• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.23 no.12
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• pp.1082-1089
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• 2013

3-Axis sensor measurement system is needed for measuring ride quality of elevator. But because 3-Axis piezoelectric accelerometer is expensive. We developed 3-Axis sensor system which is suitable for measuring ride quality of elevator using cheap MEMS sensor. There are two types of MEMS sensor that are piezoresistive and capacitive type. The excellence of piezoresistive type in characteristic of frequency response and noise is confirmed compare to capacitive type as a result of this paper's experiment and reference. 3-Axis system using MEMS sensor needs MEMS's proper frequency response characteristic. Additionally noise characteristic of sensor and circuit, stiffness of assembly are needed for deciding frequency range and accuracy of amplitude.

• Journal of Sensor Science and Technology
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• v.17 no.3
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• pp.183-187
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• 2008

A sub-ppm level MEMS gas sensor that can be used for the detection of formaldehyde (HCHO) is presented. It is realized by using a zinc oxide (ZnO) thin-film material with a Ni-seed layer as a sensing material and by bulk micromachining technology. To enhance sensitivity of the MEMS gas sensor with Ni-seed layer was embedded with ZnO sensing material and sensing electrodes. As experimental results, the changed sensor resistance ratio for HCHO gas was 9.65 % for 10 ppb, 18.06 % for 100 ppb, and 35.7 % for 1 ppm, respectively. In addition, the minimum detection level of the fabricated MEMS gas sensor was 10 ppb for the HCHO gas. And the measured output voltage was about 0.94 V for 10 ppb HCHO gas concentration. The noise level of the fabricated MEMS gas sensor was about 50 mV. The response and recovery times were 3 and 5 min, respectively. The consumption power of the Pt micro-heater under sensor testing was 184 mW and its operating temperature was $400^{\circ}C$.

• Journal of information and communication convergence engineering
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• v.15 no.4
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• pp.232-236
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• 2017

A digital vacuum pressure sensor is designed, fabricated, and characterized using a packaged MEMS analog Pirani gauge. The packaged MEMS analog Pirani gauge requires a current source to heat up a heater in the Pirani gauge. To investigate the feasibility of digitization for the analog Pirani gauge, its implementation is performed with a zero-temperature coefficient current source and microcontroller that are commercially available. The measurement results using the digital vacuum pressure sensor showed that its operating range is 0.05-760 Torr, which is the same as the measurement results of the packaged MEMS analog pressure sensor. The results confirm that it is feasible to integrate the analog Pirani gauge with a commercially available current source and microcontroller. The successful hybrid integration of the analog Pirani gauge and digital circuits is an encouraging result for monolithic integration with a precision current source and ADCs in the state of CMOS dies.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.5
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• pp.232-237
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• 2005

In this paper, we fabricated $CO_2$ gas sensor based on the MEMS infrared sensor and characterized its electrical and $CO_2$-sensing properties. The fabricated $CO_2$ gas sensor by MEMS technique has many advanges over NDIR(nondispersive) $CO_2$ sensor such as monolithic fabrication, very high selectivity on $CO_2$, low power consumption and compact system. Microbolometer by surface micromachining was fabricated for gas detector and $CO_2$ filter chip by bulk micromachining was fabricated for signal referencing. By using the proposed and fabricated gas sensor, we are expected to measure $CO_2$ concentration more accurately with high reliability.

• Transactions on Electrical and Electronic Materials
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• v.7 no.4
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• pp.184-188
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• 2006

This work describes efforts in the fabrication and testing of robust microelectromechanical systems (MEMS). Robustness is typically achieved by investigating non-silicon substrates and materials for MEMS fabrication. Some of the traditional MEMS fabrication techniques are applicable to robust MEMS, while other techniques are drawn from other technology areas, such as electronic packaging. The fabrication technologies appropriate for robust MEMS are illustrated through laminated polymer membrane based pressure sensor arrays. Each array uses a stainless steel substrate, a laminated polymer film as a suspended movable plate, and a fixed, surface micromachined back electrode of electroplated nickel. Over an applied pressure range from 0 to 34 kPa, the net capacitance change was approximately 0.14 pF. An important attribute of this design is that only the steel substrate and the pressure sensor inlet is exposed to the flow; i.e., the sensor is self-packaged.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1468-1469
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• 2008

기상관측 분야에서는 풍속센서의 소형화 요구가 커지고 있어 Air flow sensor를 이용한 MEMS(Micro Electro Mechanical System) 풍향 풍속센서의 응용연구가 활발하다. MEMS 풍향 풍속 센서는 수 mm 크기를 가지면서도 바람의 세기와 함께 방향을 측정하여야 하는데, 센서 칩이 노출되어 있어 외부환경으로부터 영향을 받기 때문에 센서소자의 내오염성과 내구성 확보가 중요하다. 따라서 본 연구에서는 절연막으로 비점착성의 테프론 막을 적용하여 외부환경으로부터 영향을 줄일 수 있는 열감지 방식의 MEMS 풍향 풍속 센서 칩을 제작하였다. 테프론 코팅막을 이용한 풍향 풍속 센서는 0.1m/s의 resolution을 가지며, 최대 15m/s까지 측정이 가능하여, 오염에 강하고 발수성을 센서를 제작하였다.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.15 no.10
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• pp.3554-3570
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• 2021

With the rapid development of the Chinese water project, the safety monitoring of dams is urgently needed. Many drawbacks exist in dams, such as high monitoring costs, a limited equipment service life, long-term monitoring difficulties. MEMS sensors have the advantages of low cost, high precision, easy installation, and simplicity, so they have broad application prospects in engineering measurements. This paper designs intelligent monitoring based on the collaborative measurement of dual MEMS sensors. The system first determines the endpoint coordinates of the sensor array by the coordinate transformation relationship in the monitoring system and then obtains the dam settlement according to the endpoint coordinates. Next, this paper proposes a dual-MEMS sensor collaborative measurement algorithm that builds a mathematical model of the dual-sensor measurement. The monitoring system realizes mutual compensation between sensor measurement data by calculating the motion constraint matrix between the two sensors. Compared with the single-sensor measurement, the dual-sensor measurement algorithm is more accurate and can improve the reliability of long-term monitoring data. Finally, the experimental results show that the dam subsidence monitoring system proposed in this paper fully meets the engineering monitoring accuracy needs, and the dual-sensor collaborative measurement system is more stable than the single-sensor monitoring system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.360-361
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• 2006

This paper describes a wire and wireless network sensor for temperature and humidity measurements. The network sensor comprises PLC(Power Line Communication) and RF transmitter(433MHz) for acquiring an internal (on-board) sensor signal, and measured data is transmitted to a main processing unit. The network sensor module is consist of MEMS sensor, 10-bit A/D converter, pre-amp., gain-amp., ADUC812 one chip processor and PLC/RF transmitting unit. The temperature and humidity sensor is based on MEMS piezoelectric membrane structure and is implemented by using dual function sensor for smart home and smart building.

• Journal of Korean Association for Spatial Structures
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• v.17 no.1
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• pp.93-100
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• 2017

With increasing number construction of high-rise building which has about 40 to 60 floors there have been many kinds of problem which related with usage from vibration. To predict response acceleration, it is important to assess correct natural frequency. However, due to the noise of MEMS sensor, it is difficult to measure dynamic characteristic such as natural frequency when measuring ambient vibration using MEMS sensor within cell phone. Therefore, a comparative analysis on vibration measuring applications was performed after measuring ambient vibration of 2 skyscrappers which have height between 133.5~244.3m that are located in Seoul and Observation tower using I-jishin APP with noise reduction function of MEMS sensor in order to verify the effectiveness of low noise type vibration measurement APP.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.9
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• pp.976-981
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• 2009

MEMS capacitive gap sensor is developed for measuring abrasion depth of gun barrel rifling. Measuring abrasion depth of gun barrel rifling is very important because it is related with exactness of firing and life of arms. The method using a gap sensor is not to hurt rifling. And it can measure abrasion depth through minimum shooting, because the developed gap sensor can measure from $1{\mu}m{\sim}12{\mu}m$ using Polydimethylsiloxane(PDMS) material and making a stretchable electrode on PDMS. And it's resolution is 1 ${\mu}m$ using capacitive method and MEMS technology.