Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

Deflection of a Thin Solid Structure by a Thermal Bubble

열 기포에 의한 고체 박막의 변형 해석

  • 김호영 (한국과학기술연구원 열유동제어연구센터) ;
  • 이윤표 (한국과학기술연구원 열유동제어연구센터)
  • Published : 2003.02.01
Download PDF
⟨ Previous Next ⟩

Abstract

Thermal bubbles find their diverse application areas in the MEMS (MicroElectroMechanial Systems) technology, including bubble jet printers, microactuators, micropumps, etc.. Especially, microactuators and micropumps, which use a microbubble growing by a controlled heat input, frequently involve mechanical and thermal interaction of the bubble with a solid structure, such as a cantilever beam and a membrane. Although the concept is experimentally verified that an internal pressure of the bubble can build up high enough to deflect a thin solid plate or a beam, the physics of the entire process have not yet been thoroughly explored. This work reports the experimental study of the growth of a thermal bubble while deflecting a thin cantilever beam. A physical model is presented to predict the elastic response of the cantilever beam based on the experimental measurements. The scaling law constructed through this work can provide a design guide for micro- and nano-systems that employ a thermal bubble for their actuation/pumping mechanism.

Keywords

References

  1. Lin, L., Pisano, A. P., and Lee, A. P., 1991, Microbubble powered actuator, IEEE Trans-ducers '91, Piscataway, NJ, USA, pp. 1041-1044
  2. Bergstrom, P. L., Ji, J., Liu, Y.-N., Kaviany, M., and Wise, K. D., 1995, Thermally driven phase-change microactuation, J. Microelectro-mechanical Systems, Vol. 4, pp. 10-17 https://doi.org/10.1109/84.365365
  3. Xu, C, Hall, J., Richards, C, Bahr, D., and Richards, R., 2000, Design of a micro heat engine, Proceedings of IMECE 2000 - MEMS Vol. 2, pp. 261-267
  4. Beer, F. P., and Johnston, Jr., E. R., Mechanics of materials, McGraw-Hill
  5. Adamson, A. W., and Gast, A. P., 1997, Physical chemistry of surfaces, 6th ed. Wiley, New York
  6. Dussan V.. E. B., 1979, On the spreading of liquids on solid surfaces: Static and dynamic contact lines, Ann. Rev. Fluid Mech., Vol. 11, pp. 371-400 https://doi.org/10.1146/annurev.fl.11.010179.002103
  7. Timoshenko, S. P. and Goodier, J. N., 1970, Theory of Elasticity, 3rd ed., McGraw-Hill, Singapore
  8. Happel, J. and Brenner, H., 1965, Low Reynolds Number Hydrodynamics, Prentice-Hall, Englewood Cliffs, NJ