Dynamic Analysis of Micro Cantilever Beams Undertaking Electrostatic Forces

정전기력을 받는 마이크로 외팔보의 동적 해석

Static and dynamic responses of micro cantilever beam structures undertaking electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as resonant frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the applied voltage influences the deflection and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.