• Proceedings of the KIEE Conference
• /
• 1999.07d
• /
• pp.1888-1890
• /
• 1999

In this work, we have systematically studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in Inter-Metal Dielectric(IMD) CMP. The filter Installation in CMP polisher makes defect reduced after IMD CMP. As a result of formation micro-scratches, it shows that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. We have acknowledged slurry filter lifetime is fixed by the degree of generating defects.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.11a
• /
• pp.185-188
• /
• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP Process, deionized water (DIW) pressure, purified $N_2$ (P$N_2$) gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• Proceedings of the Optical Society of Korea Conference
• /
• 1990.02a
• /
• pp.257-259
• /
• 1990

In the design of waveguide E-plane bandpass filter, it is very important to characterize the K-inverters. In the analytical method. losses arising from the metal and the dielectric are ignored for the simplicity of design process. In this paper, based on the new measurement method, characteristics of inverters are measured and compared with those calculated based on mode-matching analysis.

• Journal of the Optical Society of Korea
• /
• v.20 no.2
• /
• pp.263-268
• /
• 2016

Broadband metal-dielectric-metal terahertz filters composed of complementary rings are designed and demonstrated. Four samples with different parameters were fabricated. Results measured using THz time-domain spectroscopy system show excellent agreement with simulations. Compared with the broadband filters reported before, the complementary ring structure in our design is insensitive to any polarization at normal incidence due to symmetry of the ring. Furthermore, the influence of structure parameters (such as period, radius, slot width, thickness and incidence angles) on the transmission characteristics has been investigated theoretically. The encouraging results afforded by designing of the filters could find applications in broadband sensors, terahertz communication systems, and other emerging terahertz technologies.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.24 no.9
• /
• pp.1-7
• /
• 2010

Ceramic metal halide lamps have been widely used due to long lifetime, high luminous efficiency and good colour rendering. 35[W] ceramic metal halide lamps has very different characteristics between ignition state and steady state. The developed electronic ballast is satisfied to both ignition state and steady state characteristics by using a micro-controller. The proposed electronic ballast is consists of EMI filter, Full-wave rectifier, Active PFC, DBI(Dual Buck Inverter), Igniter and control circuit. It enables to supply both low-frequency rectangular wave voltage and current to the lamp by using DBI(Dual Bcuk Inverter) structure.

• Fire Science and Engineering
• /
• v.31 no.1
• /
• pp.89-97
• /
• 2017

This study analyzed the case of diesel car fires that occurred while driving in a tunnel 5 days after maintenance at a car service center. The results of the investigation and analysis found that a large amount of white foreign matter adhered to the inside of the exhaust port and the insulating plate above the DPF (diesel particulate filter) installed in the middle of the exhaust pipe was melted and lost. In particular, the metal floor of the car above the DPF was molten and pierced, and the rubber mat placed on the metal floor was burnt. Moreover, while the exhaust pipe in front of the DPF showed no overheating mark, such a mark was observed in the exhaust pipe from the DPF to the exhaust port. Because these findings may appear only when the DPF is overheated and ignited, this car fire is believed to have been caused by internal overheating of the DPF. The car fire investigation of this study suggests that if white foreign matter is found in the inside of the exhaust port during a fire cause investigation of a diesel car, the cause of the fire should be determined by removing the DPF and examining the internal damage of the DPF.

• Journal of the Institute of Electronics Engineers of Korea SC
• /
• v.42 no.5 s.305
• /
• pp.43-50
• /
• 2005

This paper describes some IC(integrated circuits) design and implementation techniques of low power multi-band Gm-C bandpass filter for body composition analyzer. Proposed BPF(bandpass filter) can be selected from three bands(20 KHz, 50 KHz, 100 KHz) by control signal. To minimize die area, a simple center frequency tuning scheme is used. And to reduce power consumption, operational transconductance amplifier operated in the sub-threshold region is adopted. The proposed BPF is implemented with 0.35 um 2-poly 3-metal standard CMOS technology Chip area is $626.42um\;{\times}\;475.8um$ and power consumption is 700 nW@100 KHz.

• Journal of Korean Society of Water and Wastewater
• /
• v.19 no.1
• /
• pp.25-30
• /
• 2005

In order to decrease the high costs of membrane process, we have tried to develop two alternatives to membrane; a cartridge type filter and a metal membrane were tested for the high permeation flux with low cost and low energy. This research mainly focused on three points; 1) operation with high permeation flux by using of a cartridge type filter and a metal membrane, 2) removals of the filterable organic materials (FOC) by pretreatments for the membrane fouling control, and 3) advanced wastewater treatment by SMBR process with intermittent aeration and high MLSS. An Intermittently aerated membrane bioreactor using a submerged micro filter (cartridge type) was applied in laboratory scale for the advanced wastewater treatment. To minimize membrane fouling, intermittent aeration was applied inside of the filter with $3.0kg_f/cm^2$. The experiments was conducted for 6 months with three different HRTs (8, 10, 12 hr) and high MLSS of 6,000 and 10,000mg/L. The filtration process could be operated up to 50 days with permeation flux of 500LMH. Regardless of the operating conditions, more than 95% of COD, BOD and SS were removed. Fast and complete nitrification was accomplished, and denitrification was appeared to be the rate-limiting step. More than 75% T-N could be removed due to the endogenous denitrification. T-P removal efficiency was increased to 80% under the condition of MLSS 10,000mg/L.

• The Journal of the Korea Contents Association
• /
• v.10 no.7
• /
• pp.40-48
• /
• 2010

Reflected-Ultraviolet photography is applied to the evidence of crime, Archaeology, and Dermatology. In the past, Ultraviolet photography was done with standard black-and-white film. Because emulsion of film is more sensitive to near UV light than CCD(Charge Coupled Device) or CMOS(Complementary Metal-Oxide-Semiconductor)of digital camera. In this research, we purpose to improve qulity of ultraviolet photographs and to find out the best alternative digital camera by utilizing a cunsumer digital camera. To achieve theses, we removed IR cutoff filter from digital camera. And by using modified UV pass filter, we verified the increase of image resolution of digital ultraviolet photographs. Also, we analyze reproducibility of digital ultraviolet photographs according to type, size, pixel of image sensor. Furthermore, this research resulted in the development of an practical digital camera system by utilizing a cunsumer digital camera. Eventually, it will contribute to practical use in the various field of digital ultraviolet photographs

• Composites Research
• /
• v.12 no.1
• /
• pp.68-75
• /
• 1999

This study has observed that the dynamic behavior of Metal Matrix Composites (MMCs) in low velocity impact varies with impact velocity. MMCs with 15 fiber volume percent were fabricated by using the squeeze casting method. The AC8A was used as the matrix, and the alumina and the carbon were used as reinforcements. The tensile and vibration tests conducted yielded the yielded the tensile stress and elastic modulus of MMCs The low pass filter and instrumented impact test machine was adopted to study dynamic behaviors of MMCs corresponding to impact velocity. Stable impact signals were obtained by using the low pass filter. Impact corresponding to impact velocity. Stable impact signals were obtained by using the low pass filter. Impact energy of unreinforced alloy and MM s increased as the impact velocity increased. The increase of crack propagation energy was especially prominent, but the dynamic toughness of each material did not change much. To show the relation between crack initiation energy and dynamic fracture toughness, a simple model was proposed by using the strain energy and stress distribution at notch. The model revealed that crack initiation energy is proportional to the square of dynamic fracture toughness and inversely proportional to elastic modulus.