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http://dx.doi.org/10.5050/KSNVN.2004.14.9.846

Dynamic Analysis of Micro Cantilever Beams Undertaking Electrostatic Forces  

Jung Kang-Sik (한양대학교 대학원 기계설계학과)
Moon Seung-Jae (한양대학교 기계공학부)
Yoo Hong-Hee (한양대학교 공과대학 기계공학부)
Publication Information
Transactions of the Korean Society for Noise and Vibration Engineering / v.14, no.9, 2004 , pp. 846-851 More about this Journal
Abstract
Static and dynamic responses of micro cantilever beam structures undertaking electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as resonant frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the applied voltage influences the deflection and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.
Keywords
Structural Dynamics; Cantilever Beam; Modal Analysis; MEMS; Electrostatic Force;
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