한국물환경학회지 (Journal of Korean Society on Water Environment)

  • 제28권5호
  • /
  • Pages.639-645
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  • 2012
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  • 2289-0971(pISSN)
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  • 2289-098X(eISSN)
한국물환경학회 (Korean Society on Water Environment)
권호 표지

응집제와 관형막을 활용한 CMP 폐수 처리 가능성 연구

The Feasibility Study of CMP Wastewater Treatment Using Tubular Membrane and Coagulants

  • 정호찬 (웅진코웨이 환경기술연구소 환경기술연구팀) ;
  • 정철중 (웅진코웨이 환경기술연구소 환경기술연구팀) ;
  • 송자연 (웅진코웨이 환경기술연구소 환경기술연구팀) ;
  • 김연국 (웅진코웨이 환경기술연구소 환경기술연구팀) ;
  • 이선용 (웅진코웨이 환경기술연구소 환경기술연구팀)
  • Jung, Ho Chan (Woongjin Coway Co., Ltd. Institute of Environmental Technology, Environmental Technology Research Team) ;
  • Jung, Cheol Joong (Woongjin Coway Co., Ltd. Institute of Environmental Technology, Environmental Technology Research Team) ;
  • Song, Ja Yeon (Woongjin Coway Co., Ltd. Institute of Environmental Technology, Environmental Technology Research Team) ;
  • Kim, Youn Kook (Woongjin Coway Co., Ltd. Institute of Environmental Technology, Environmental Technology Research Team) ;
  • Lee, Sun Yong (Woongjin Coway Co., Ltd. Institute of Environmental Technology, Environmental Technology Research Team)
  • 발행 : 2012.09.30
⟨ 이전 논문 다음 논문 ⟩

초록

The purpose of this study is to identify the possibility of the CMP wastewater treatment from semiconductor fabrication under operating tubular membrane with coagulants. To find suitable coagulants treating CMP wastewater, we conducted Jar-test. After Jar-test experiments suitable coagulants are PAC(17%), $Ca(OH)_2$ and optimum coagulant dosage is PAC(17%) 10mg/L, $Ca(OH)_2$ 110 ~ 120mg/L. Based on these results, the tubular membrane was applied to CMP wastewater, the turbidity removal efficiency is $Ca(OH)_2$ > PAC(17%) > Nothing. The fast cross-flow velocity and backwash process what are operating characteristics of tubular membrane can be stable CMP wastewater treatment. But when the coagulant and tubular membrane are used at the same time, the withdraw and treatment of the CMP wastewater are possibile. However further treatment process needs if treated water will be used for semiconductor fabrications.

키워드

참고문헌

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