XY axis scanning to achieve FOV (Field of View) vision through spot scanning. There are some methods to improve this problem involving the use of a galvano mirror [1], pin-hole array, etc. Therefore, in this paper we propose a method to improve a parallel mode confocal system using a micro-lens and pin-hole array in a dual microscope configuration. We made an area scan possible by using a combination MLA (Micro Lens Array) and pin-hole array, and used an objective lens to improve the light transmittance and signal-to-noise ratio. Additionally, we made it possible to change the objective lens so that it is possible to select a lens considering the reflection characteristic of the measuring object and proper magnification. We did an experiment using 5X, 2.3X objective lens, and did a calibration of height using a VLSI calibration target.

• 로봇학회논문지
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• 제19권1호
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• pp.45-52
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• 2024

This paper introduces an approach to enhance the performance of magnetic manipulation systems for microrobot actuation. A variety of eight-electromagnet configurations have been proposed to date. The previous study revealed that achieving 5 degrees of freedom (5-DOF) control necessitates at least eight electromagnets without encountering workspace singularities. But so far, the research considering the influence of iron cores embedded in electromagnets has not been conducted. This paper offers a novel approach to optimizing electromagnet configurations that effectively consider the influence of iron cores. The proposed methodology integrates probabilistic optimization with finite element methods (FEM), using Bayesian Optimization (BO). The Bayesian optimization aims to optimize the worst-case magnetic force generation for enhancing the performance of magnetic manipulation system. The proposed simulation-based model achieves approximately 20% improvement compared to previous systems in terms of actuation performance. This study has the potential for enhancing magnetic manipulation systems for microrobot control, particularly in medical and microscale technology applications.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.2349-2351
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• 2003

This paper reports a novel microfluidic system, by which microfluidic delivery, transport and control can be digitally realized in femtoliter scale. Microelectronic grade $N_2$ from a pressurized canister was passed through HPLC tubing into a micro injector. The micro injector was driven and controlled digitally by the control system that can apply various control parameters such as pulse frequencies. A front-end of micro nozzle was inserted the dyed oil to collect droplets injected. The diameter of a droplet was measured by a microscope and a CCD camera, and then its volume can be calculated on the assumption that the droplet is spherical. The micro nozzles were simply pulled in glass capillary tubes by the micro puller self-made, and the geometry parameters of the micro nozzles can be adjusted easily. Experiments have successfully been carried out, and the results demonstrated that the proposed digital micro injector possesses three significant advantages : precise ultra-small liquid volume in femtoliter scale, digital microfluidic control and micro devices fabricated by simple glass process, not based on IC process.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.2445-2450
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• 2003

Recently, biological technology industry shows great development. Instruments and systems related biological technology have been developed actively. In this paper, we developed a new micro end-effector for biological cell manipulation. The existing micro end-effector for biological cell manipulation has not any force sensing mechanism. Usually, excessive contact force occurring when the end-effector and a cell collide might make a damage on the cell. However, unfortunately, user can not notice the condition in case of using the existing end-effector. In order to overcome we proposed the improved micro end-effector having a force sensing mechanism. This paper presents the design concepts of the new micro end-effector. We carried out calibration of the force sensor and tested the performance of the proposed micro end-effector. Through a series of experiments the new micro end-effector shows the possibility of application for precision biological cell manipulation such as DNA operation

• 제어로봇시스템학회논문지
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• 제15권3호
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• pp.258-264
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• 2009

This paper presents two control algorithms for the frequency and amplitude of the resonator of a micro sensor. One algorithm excites the resonator at its a priori unknown resonant frequency, and the other algorithm alters the resonator dynamics to place the resonant frequency at a fixed frequency, chosen by the designer. Both algorithms maintain a specified amplitude of oscillations. The control system behavior is analyzed using an averaging method, and a quantitative criterion is provided for the selecting the control gain to achieve stability. Tracking and estimation accuracy of the natural frequency under the presence of measurement noise is also analyzed. The proposed control algorithms are applied to the MEMS dual-mass gyroscope without mechanical connecting beam between two proof-masses. Simulation results show the effectiveness of the proposed control algorithms which guarantee the proof-masses of the gyroscope to move in opposite directions with the same resonant frequency and oscillation amplitude.

• 로봇학회논문지
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• 제12권1호
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• pp.78-85
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• 2017

This paper presents the development of a 3D printer based piezo-driven vertical micro-positioning stage. The stage consists of two flexure bridge structures which amplify and transfer the horizontal motion of the piezo-element into vertical motion of the end-effector. The stage is fabricated with ABS material using a precision 3D printer. This enables a one-body design eliminating the need for assembly, and significantly increases the freedom in design while shortening fabrication time. The design of the stage was optimized using response surface analysis method. Experimental results are presented which demonstrate 100nm stepping in the vertical out-of-plane direction. The results demonstrate the future possibilities of applying 3D printers and ABS material in fabricating linear driven motion stages.