• Title/Summary/Keyword: Metal Gate

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Transient trap density in thin silicon oxides

  • Kang, C.S.;Kim, D.J.;Byun, M.G.;Kim, Y.H.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.10 no.6
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    • pp.412-417
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    • 2000
  • High electric field stressed trap distributions were investigated in the thin silicon oxide of polycrystalline silicon gate metal oxide semiconductor capacitors. The transient currents associated with the off time of stressed voltage were used to measure the density and distribution of high voltage stress induced traps. The transient currents were due to the discharging of traps generated by high stress voltage in the silicon oxides. The trap distributions were relatively uniform near both cathode and anode interface in polycrystalline silicon gate metal oxide semiconductor devices. The stress generated trap distributions were relatively uniform the order of $10^{11}$~$10^{12}$ [states/eV/$\textrm{cm}^2$] after a stress. The trap densities at the oxide silicon interface after high stress voltages were in the $10^{10}$~$10^{13}$ [states/eV/$\textrm{cm}^2$]. It was appeared that the transient current that flowed when the stress voltages were applied to the oxide was caused by carriers tunneling through the silicon oxide by the high voltage stress generated traps.

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Properties of Organic PMMA Gate Insulator Film at Various Concentration and Film Thickness (PMMA 유기 게이트 절연막의 농도와 두께에 따른 특성)

  • Yoo, Byung-Chul;Gong, Su-Cheol;Shin, Ik-Sub;Shin, Sang-Bea;Lee, Hak-Min;Park, Hyung-Ho;Jeon, Hyung-Tag;Chang, Young-Chul;Chang, Ho-Jung
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.4
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    • pp.69-73
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    • 2007
  • The MIM(metal-insulator-metal) capacitors with the Al/PMMA/ITO/Glass structures were manufactured according to various PMMA concentration of 1, 2, 4, 6, 8 wt%. The lowest leakage current and the largest capacitance were found to be 2.3 pA and 1.2 nF, respectively, for the device with 2 wt% PMMA concentration. The measured capacitance of the devices was almost same values with the calculated one. The optimum film thickness was obtained at the value of 48 nm, showing that the capacitance and leakage current were 1.92 nF, 0.3 pA at 2 wt%, respectively. From this experiment, the PMMA gate insulator films can be applicable to the organic thin film transistors.

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Characteristics of Ferroelectric-Gate MFISFET Device Behaving to NDRO Configuration (NDRD 방식의 강유전체-게이트 MFSFET소자의 특성)

  • 이국표;강성준;윤영섭
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.40 no.1
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    • pp.1-10
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    • 2003
  • Device characteristics of the Metal-Ferroclecric-Semiconductor FET(MFSFET) are simulated in this study. The field-dependent polarization model and the square-law FET model are employed in our simulation. C-V$_{G}$ curves generated from our MFSFET simulation exhibit the accumulation, the depletion and the inversion regions clearly. The capacitance, the subthreshold and the drain current characteristics as a function of gate bias exhibit the memory windows are 1 and 2 V, when the coercive voltages of ferroelectric are 0.5 and 1 V respectively. I$_{D}$-V$_{D}$ curves are composed of the triode and the saturation regions. The difference of saturation drain currents of the MFSFET device at the dual threshold voltages in I$_{D}$-V$_{D}$ curve is 1.5, 2.7, 4.0, and 5.7 ㎃, when the gate biases are 0, 0.1, 0.2 and 0.3V respectively. As the drain current is demonstrated after time delay, PLZT(10/30/70) thin film shows excellent reliability as well as the decrease of saturation current is about 18 % after 10 years. Our simulation model is expected to be very useful in the estimation of the behaviour of MFSFET devices.T devices.

Channel and Gate Workfunction-Engineered CNTFETs for Low-Power and High-Speed Logic and Memory Applications

  • Wang, Wei;Xu, Hongsong;Huang, Zhicheng;Zhang, Lu;Wang, Huan;Jiang, Sitao;Xu, Min;Gao, Jian
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.16 no.1
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    • pp.91-105
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    • 2016
  • Carbon Nanotube Field-Effect Transistors (CNTFETs) have been studied as candidates for post Si CMOS owing to the better electrostatic control and high mobility. To enhance the immunity against short - channel effects (SCEs), the novel channel and gate engineered architectures have been proposed to improve CNTFETs performance. This work presents a comprehensive study of the influence of channel and gate engineering on the CNTFET switching, high frequency and circuit level performance of carbon nanotube field-effect transistors (CNTFETs). At device level, the effects of channel and gate engineering on the switching and high frequency characteristics for CNTFET have been theoretically investigated by using a quantum kinetic model. This model is based on two-dimensional non-equilibrium Green's functions (NEGF) solved self - consistently with Poisson's equations. It is revealed that hetero - material - gate and lightly doped drain and source CNTFET (HMG - LDDS - CNTFET) structure can significantly reduce leakage current, enhance control ability of the gate on channel, improve the switching speed, and is more suitable for use in low power, high frequency circuits. At circuit level, using the HSPICE with look - up table(LUT) based Verilog - A models, the impact of the channel and gate engineering on basic digital circuits (inverter, static random access memory cell) have been investigated systematically. The performance parameters of circuits have been calculated and the optimum metal gate workfunction combinations of ${\Phi}_{M1}/{\Phi}_{M2}$ have been concluded in terms of power consumption, average delay, stability, energy consumption and power - delay product (PDP). In addition, we discuss and compare the CNTFET-based circuit designs of various logic gates, including ternary and binary logic. Simulation results indicate that LDDS - HMG - CNTFET circuits with ternary logic gate design have significantly better performance in comparison with other structures.

Characterization of Gate Oxides with a Chlorine Incorporated $SiO_2/Si$ Interface (염소(Chlorine)가 도입된 $SiO_2/Si$ 계면을 가지는 게이트 산화막의 특성 분석)

  • Yu, Byoung-Gon;Lyu, Jong-Son;Roh, Tae-Moon;Nam, Kee-Soo
    • Journal of the Korean Vacuum Society
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    • v.2 no.2
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    • pp.188-198
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    • 1993
  • We have developed a technique for growing thin oxides (6~10 nm) by the Last step TCA method. N-channel metal-oxide-semiconductor (n-MOS) capacitor and n-channel metal-oxide-semiconductor field-effect transistor's (MOSFET's) having a gate oxide with chlorine incorporated $SiO_2/Si$ interface have been analyzed by electrical measurements and physical methods, such as secondary ion mass spectrometry (SIMS) and electron spectroscopy for chemical analysis (ESCA). The gate oxide grown with the Last strp TCA method has good characteristics as follows: the electron mobility of the MOSFET's with the Last step TCA method was increased by about 7% and the defect density at the $SiO_2/Si$ interface decreases slightly compared with that with No TCA method. In reliability estimation, the breakdown field was 18 MV/cm, 0.6 MV/cm higher than that of the gate oxide with No TCA method, and the lifetime estimated by TDDB measurement was longer than 20 years. The device lifetime estimated from hot-carrier reliability was proven to be enhanced. As the results, the gate oxide having a $SiO_2/Si$ interface incorporated with chlorine has good characteristics. Our new technique of Last step TCA method may be used to improve the endurance and retention of MOSFET's and to alleviate the degradation of thin oxides in short-channel MOS devices.

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FPGA based POS MPPT control for a small scale charging system of PV-nickel metal hydride battery (FPGA를 이용한 소형 태양광 발전 니켈 수소 전지 충전 시스템의 POS MPPT 제어)

  • Lee, Hyo-Geun;Seo, Hyo-Ryong;Kim, Gyeong-Hun;Park, Min-Won;Yu, In-Keun
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1306-1307
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    • 2011
  • Recently, the small scale photovoltaic (PV) electronic devices are drawing attention as the upcoming PV generation system. The PV system is commonly used in small scale PV applications such as LED lighting and cell phone. This paper proposes photovoltaic output sensorless (POS) maximum power point tracking (MPPT) control for a small scale charging system of PV-nickel metal hydride battery using field-programmable gate array (FPGA) controller. A converter is connected to a small scale PV cell and battery, and performs the POS MPPT at the battery terminal current instead of being at the PV cell output voltage and current. The FPGA controller and converter operate based on POS MPPT method. The experimental results show that the nickel metal hydride battery is charged by the maximum PV output power.

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A Layout-Based CMOS RF Model for RFIC's

  • Park Kwang Min
    • Transactions on Electrical and Electronic Materials
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    • v.4 no.3
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    • pp.5-9
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    • 2003
  • In this paper, a layout-based CMOS RF model for RFIC's including the capacitance effect, the skin effect, and the proximity effect between metal lines on the Si surface is proposed for the first time for accurately predicting the RF behavior of CMOS devices. With these RF effects, the RF equivalent circuit model based on the layout of the multi-finger gate transistor is presented. The capacitances between metal lines on the Si surface are modeled with the layout. And the skin effect is modeled to the equivalent ladder circuit of metal line. The proximity effect is modeled by adding the mutual inductance between cross-coupled inductances in the ladder circuit representation. Compared to the BSIM 3v3 and other models, the proposed RF model shows better agreements with the measured data and shows well the frequency dependent behavior of devices in GHz ranges.

Metal work function dependent photoresponse of schottky barrier metal-oxide-field effect transistors(SB MOSFETs) (금속(Al, Cr, Ni)의 일함수를 고려한 쇼트키 장벽 트랜지스터의 전기-광학적 특성)

  • Jung, Ji-Chul;Koo, Sang-Mo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.355-355
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    • 2010
  • We studied the dependence of the performance of schottky barrier metal-oxide-field effect transistors(SB MOSFETs) on the work function of source/drain metals. A strong impact of the various work functions and the light wavelengths on the transistor characteristics is found and explained using experimental data. We used an insulator of a high thickness (100nm) and back gate issues in SOI substrate, subthreshold swing was measured to 300~400[mV/dec] comparing with a ideal subthreshold swing of 60[mV/dec]. Excellent characteristics of Al/Si was demonstrated higher on/off current ratios of ${\sim}10^7$ than others. In addition, extensive photoresponse analysis has been performed using halogen and deuterium light sources(200<$\lambda$<2000nm).

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Graphene field-effect transistor for radio-frequency applications : review

  • Moon, Jeong-Sun
    • Carbon letters
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    • v.13 no.1
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    • pp.17-22
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    • 2012
  • Currently, graphene is a topic of very active research in fields from science to potential applications. For various radio-frequency (RF) circuit applications including low-noise amplifiers, the unique ambipolar nature of graphene field-effect transistors can be utilized for high-performance frequency multipliers, mixers and high-speed radiometers. Potential integration of graphene on Silicon substrates with complementary metal-oxide-semiconductor compatibility would also benefit future RF systems. The future success of the RF circuit applications depends on vertical and lateral scaling of graphene metal-oxide-semiconductor field-effect transistors to minimize parasitics and improve gate modulation efficiency in the channel. In this paper, we highlight recent progress in graphene materials, devices, and circuits for RF applications. For passive RF applications, we show its transparent electromagnetic shielding in Ku-band and transparent antenna, where its success depends on quality of materials. We also attempt to discuss future applications and challenges of graphene.

FPGA based POS MPPT Control for a Small Scale Charging System of PV-nickel Metal Hydride Battery (FPGA를 이용한 소형 태양광 발전 니켈 수소 전지 충전 시스템의 POS MPPT 제어)

  • Lee, Hyo-Guen;Seo, Hyo-Ryong;Kim, Gyeong-Hun;Park, Min-Won;Yu, In-Keun
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.61 no.1
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    • pp.80-84
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    • 2012
  • Recently, the small scale photovoltaic (PV) electronic devices are drawing attention as the upcoming PV generation system. The PV system is commonly used in small scale PV applications such as LED lighting and cell phone. This paper proposes photovoltaic output sensorless (POS) maximum power point tracking (MPPT) control for a small scale charging system of PV-nickel metal hydride battery using field-programmable gate array (FPGA) controller. A converter is connected to a small scale PV cell and battery, and performs the POS MPPT at the battery terminal current instead of being at the PV cell output voltage and current. The FPGA controller and converter operate based on POS MPPT method. The experimental results show that the nickel metal hydride battery is charged by the maximum PV output power.