• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.152-152
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• 2008

Micro probe with Ni-Co tip was designed. Unit processes for fabricating the micro probe were developed. We are investigated the micro probe tip using by Ni-Co alloy. One-step and three-step needle was fabricated by plating process, CMP, and photolithography process. The plating thickness was varied by current density and time. Futher data will be extract by different process conditions.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.607-608
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• 2011

• Journal of Sensor Science and Technology
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• v.13 no.5
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• pp.335-341
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• 2004

A light collecting probe named Multi-colored Integrated Receiving Optics (MICRO) is experimentally examined to verify its performance. For these purposes, the time-series signals of MICRO probe is compared with those of electrostatic probe and light-guided probe by monitoring, for example, such as OH radical chemiluminescence, CH radical band and droplet Mie scattering. In addition, the experiment was conducted by using laminar premixed Bunsen flame, turbulent premixed Bunsen flame and premixed spray flame, respectively. It was confirmed that the performance of MICRO probe was very useful and convenient to obtain the chemiluminescence signals from local regions in turbulent premixed Bunsen flame and premixed spray flame.

• Journal of the Korean Society of Industry Convergence
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• v.7 no.3
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• pp.265-271
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• 2004

A light collecting probe named Multi-colored Integrated Receiving Optics (MICRO) is experimentally examined to verify its performance. For these purposes, the time-series signals of MICRO probe is compared with those of electro-static probe and light-guided probe by monitoring, for example. such as OH radical chemiluminescence. CH radical band and droplet Mie scattering In addition, the experiment was conducted by using laminar premixed Bunsen flame, turbulent premixed Bunsen flame and premixed spray flame, respectively. It was confirmed that the performance of MICRO probe was very useful and convenient to obtain the chemiluminescence signals from local regions in turbulent premixed Bunsen flame and premixed spray flame.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.9
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• pp.749-755
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• 2007

Recently, novel MEMS probe cards can support reliable wafer level chip test with high density probing capacity. However, manufacturing cost and process complexity are crucial weak points for low cost mass production. To overcome these limitations, we have developed micro spring structured MEMS probe card. For fabrication of micro spring module, a wire bonder and electrolytic polished gold wires are used. In this case, stringent tension force control is essential to guarantee the low level contact resistance of micro spring for reliable probing performance. For this, relation between tension force of fabricated probe card and contact resistance is characterized. Compare to conventional probe cards, developed MEMS probe card requires fewer fabrication steps and it can be manufactured with lower cost than other MEMS probe cards. Also, due to the small contact scratch patterns, we expect that it can be applied to bumping types chip test which require higher probing density.

• Journal of the Korean Institute of Telematics and Electronics
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• v.23 no.1
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• pp.83-90
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• 1986

A micro pH-ISFET probe, which can be applied to the in vivo measurements of the hydrogen ion concentration in blood, has been developed, and a measuring system equiped with this probe also developed. The pH-ISFET has been fatricated by employing the techniques of integrated circuit fabrication. Two kinds of micro electrode formed around the sensing gate during the wafer process, and the other is a capillary type of Ag/AfCl/sat. KCI reduced in size. This capillary electrode has shown its good performance characteristics so far in the application with ISFET as well as a commercial one. In order to form a micro pH-ISFET probe, this pH-ISFET and well as a commercial one. In order to form a micro pH-ISFET probe, this pH-ISFET and the capillary electrode were built together into a needle tip having 1 mm inner diameter. The chip size of a twin pH-ISFET is 0.8 mmx1.4 mm, the material of the sensing gate membrane is Si3N4, and the sensitivity of the developed probe is about 52mV/pH.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.9
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• pp.825-831
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• 2006

As an increase of chip complexity and level of chip integration, chip input/output (I/O) pad pitches are also drastically reduced. With arrival of high complexity SoC (System on Chip) and SiP (System in Package) products, conventional horizontal type probe card showed its limitation on probing density for wafer level test. To enhance probing density, we proposed new vertical type probe card that has the $70{\mu}m$ probe needle with tungsten wire in $80{\mu}m$ micro-drilled hole in ceramic board. To minimize alignment error, micro-drilling conditions are optimized and epoxy-hardening conditions are also optimized to minimize planarity changes. To apply wafer level test for target devices (T5365 256M SDRAM), designed probe card was characterized by probe needle tension for test, contact resistance measurement, leakage current measurement and the planarity test. Compare to conventional probe card with minimum pitch of $50{\sim}125{\mu}m\;and\;2\;{\Omega}$ of average contact resistance, designed probe card showed only $22{\mu}$ of minimum pitch and $1.5{\Omega}$ of average contact resistance. And also, with the nature of vertical probing style, it showed comparably small contact scratch and it can be applied to bumping type chip test.

• Journal of the Korean Society of Safety
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• v.19 no.3 s.67
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• pp.20-25
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• 2004

In order to obtain the flame Propagation speed in freely falling droplet suspension Produced by an ultrasonic atomizer, a light collecting probe named Multi-color Integrated Cassegrain Receiving Optics (MICRO) is applied to spark-ignited spherical spray flames. Two MICRO probes are used to monitor time-series signals of OH chemilumine-scence from two different locations in the flame. The flame propagation speed is calculated by detecting the arrival time difference of the propagating flame front. In addition, time-series images of OH chemiluminescence are simultaneously obtained by a high-speed digital CCD camera to ensure the validity of the MICRO system. Furthermore, relationship between the spray properties measured by phase Doppler anemometer (PDA) and the flame propagation speed are discussed with k different experimental conditions by changing the fuel injection rate. It was confirmed that the MICRO probe system was very useful and convenient to obtain the flame propagation speed and that the flame propagation speed was different depending on the spray properties.

• ETRI Journal
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• v.27 no.4
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• pp.433-438
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• 2005

We present a new type of silicon micro-probe card using a three-dimensional probe beam of the cantilever type. It was fabricated using KOH and dry etching, a porous silicon micromachining technique, and an Au electroplating process. The cantilever-type probe beam had a thickness of $5 {\mu}m$, and a width of $50{\mu}$ and a length of $800 {\mu}m$. The probe beam for pad contact was formed by the thermal expansion coefficient difference between the films. The maximum height of the curled probe beam was $170 {\mu}m$, and an annealing process was performed for 20 min at $500^{\circ}C$. The contact resistance of the newly fabricated probe card was less than $2{\Omega}$, and its lifetime was more than 20,000 turns.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.26-31
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• 2007

A novel scanning probe measurement system was developed to enable precise profile measurements of microaspheric surfaces. An air-bearing stylus with a microprobe was used to perform the surface profile scanning. The new system worked in a contact mode and had the capability of measuring micro-aspheric surfaces with large tilt angles and complex profiles. Due to limitations resulting from the contact mode, such as possible damage caused by the contact force and lateral resolution restrictions from the curvature of the probe tip, several system improvements were implemented. An air bearing was used to suspend the shaft of the probe to reduce the contact force, enabling fine adjustments of the contact force by changing the air pressure. The movement of the shaft was measured by a linear encoder with a scale attached to the actual shaft to avoid Abbe errors. A $50-{\mu}m-diameter$ glass sphere was bonded to the tip of the probe to improve the lateral resolution of the system. The maximum contact force of the probe was 10 mN. The shaft was capable of holding the probe continuously if the contact force was less than 40 mN, and the resolution of the probe could be as high as 10 nm, The performance of the new scanning probe measurement system was verified by experimental data.