• Journal of Korean Society on Water Environment
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• v.28 no.5
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• pp.639-645
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• 2012

The purpose of this study is to identify the possibility of the CMP wastewater treatment from semiconductor fabrication under operating tubular membrane with coagulants. To find suitable coagulants treating CMP wastewater, we conducted Jar-test. After Jar-test experiments suitable coagulants are PAC(17%), $Ca(OH)_2$ and optimum coagulant dosage is PAC(17%) 10mg/L, $Ca(OH)_2$ 110 ~ 120mg/L. Based on these results, the tubular membrane was applied to CMP wastewater, the turbidity removal efficiency is $Ca(OH)_2$ > PAC(17%) > Nothing. The fast cross-flow velocity and backwash process what are operating characteristics of tubular membrane can be stable CMP wastewater treatment. But when the coagulant and tubular membrane are used at the same time, the withdraw and treatment of the CMP wastewater are possibile. However further treatment process needs if treated water will be used for semiconductor fabrications.

• Transactions of the Korean hydrogen and new energy society
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• v.21 no.4
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• pp.264-270
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• 2010

Recently, the most promising methods for high purity hydrogen production are membranes separation such as polymer, metal, ceramic and composites. It is well known that Pd and Pd-alloys membranes have excellent properties for hydrogen separation. However, it has hydrogen embrittlement and high cost for practical applications. Therefore, most scientists have studied new materials instead of Pd and Pd-alloys. On the other hand, TiN powders are great in resistance to acids and chemically stable under high operating temperature. In order to get specimens for hydrogen permeation, the TiN powders synthesized were consolidated together with Co, Ni powders by hot press sintering (HPS). During the consolidation of powders at HPS, heating rate was 10 K/min and the pressure was 10 MPa. It was characterized by XRD, SEM. Also, we estimated the hydrogen permeability by Sievert's type hydrogen permeation membrane equipment.

• Applied Chemistry for Engineering
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• v.34 no.3
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• pp.213-220
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• 2023

Mixed-matrix membranes (MMMs), which are composed of a polymer matrix filled with high-performance fillers as a dispersed phase, have been intensively studied for gas separations for the past 30 years. It has been demonstrated that MMMs exhibit superior gas separation performance compared to polymer membranes and are more scalable than polycrystalline membranes. Despite their potential, the commercialization of MMMs has yet to be reported due to several challenging issues. One of the major challenges of MMMs is the non-ideal interface between the continuous polymer phase and dispersed phase, which can result in defect formation (i.e., interfacial voids, etc.). With respect, many MMM studies have focused on addressing the issues through scientific approaches. The engineering approaches for facile and effective large-scale fabrication of MMMs, however, have been relatively underestimated. In this review paper, a novel strategy for fabricating MMMs in a facile and scalable manner using in situ metal-organic framework (MOF) formation is introduced. This new MMM fabrication methodology can effectively address the issues facing current MMMs, likely facilitating the commercialization of MMMs.

• The Korean Journal of Ceramics
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• v.7 no.1
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• pp.36-40
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• 2001

In order to fabricate uncooled IR sensors for pyroelectric applications, multilayered thin films of Pt/PbTiO$_3$/Pt/Ti/Si$_3$N$_4$/SiO$_2$/Si and thermally isolating membrane structures of square-shaped/cantilevers-shaped microstructures were prepared. Cavity was also fabricated via direct silicon wafer bonding and etching technique. Metallic Pt layer was deposited by ion beam sputtering while PbTiO$_3$ thin films were prepared by sol-gel technique. Micromachining technology was used to fabricate microstructured-membrane detectors. In order to avoid a difficulty of etching active layers, silicon-nitride membrane structure was fabricated through the direct bonding and etching of the silicon wafer. Although multilayered thin film deposition and device fabrications were processed independently, these could b integrated to make IR micro-sensor devices.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.2
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• pp.88-92
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• 2006

We present a microfluidic system with microvalves and a micropump that are easily integrated on the same substrate using the same fabrication process. The fabricated microfluidic system is suitable for use as a disposable device and its characteristics are optimized for use as a micro chemical analysis system (micro-TAS) and lab-on-a-chip. The system is realized by means of a polydimethylsiloxane (PDMS)-glass chip and an indium tin oxide (ITO) heater. We demonstrate the integration of the micropump and microvalves using a new thermopneumatic-actuated PDMS-based microfluidic system. A maximum pumping rate of about 730 nl/min is observed at. a duty ratio of 1 $\%$ and a frequency of 2 Hz with a fixed power of 500 mW. The measured power at flow cut-off is 500 mW for the microvalve whose channel width, depth and membrane thickness were 400 $\mu$m, 110 $\mu$m, and 320 $\mu$m, respectively.