• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 춘계학술대회논문집
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• pp.315-319
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• 2004

Static and dynamic responses of micro cantilever beam structures undertaking electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as resonant frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the applied voltage influences the deflection and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.166-171
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• 2004

In this study, shape optimization of micro-static mixer with a cantilever beam was accomplished for mixing the mixing efficiency by using successive response surface approximations. Variables were chosen as the length of cantilever beam and the angle between horizontal and the cantilever beam. Sequential approximate optimization method was used to deal with both highly nonlinear and non-smooth characteristics of flow field in a micro-static mixer. Shape optimization problem of a micro-static mixer can be divided into a series of simple subproblems. Approximation to solve the subproblems was performed by response surface approximation, which does not require the sensitivity analysis. To verify the reliability of approximated objective function and the accuracy of it, ANOVA analysis and variables selection method were implemented, respectively. It was verified that successive response surface approximation worked very well and the mixing efficiency was improved very much comparing with the initial shape of a micro-static mixer.

• 대한기계학회논문집B
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• 제27권2호
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• pp.236-242
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• 2003

Thermal bubbles find their diverse application areas in the MEMS (MicroElectroMechanial Systems) technology, including bubble jet printers, microactuators, micropumps, etc.. Especially, microactuators and micropumps, which use a microbubble growing by a controlled heat input, frequently involve mechanical and thermal interaction of the bubble with a solid structure, such as a cantilever beam and a membrane. Although the concept is experimentally verified that an internal pressure of the bubble can build up high enough to deflect a thin solid plate or a beam, the physics of the entire process have not yet been thoroughly explored. This work reports the experimental study of the growth of a thermal bubble while deflecting a thin cantilever beam. A physical model is presented to predict the elastic response of the cantilever beam based on the experimental measurements. The scaling law constructed through this work can provide a design guide for micro- and nano-systems that employ a thermal bubble for their actuation/pumping mechanism.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 추계학술대회논문집
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• pp.656-661
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• 2004

Static and dynamic responses of micro double cantilever beam structures interacted by electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as natural frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the variations of beam properties resulted by manufacturing process influence the deflections and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.

• Structural Engineering and Mechanics
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• 제61권2호
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• pp.193-207
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• 2017

In this study, the vibration of an electrostatically actuated micro cantilever beam is analyzed in which a viscoelastic layer covers a portion of the micro beam length. This proposed model is considered as the main element of mass and pollutant micro sensors. The nonlinear motion equation is extracted by means of Hamilton principle, considering nonlinear shortening effect for Euler-Bernoulli beam. The non-linear effects of electrostatic excitation, geometry and inertia have been taken into account. The viscoelastic model is assumed as Kelvin-Voigt model. The motion equation is discretized by Galerkin approach. The linear free vibration mode shapes of non-uniform micro beam i.e. the linear mode shape of the system by considering the geometric and inertia effects of viscoelastic layer, have been employed as comparison function in the process of the motion equation discretization. The discretized equation of motion is solved by the use of multiple scale method of perturbation theory and the results are compared with the results of numerical Runge-Kutta approach. The frequency response variations for different lengths and thicknesses of the viscoelastic layer have been founded. The results indicate that if a constant volume of viscoelastic layer is to be deposited on the micro beam for mass or gas sensor applications, then a modified configuration may be found by using the analysis of this paper.

• 대한기계학회논문집A
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• 제28권9호
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• pp.1314-1319
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• 2004

In this study, parameter optimization of micro-static mixer with a cantilever beam was accomplished for maximizing the mixing efficiency by using successive response surface approximations. Variables were chosen as the length of cantilever beam and the angle between horizontal and the cantilever beam. Sequential approximate optimization method was used to deal with both highly nonlinear and non-smooth characteristics of flow field in a micro-static mixer. Shape optimization problem of a micro-static mixer can be divided into a series of simple subproblems. Approximation to solve the subproblems was performed by response surface approximation, which does not require the sensitivity analysis. To verify the reliability of approximated objective function and the accuracy of it, ANOVA analysis and variables selection method were implemented, respectively. It was verified that successive response surface approximation worked very well and the mixing efficiency was improved very much comparing with the initial shape of a micro-static mixer.

• 한국소음진동공학회논문집
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• 제15권2호
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• pp.199-205
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• 2005

The governing equations of micro double cantilever beam structures interacted by electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as natural frequencies are estimated for applied voltages. In particular, it is investigated how the variations of beam properties resulted by manufacturing process influence the deflections and the modal characteristics. This study can help to design MEMS structures and to predict the performances with respect to manufacturing tolerances.

• 한국소음진동공학회논문집
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• 제14권9호
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• pp.846-851
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• 2004

Static and dynamic responses of micro cantilever beam structures undertaking electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as resonant frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the applied voltage influences the deflection and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.74-75
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• 2008

This work has suggested corrugation beam as a new structure for mechanical resonators. Micro beam resonators based on 3C-SiC films which have two side corrugations along the length of beams were simulated by finite-element modeling and compared to a flat rectangular beam with the same dimension. With the dimension of $36\times12\times0.5{\mu}m^3$, the flat cantilever has resonant frequency of 746 kHz. Meanwhile, this frequency reaches 1.252 MHz with the corrugated cantilever which has the same dimension with flat type but corrugation width of $6{\mu}m$ and depth of $0.4{\mu}m$. It is expected that mechanical resonators with corrugations will be very helpful for the research of sensing devices with high-resolution, high-performance oscillators and filters in wireless communications as well as measurement in basic physics.

• Transactions on Electrical and Electronic Materials
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• 제9권5호
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• pp.193-197
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• 2008

On the purpose of increasing resonant frequency without sacrificing quality factor as well as much decreasing dimensions, corrugated micro beam resonator based on polycrystalline 3C-SiC films is the applicable solution. In this work, appropriate corrugated structure is suggested to increase resonant frequency of resonators. Micro beam resonators based on 3C-SiC films which have a two-side corrugation along the length of beams were simulated by finite element method and compared to a same-size flat rectangular. With the dimension of 36x12x0.5 ${\mu}m^{3}$, the flat cantilever has resonant frequency of 746 kHz. Meanwhile, with this size but corrugation width of 6 ${\mu}m$ and depth of 0.4 ${\mu}m$, the corrugated cantilever reaches the resonant frequency at 1.252 MHz.