• Interaction and multiscale mechanics
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• v.3 no.3
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• pp.257-266
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• 2010

A novel resonance based proximity DC current sensor is proposed. The sensor consists of a piezo sensed and actuated cantilever beam with a permanent magnet mounted at its free end. When the sensor is placed in proximity to a wire carrying DC current, resonant frequency of the beam changes with change in current. This change in resonant frequency is used to determine the current through the wire. The structure is simulated in micro and meso scale using COMSOL Multi physics software and the sensor is found to be linear with good sensitivity.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.6
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• pp.515-518
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• 2011

In this work, we designed and fabricated a multilayer thin film Pb(Zr,Ti)$O_3$ cantilever with a Si proof mass for low frequency vibration energy harvesting applications. A mathematical model of a mu lti-layer composite beam was derived and applied in a parametric analysis of the piezoelectric cantilever. Finally, the dimensions of the cantilever were determined for the resonant frequency of the cantilever. W e fabricated a device with beam dimensions of about 4,930 ${\mu}M$ ${\times}$ 450 ${\mu}M$ ${\times}$ 12 ${\mu}M$, and an integrated Si proof mass with dimensions of about 1,410 ${\mu}M$ ${\times}$ 450 ${\mu}M$ ${\times}$ 450 ${\mu}M$. The resonant frequency, maximum peak voltage, and highest average power of the cantilever device were 84.5 Hz, 88 mV, and 0.166 ${\mu}Wat$ 1.0 g and 23.7 ${\Omega}$, respectively. The dimensions of the cantilever were determined for the resonance frequency of the cantilever.

• Structural Engineering and Mechanics
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• v.59 no.3
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• pp.579-599
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• 2016

In this study, static bending of edge cracked micro beams is studied analytically under uniformly distributed transverse loading based on modified couple stress theory. The cracked beam is modelled using a proper modification of the classical cracked-beam theory consisting of two sub-beams connected through a massless elastic rotational spring. The deflection curve expressions of the edge cracked microbeam segments separated by the rotational spring are determined by the Integration method. The elastic curve functions of the edge cracked micro beams are obtained in explicit form for cantilever and simply supported beams. In order to establish the accuracy of the present formulation and results, the deflections are obtained, and compared with the published results available in the literature. Good agreement is observed. In the numerical study, the elastic deflections of the edge cracked micro beams are calculated and discussed for different crack positions, different lengths of the beam, different length scale parameter, different crack depths, and some typical boundary conditions. Also, the difference between the classical beam theory and modified couple stress theory is investigated for static bending of edge cracked microbeams. It is believed that the tabulated results will be a reference with which other researchers can compare their results.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.11
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• pp.831-835
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• 2013

In this study, we fabricated a micro $Pb(Zr,Ti)O_3$ (PZT) film piezoelectric cantilever with a Si proof mass and dual beams through MEMS process. The size of the beam and the integrated Si proof mass were about $4,320{\mu}m{\times}290{\mu}m{\times}12{\mu}m$ and $1,380{\mu}m{\times}880{\mu}m{\times}450{\mu}m$ each. To reduce the air damping and have the larger displacement of dual beams was used for design. After mounting micro PZT film piezoelectric cantilever on shaker, we measured the resonance frequency and a output voltage while making resonant frequency changed. The resonant frequency and the highest average power of the cantilever device were 110.2 Hz and 0.36 ${\mu}W$ each, at 0.8 g acceleration and 23.7 $k{\Omega}$ load resistance, respectively.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.5
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• pp.550-555
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• 2007

The effective fracture toughness testing of materials intended for application in Micro Electro Mechanical Systems (MEMS) devices is required in order to improve understanding of how micro sized material used in device may be expected to perform upon the micro scale. ${\gamma}$-TiAl based materials are being considered for application in MEMS devices at elevated temperatures. Especially, in Alloy 4, both ${\alpha}_2$ and ${\gamma}$ lamellae were altered markedly in 3,000 h, $700^{\circ}C$ exposure. Parallel decomposition of coarse ${\alpha}_2$ into bunches of very fine (${\alpha}_2+{\gamma}$) lamellae. Parallel decomposition of coarse ${\alpha}_2$ into bunches of very fine (${\alpha}_2+{\gamma}$) lamellae. The materials were examined 2 types Alloy 4 on heat exposed specimen($700^{\circ}C$, 3,000 h) and no heat exposed one. Micro sized cantilever beams were prepared mechanical polishing on both side at $25{\sim}30{\mu}m$ and electro final stage polishing to observe lamellar orientation of same colony with EBSD (Electron Backscatter Diffraction Pattern). Through lamellar orientation as inter-lamellae or trans-lamellae, Cantilever beam was fabricated with Focused Ion Beam(FIB). The directional behavior of the lamellar structure was important property in single material, because of the effects of the different processing method and variations in properties according to lamellar orientation. In MEMS application, it is first necessary to have a reliable understanding of the manufacturing methods to be used to produce micro structure.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.6
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• pp.96-104
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• 2007

Calibration of the spring constants of atomic force microscopy (AFM) cantilevers is one of the issues in biomechanics and nanomechanies for quantified force metrology at pieo- or nano Newton level. In this paper, we present an AFM cantilever calibration system: the Nano Force Calibrator (NFC), which consists of a precision balance and a one-dimensional stage. Three types of AFM cantilevers (contact and tapping mode) with different shapes (beam and V) and spring constants (42, 1, 0.06 N $m^{-1}$) are investigated using the NFC. The calibration results show that the NFC can calibrate the micro cantilevers ranging from 0.01 ${\sim}$ 100 N $m^{-1}$ with relative uncertainties of less than 2%.

• Journal of electromagnetic engineering and science
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• v.8 no.1
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• pp.6-11
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• 2008

Advances in low power design open the possibility to harvest energy from the environment to power electronic circuits. Electrical energy can be harvested from piezoelectric transducer. Piezoelectric materials can be used as mechanisms to transfer mechanical energy usually vibrating system into electrical energy that can be stored and used to power other devices. Micro- to milli-watts power can be generated from vibrating system. We developed definitive and analytical models to predict the power generated from a cantilever beam attached with piezoelectric transducer. Analytical models are pin-force method, enhanced pin-force method and Euler-Bernoulli method. Harmonic oscillations and random noise will be the two different forcing functions used to drive each system. It has been selected the best model for generating electric power based upon the analytical results obtained.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.31 no.1
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• pp.17-21
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• 2018

The natural frequency of a laminated cantilever microbeam was studied in the present investigation. The microbeam was made of quartz on a silicon chip, and its top and bottom surfaces were coated with thin(~30nm) gold films. An ultrasonic testing platform was employed to resonate the microbeam, and its time domain signal was optically measured. The natural frequency was quantified through the fast Fourier transform of the waveform, and the result showed good agreement with a theoretical estimation from the classical beam theory. This study is expected to provide a dynamic evaluation technique for micro/nanoscale materials and micromechanical structures.

• Structural Engineering and Mechanics
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• v.48 no.2
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• pp.195-205
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• 2013

The buckling problem of linearly tapered micro-columns is investigated on the basis of modified strain gradient elasticity theory. Bernoulli-Euler beam theory is used to model the non-uniform micro column. Rayleigh-Ritz solution method is utilized to obtain the critical buckling loads of the tapered cantilever micro-columns for different taper ratios. Some comparative results for the cases of rectangular and circular cross-sections are presented in graphical and tabular form to show the differences between the results obtained by modified strain gradient elasticity theory and those achieved by modified couple stress and classical theories. From the results, it is observed that the differences between critical buckling loads achieved by classical and those predicted by non-classical theories are considerable for smaller values of the ratio of the micro-column thickness (or diameter) at its bottom end to the additional material length scale parameters and the differences also increase due to increasing of the taper ratio.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.2
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• pp.175-180
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• 2009

In this article, we fabricated polytetrafluoroethylene(PTFE) nozzle treated by ion beam, in order to fabricate polymer based electrospray micro thruster with super hydrophobic nozzle. To obtain the super hydrophobic surface, PTFE surface is treated by argon and oxygen plasma treatment process. The optimal condition is investigated argon and oxygen flow rate as well as the paalied energy level for the treatment process. Fabricated nozzle was evaluated by measuring contact angle, and the surface morphology was examined by using scanning electron microscope(SEM) and atomic force microscope(AFM). We observe that jetting becomes more stable and repeatable on the treated nozzle. And to evaluate performance of fabricated nozzle, we measure micro scale thrust using a cantilever and a nozzle treated by ion beam laser displacement sensor.